9/8/2011	12:00:19 AM	Helium valve closed
9/8/2011	12:00:19 AM	H2 valve closed
9/8/2011	12:00:19 AM	BCl3 valve closed
9/8/2011	12:00:19 AM	PH3 valve closed
9/8/2011	12:00:19 AM	SiCl4 pre valve closed
9/8/2011	12:00:19 AM	SiCl4 post valve closed
9/8/2011	12:00:19 AM	Bypass valve closed
9/8/2011	12:00:19 AM	Bubbler valve closed
9/8/2011	12:00:19 AM	Main Vac valve opened
9/8/2011	12:00:19 AM	Helium MFC set to  0.000000
9/8/2011	12:00:19 AM	H2 MFC set to  0.000000
9/8/2011	12:00:19 AM	BCl3 MFC set to  0.000000
9/8/2011	12:00:19 AM	PHl3 MFC set to  0.000000
9/8/2011	12:00:19 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:00:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:00:19 AM	Tube furnace set to 0
9/8/2011	12:00:49 AM	H2 valve closed
9/8/2011	12:00:49 AM	BCl3 valve closed
9/8/2011	12:00:49 AM	PH3 valve closed
9/8/2011	12:00:49 AM	SiCl4 pre valve closed
9/8/2011	12:00:49 AM	SiCl4 post valve closed
9/8/2011	12:00:49 AM	Bypass valve closed
9/8/2011	12:00:49 AM	Bubbler valve closed
9/8/2011	12:00:49 AM	Helium valve opened
9/8/2011	12:00:49 AM	Main Vac valve opened
9/8/2011	12:00:49 AM	Helium MFC set to  20.000000
9/8/2011	12:00:49 AM	H2 MFC set to  0.000000
9/8/2011	12:00:49 AM	BCl3 MFC set to  0.000000
9/8/2011	12:00:49 AM	PHl3 MFC set to  0.000000
9/8/2011	12:00:49 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:00:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:00:49 AM	Tube furnace set to 0
9/8/2011	12:01:19 AM	Helium valve closed
9/8/2011	12:01:19 AM	H2 valve closed
9/8/2011	12:01:19 AM	BCl3 valve closed
9/8/2011	12:01:19 AM	PH3 valve closed
9/8/2011	12:01:19 AM	SiCl4 pre valve closed
9/8/2011	12:01:19 AM	SiCl4 post valve closed
9/8/2011	12:01:19 AM	Bypass valve closed
9/8/2011	12:01:19 AM	Bubbler valve closed
9/8/2011	12:01:19 AM	Main Vac valve opened
9/8/2011	12:01:19 AM	Helium MFC set to  0.000000
9/8/2011	12:01:19 AM	H2 MFC set to  0.000000
9/8/2011	12:01:19 AM	BCl3 MFC set to  0.000000
9/8/2011	12:01:19 AM	PHl3 MFC set to  0.000000
9/8/2011	12:01:19 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:01:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:01:19 AM	Tube furnace set to 0
9/8/2011	12:01:49 AM	H2 valve closed
9/8/2011	12:01:49 AM	BCl3 valve closed
9/8/2011	12:01:49 AM	PH3 valve closed
9/8/2011	12:01:49 AM	SiCl4 pre valve closed
9/8/2011	12:01:49 AM	SiCl4 post valve closed
9/8/2011	12:01:49 AM	Bypass valve closed
9/8/2011	12:01:49 AM	Bubbler valve closed
9/8/2011	12:01:49 AM	Helium valve opened
9/8/2011	12:01:49 AM	Main Vac valve opened
9/8/2011	12:01:49 AM	Helium MFC set to  20.000000
9/8/2011	12:01:49 AM	H2 MFC set to  0.000000
9/8/2011	12:01:49 AM	BCl3 MFC set to  0.000000
9/8/2011	12:01:49 AM	PHl3 MFC set to  0.000000
9/8/2011	12:01:49 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:01:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:01:49 AM	Tube furnace set to 0
9/8/2011	12:02:19 AM	Helium valve closed
9/8/2011	12:02:19 AM	H2 valve closed
9/8/2011	12:02:19 AM	BCl3 valve closed
9/8/2011	12:02:19 AM	PH3 valve closed
9/8/2011	12:02:19 AM	SiCl4 pre valve closed
9/8/2011	12:02:19 AM	SiCl4 post valve closed
9/8/2011	12:02:19 AM	Bypass valve closed
9/8/2011	12:02:19 AM	Bubbler valve closed
9/8/2011	12:02:19 AM	Main Vac valve opened
9/8/2011	12:02:19 AM	Helium MFC set to  0.000000
9/8/2011	12:02:19 AM	H2 MFC set to  0.000000
9/8/2011	12:02:19 AM	BCl3 MFC set to  0.000000
9/8/2011	12:02:19 AM	PHl3 MFC set to  0.000000
9/8/2011	12:02:19 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:02:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:02:20 AM	Tube furnace set to 0
9/8/2011	12:02:50 AM	H2 valve closed
9/8/2011	12:02:50 AM	BCl3 valve closed
9/8/2011	12:02:50 AM	PH3 valve closed
9/8/2011	12:02:50 AM	SiCl4 pre valve closed
9/8/2011	12:02:50 AM	SiCl4 post valve closed
9/8/2011	12:02:50 AM	Bypass valve closed
9/8/2011	12:02:50 AM	Bubbler valve closed
9/8/2011	12:02:50 AM	Helium valve opened
9/8/2011	12:02:50 AM	Main Vac valve opened
9/8/2011	12:02:50 AM	Helium MFC set to  20.000000
9/8/2011	12:02:50 AM	H2 MFC set to  0.000000
9/8/2011	12:02:50 AM	BCl3 MFC set to  0.000000
9/8/2011	12:02:50 AM	PHl3 MFC set to  0.000000
9/8/2011	12:02:50 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:02:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:02:50 AM	Tube furnace set to 0
9/8/2011	12:03:20 AM	Helium valve closed
9/8/2011	12:03:20 AM	H2 valve closed
9/8/2011	12:03:20 AM	BCl3 valve closed
9/8/2011	12:03:20 AM	PH3 valve closed
9/8/2011	12:03:20 AM	SiCl4 pre valve closed
9/8/2011	12:03:20 AM	SiCl4 post valve closed
9/8/2011	12:03:20 AM	Bypass valve closed
9/8/2011	12:03:20 AM	Bubbler valve closed
9/8/2011	12:03:20 AM	Main Vac valve opened
9/8/2011	12:03:20 AM	Helium MFC set to  0.000000
9/8/2011	12:03:20 AM	H2 MFC set to  0.000000
9/8/2011	12:03:20 AM	BCl3 MFC set to  0.000000
9/8/2011	12:03:20 AM	PHl3 MFC set to  0.000000
9/8/2011	12:03:20 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:03:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:03:20 AM	Tube furnace set to 0
9/8/2011	12:03:50 AM	H2 valve closed
9/8/2011	12:03:50 AM	BCl3 valve closed
9/8/2011	12:03:50 AM	PH3 valve closed
9/8/2011	12:03:50 AM	SiCl4 pre valve closed
9/8/2011	12:03:50 AM	SiCl4 post valve closed
9/8/2011	12:03:50 AM	Bypass valve closed
9/8/2011	12:03:50 AM	Bubbler valve closed
9/8/2011	12:03:50 AM	Helium valve opened
9/8/2011	12:03:50 AM	Main Vac valve opened
9/8/2011	12:03:50 AM	Helium MFC set to  20.000000
9/8/2011	12:03:50 AM	H2 MFC set to  0.000000
9/8/2011	12:03:50 AM	BCl3 MFC set to  0.000000
9/8/2011	12:03:50 AM	PHl3 MFC set to  0.000000
9/8/2011	12:03:50 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:03:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:03:50 AM	Tube furnace set to 0
9/8/2011	12:04:20 AM	Helium valve closed
9/8/2011	12:04:20 AM	H2 valve closed
9/8/2011	12:04:20 AM	BCl3 valve closed
9/8/2011	12:04:20 AM	PH3 valve closed
9/8/2011	12:04:20 AM	SiCl4 pre valve closed
9/8/2011	12:04:20 AM	SiCl4 post valve closed
9/8/2011	12:04:20 AM	Bypass valve closed
9/8/2011	12:04:20 AM	Bubbler valve closed
9/8/2011	12:04:20 AM	Main Vac valve opened
9/8/2011	12:04:20 AM	Helium MFC set to  0.000000
9/8/2011	12:04:20 AM	H2 MFC set to  0.000000
9/8/2011	12:04:20 AM	BCl3 MFC set to  0.000000
9/8/2011	12:04:20 AM	PHl3 MFC set to  0.000000
9/8/2011	12:04:20 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:04:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:04:20 AM	Tube furnace set to 0
9/8/2011	12:04:50 AM	H2 valve closed
9/8/2011	12:04:50 AM	BCl3 valve closed
9/8/2011	12:04:50 AM	PH3 valve closed
9/8/2011	12:04:50 AM	SiCl4 pre valve closed
9/8/2011	12:04:50 AM	SiCl4 post valve closed
9/8/2011	12:04:50 AM	Bypass valve closed
9/8/2011	12:04:50 AM	Bubbler valve closed
9/8/2011	12:04:50 AM	Helium valve opened
9/8/2011	12:04:50 AM	Main Vac valve opened
9/8/2011	12:04:50 AM	Helium MFC set to  20.000000
9/8/2011	12:04:50 AM	H2 MFC set to  0.000000
9/8/2011	12:04:50 AM	BCl3 MFC set to  0.000000
9/8/2011	12:04:50 AM	PHl3 MFC set to  0.000000
9/8/2011	12:04:50 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:04:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:04:51 AM	Tube furnace set to 0
9/8/2011	12:05:21 AM	Helium valve closed
9/8/2011	12:05:21 AM	H2 valve closed
9/8/2011	12:05:21 AM	BCl3 valve closed
9/8/2011	12:05:21 AM	PH3 valve closed
9/8/2011	12:05:21 AM	SiCl4 pre valve closed
9/8/2011	12:05:21 AM	SiCl4 post valve closed
9/8/2011	12:05:21 AM	Bypass valve closed
9/8/2011	12:05:21 AM	Bubbler valve closed
9/8/2011	12:05:21 AM	Main Vac valve opened
9/8/2011	12:05:21 AM	Helium MFC set to  0.000000
9/8/2011	12:05:21 AM	H2 MFC set to  0.000000
9/8/2011	12:05:21 AM	BCl3 MFC set to  0.000000
9/8/2011	12:05:21 AM	PHl3 MFC set to  0.000000
9/8/2011	12:05:21 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:05:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:05:21 AM	Tube furnace set to 0
9/8/2011	12:05:51 AM	H2 valve closed
9/8/2011	12:05:51 AM	BCl3 valve closed
9/8/2011	12:05:51 AM	PH3 valve closed
9/8/2011	12:05:51 AM	SiCl4 pre valve closed
9/8/2011	12:05:51 AM	SiCl4 post valve closed
9/8/2011	12:05:51 AM	Bypass valve closed
9/8/2011	12:05:51 AM	Bubbler valve closed
9/8/2011	12:05:51 AM	Helium valve opened
9/8/2011	12:05:51 AM	Main Vac valve opened
9/8/2011	12:05:51 AM	Helium MFC set to  20.000000
9/8/2011	12:05:51 AM	H2 MFC set to  0.000000
9/8/2011	12:05:51 AM	BCl3 MFC set to  0.000000
9/8/2011	12:05:51 AM	PHl3 MFC set to  0.000000
9/8/2011	12:05:51 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:05:51 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:05:51 AM	Tube furnace set to 0
9/8/2011	12:06:21 AM	Helium valve closed
9/8/2011	12:06:21 AM	H2 valve closed
9/8/2011	12:06:21 AM	BCl3 valve closed
9/8/2011	12:06:21 AM	PH3 valve closed
9/8/2011	12:06:21 AM	SiCl4 pre valve closed
9/8/2011	12:06:21 AM	SiCl4 post valve closed
9/8/2011	12:06:21 AM	Bypass valve closed
9/8/2011	12:06:21 AM	Bubbler valve closed
9/8/2011	12:06:21 AM	Main Vac valve opened
9/8/2011	12:06:21 AM	Helium MFC set to  0.000000
9/8/2011	12:06:21 AM	H2 MFC set to  0.000000
9/8/2011	12:06:21 AM	BCl3 MFC set to  0.000000
9/8/2011	12:06:21 AM	PHl3 MFC set to  0.000000
9/8/2011	12:06:21 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:06:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:06:21 AM	Tube furnace set to 0
9/8/2011	12:06:51 AM	H2 valve closed
9/8/2011	12:06:51 AM	BCl3 valve closed
9/8/2011	12:06:51 AM	PH3 valve closed
9/8/2011	12:06:51 AM	SiCl4 pre valve closed
9/8/2011	12:06:51 AM	SiCl4 post valve closed
9/8/2011	12:06:51 AM	Bypass valve closed
9/8/2011	12:06:51 AM	Bubbler valve closed
9/8/2011	12:06:51 AM	Helium valve opened
9/8/2011	12:06:51 AM	Main Vac valve opened
9/8/2011	12:06:51 AM	Helium MFC set to  20.000000
9/8/2011	12:06:51 AM	H2 MFC set to  0.000000
9/8/2011	12:06:51 AM	BCl3 MFC set to  0.000000
9/8/2011	12:06:51 AM	PHl3 MFC set to  0.000000
9/8/2011	12:06:51 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:06:51 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:06:51 AM	Tube furnace set to 0
9/8/2011	12:07:22 AM	Helium valve closed
9/8/2011	12:07:22 AM	H2 valve closed
9/8/2011	12:07:22 AM	BCl3 valve closed
9/8/2011	12:07:22 AM	PH3 valve closed
9/8/2011	12:07:22 AM	SiCl4 pre valve closed
9/8/2011	12:07:22 AM	SiCl4 post valve closed
9/8/2011	12:07:22 AM	Bypass valve closed
9/8/2011	12:07:22 AM	Bubbler valve closed
9/8/2011	12:07:22 AM	Main Vac valve opened
9/8/2011	12:07:22 AM	Helium MFC set to  0.000000
9/8/2011	12:07:22 AM	H2 MFC set to  0.000000
9/8/2011	12:07:22 AM	BCl3 MFC set to  0.000000
9/8/2011	12:07:22 AM	PHl3 MFC set to  0.000000
9/8/2011	12:07:22 AM	SiCl4 MFC set to  0.000000
9/8/2011	12:07:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:07:22 AM	Tube furnace set to 0
9/8/2011	12:07:23 AM	Run finished at 12:07 AM
9/8/2011	12:07:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	9:42:47 AM	Main Vac valve closed
9/8/2011	9:42:54 AM	Main Vac valve opened
9/8/2011	9:43:00 AM	Main Vac valve closed
9/8/2011	9:43:29 AM	Main Vac valve opened
9/8/2011	9:45:24 AM	Recipe started at 9:45 AM
9/8/2011	9:45:24 AM	Helium valve closed
9/8/2011	9:45:24 AM	H2 valve closed
9/8/2011	9:45:24 AM	BCl3 valve closed
9/8/2011	9:45:24 AM	PH3 valve closed
9/8/2011	9:45:24 AM	SiCl4 pre valve closed
9/8/2011	9:45:24 AM	SiCl4 post valve closed
9/8/2011	9:45:24 AM	Main Vac valve closed
9/8/2011	9:45:24 AM	Bypass valve closed
9/8/2011	9:45:24 AM	Bubbler valve closed
9/8/2011	9:45:24 AM	Helium MFC set to  0.000000
9/8/2011	9:45:24 AM	H2 MFC set to  0.000000
9/8/2011	9:45:24 AM	BCl3 MFC set to  0.000000
9/8/2011	9:45:24 AM	PHl3 MFC set to  0.000000
9/8/2011	9:45:24 AM	SiCl4 MFC set to  0.000000
9/8/2011	9:45:24 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	9:45:24 AM	Tube furnace set to 0
9/8/2011	9:45:27 AM	Helium valve closed
9/8/2011	9:45:27 AM	BCl3 valve closed
9/8/2011	9:45:27 AM	PH3 valve closed
9/8/2011	9:45:27 AM	SiCl4 pre valve closed
9/8/2011	9:45:27 AM	SiCl4 post valve closed
9/8/2011	9:45:27 AM	Main Vac valve closed
9/8/2011	9:45:27 AM	Bypass valve closed
9/8/2011	9:45:27 AM	Bubbler valve closed
9/8/2011	9:45:27 AM	H2 valve opened
9/8/2011	9:45:27 AM	Helium MFC set to  0.000000
9/8/2011	9:45:27 AM	H2 MFC set to  500.000000
9/8/2011	9:45:27 AM	BCl3 MFC set to  0.000000
9/8/2011	9:45:27 AM	PHl3 MFC set to  0.000000
9/8/2011	9:45:27 AM	SiCl4 MFC set to  0.000000
9/8/2011	9:45:27 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	9:45:27 AM	Tube furnace set to 0
9/8/2011	9:46:33 AM	Helium valve closed
9/8/2011	9:46:33 AM	BCl3 valve closed
9/8/2011	9:46:33 AM	PH3 valve closed
9/8/2011	9:46:33 AM	SiCl4 pre valve closed
9/8/2011	9:46:33 AM	SiCl4 post valve closed
9/8/2011	9:46:33 AM	Main Vac valve closed
9/8/2011	9:46:33 AM	Bypass valve closed
9/8/2011	9:46:33 AM	H2 valve opened
9/8/2011	9:46:33 AM	Bubbler valve opened
9/8/2011	9:46:33 AM	Helium MFC set to  0.000000
9/8/2011	9:46:33 AM	H2 MFC set to  500.000000
9/8/2011	9:46:33 AM	BCl3 MFC set to  0.000000
9/8/2011	9:46:33 AM	PHl3 MFC set to  0.000000
9/8/2011	9:46:33 AM	SiCl4 MFC set to  0.000000
9/8/2011	9:46:33 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	9:46:33 AM	Tube furnace set to 0
9/8/2011	9:46:35 AM	Helium valve closed
9/8/2011	9:46:35 AM	BCl3 valve closed
9/8/2011	9:46:35 AM	PH3 valve closed
9/8/2011	9:46:35 AM	SiCl4 pre valve closed
9/8/2011	9:46:35 AM	SiCl4 post valve closed
9/8/2011	9:46:35 AM	Main Vac valve closed
9/8/2011	9:46:35 AM	Bypass valve closed
9/8/2011	9:46:35 AM	H2 valve opened
9/8/2011	9:46:35 AM	Bubbler valve opened
9/8/2011	9:46:35 AM	Helium MFC set to  0.000000
9/8/2011	9:46:35 AM	H2 MFC set to  500.000000
9/8/2011	9:46:35 AM	BCl3 MFC set to  0.000000
9/8/2011	9:46:35 AM	PHl3 MFC set to  0.000000
9/8/2011	9:46:35 AM	SiCl4 MFC set to  0.000000
9/8/2011	9:46:35 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	9:46:35 AM	Tube furnace set to 1000
9/8/2011	10:06:35 AM	Helium valve closed
9/8/2011	10:06:35 AM	PH3 valve closed
9/8/2011	10:06:35 AM	Main Vac valve closed
9/8/2011	10:06:35 AM	Bypass valve closed
9/8/2011	10:06:35 AM	H2 valve opened
9/8/2011	10:06:35 AM	BCl3 valve opened
9/8/2011	10:06:35 AM	SiCl4 pre valve opened
9/8/2011	10:06:35 AM	SiCl4 post valve opened
9/8/2011	10:06:35 AM	Bubbler valve opened
9/8/2011	10:06:35 AM	Helium MFC set to  0.000000
9/8/2011	10:06:35 AM	H2 MFC set to  500.000000
9/8/2011	10:06:35 AM	BCl3 MFC set to  2.100000
9/8/2011	10:06:35 AM	PHl3 MFC set to  0.000000
9/8/2011	10:06:35 AM	SiCl4 MFC set to  50.000000
9/8/2011	10:06:35 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:06:35 AM	Tube furnace set to 1000
9/8/2011	10:23:15 AM	Helium valve closed
9/8/2011	10:23:15 AM	BCl3 valve closed
9/8/2011	10:23:15 AM	PH3 valve closed
9/8/2011	10:23:15 AM	SiCl4 pre valve closed
9/8/2011	10:23:15 AM	SiCl4 post valve closed
9/8/2011	10:23:15 AM	Main Vac valve closed
9/8/2011	10:23:15 AM	Bypass valve closed
9/8/2011	10:23:15 AM	H2 valve opened
9/8/2011	10:23:15 AM	Bubbler valve opened
9/8/2011	10:23:15 AM	Helium MFC set to  0.000000
9/8/2011	10:23:15 AM	H2 MFC set to  500.000000
9/8/2011	10:23:15 AM	BCl3 MFC set to  0.000000
9/8/2011	10:23:15 AM	PHl3 MFC set to  0.000000
9/8/2011	10:23:15 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:23:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:23:15 AM	Tube furnace set to 750
9/8/2011	10:28:15 AM	H2 valve closed
9/8/2011	10:28:15 AM	BCl3 valve closed
9/8/2011	10:28:15 AM	PH3 valve closed
9/8/2011	10:28:15 AM	SiCl4 pre valve closed
9/8/2011	10:28:15 AM	SiCl4 post valve closed
9/8/2011	10:28:15 AM	Main Vac valve closed
9/8/2011	10:28:15 AM	Bypass valve closed
9/8/2011	10:28:15 AM	Helium valve opened
9/8/2011	10:28:15 AM	Bubbler valve opened
9/8/2011	10:28:15 AM	Helium MFC set to  500.000000
9/8/2011	10:28:15 AM	H2 MFC set to  0.000000
9/8/2011	10:28:15 AM	BCl3 MFC set to  0.000000
9/8/2011	10:28:15 AM	PHl3 MFC set to  0.000000
9/8/2011	10:28:15 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:28:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:28:15 AM	Tube furnace set to 0
9/8/2011	10:39:35 AM	Run aborted at 10:39 AM
9/8/2011	10:39:35 AM	Helium valve closed
9/8/2011	10:39:35 AM	H2 valve closed
9/8/2011	10:39:35 AM	BCl3 valve closed
9/8/2011	10:39:35 AM	PH3 valve closed
9/8/2011	10:39:35 AM	SiCl4 pre valve closed
9/8/2011	10:39:35 AM	SiCl4 post valve closed
9/8/2011	10:39:35 AM	Bypass valve closed
9/8/2011	10:39:35 AM	Main Vac valve closed
9/8/2011	10:39:35 AM	Bubbler valve closed
9/8/2011	10:39:35 AM	Helium MFC set to  0.000000
9/8/2011	10:39:35 AM	H2 MFC set to  0.000000
9/8/2011	10:39:35 AM	BCl3 MFC set to  0.000000
9/8/2011	10:39:35 AM	PHl3 MFC set to  0.000000
9/8/2011	10:39:35 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:39:35 AM	Tube furnace set to 0
9/8/2011	10:48:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	10:48:44 AM	Recipe started at 10:48 AM
9/8/2011	10:48:44 AM	Helium valve closed
9/8/2011	10:48:44 AM	H2 valve closed
9/8/2011	10:48:44 AM	BCl3 valve closed
9/8/2011	10:48:44 AM	PH3 valve closed
9/8/2011	10:48:44 AM	SiCl4 pre valve closed
9/8/2011	10:48:44 AM	SiCl4 post valve closed
9/8/2011	10:48:44 AM	Main Vac valve closed
9/8/2011	10:48:44 AM	Bubbler valve closed
9/8/2011	10:48:44 AM	Bypass valve opened
9/8/2011	10:48:44 AM	Helium MFC set to  0.000000
9/8/2011	10:48:44 AM	H2 MFC set to  0.000000
9/8/2011	10:48:44 AM	BCl3 MFC set to  0.000000
9/8/2011	10:48:44 AM	PHl3 MFC set to  0.000000
9/8/2011	10:48:44 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:48:44 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:48:44 AM	Tube furnace set to 0
9/8/2011	10:49:50 AM	Helium valve closed
9/8/2011	10:49:50 AM	H2 valve closed
9/8/2011	10:49:50 AM	BCl3 valve closed
9/8/2011	10:49:50 AM	PH3 valve closed
9/8/2011	10:49:50 AM	SiCl4 pre valve closed
9/8/2011	10:49:50 AM	SiCl4 post valve closed
9/8/2011	10:49:50 AM	Main Vac valve closed
9/8/2011	10:49:50 AM	Bubbler valve closed
9/8/2011	10:49:50 AM	Bypass valve opened
9/8/2011	10:49:50 AM	Helium MFC set to  0.000000
9/8/2011	10:49:50 AM	H2 MFC set to  0.000000
9/8/2011	10:49:50 AM	BCl3 MFC set to  0.000000
9/8/2011	10:49:50 AM	PHl3 MFC set to  0.000000
9/8/2011	10:49:50 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:49:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:49:50 AM	Tube furnace set to 0
9/8/2011	10:50:50 AM	Helium valve closed
9/8/2011	10:50:50 AM	H2 valve closed
9/8/2011	10:50:50 AM	BCl3 valve closed
9/8/2011	10:50:50 AM	PH3 valve closed
9/8/2011	10:50:50 AM	SiCl4 pre valve closed
9/8/2011	10:50:50 AM	SiCl4 post valve closed
9/8/2011	10:50:50 AM	Bypass valve closed
9/8/2011	10:50:50 AM	Bubbler valve closed
9/8/2011	10:50:50 AM	Main Vac valve opened
9/8/2011	10:50:50 AM	Helium MFC set to  0.000000
9/8/2011	10:50:50 AM	H2 MFC set to  0.000000
9/8/2011	10:50:50 AM	BCl3 MFC set to  0.000000
9/8/2011	10:50:50 AM	PHl3 MFC set to  0.000000
9/8/2011	10:50:50 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:50:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:50:50 AM	Tube furnace set to 0
9/8/2011	10:50:51 AM	Run finished at 10:50 AM
9/8/2011	10:50:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	10:53:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	10:53:27 AM	Recipe started at 10:53 AM
9/8/2011	10:53:27 AM	Helium valve closed
9/8/2011	10:53:27 AM	H2 valve closed
9/8/2011	10:53:27 AM	BCl3 valve closed
9/8/2011	10:53:27 AM	PH3 valve closed
9/8/2011	10:53:27 AM	SiCl4 pre valve closed
9/8/2011	10:53:27 AM	SiCl4 post valve closed
9/8/2011	10:53:27 AM	Main Vac valve closed
9/8/2011	10:53:27 AM	Bubbler valve closed
9/8/2011	10:53:27 AM	Bypass valve opened
9/8/2011	10:53:27 AM	Helium MFC set to  0.000000
9/8/2011	10:53:27 AM	H2 MFC set to  0.000000
9/8/2011	10:53:27 AM	BCl3 MFC set to  0.000000
9/8/2011	10:53:27 AM	PHl3 MFC set to  0.000000
9/8/2011	10:53:27 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:53:27 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:53:27 AM	Tube furnace set to 0
9/8/2011	10:53:27 AM	Helium valve closed
9/8/2011	10:53:27 AM	H2 valve closed
9/8/2011	10:53:27 AM	BCl3 valve closed
9/8/2011	10:53:27 AM	PH3 valve closed
9/8/2011	10:53:27 AM	SiCl4 pre valve closed
9/8/2011	10:53:27 AM	SiCl4 post valve closed
9/8/2011	10:53:27 AM	Main Vac valve closed
9/8/2011	10:53:27 AM	Bubbler valve closed
9/8/2011	10:53:27 AM	Bypass valve opened
9/8/2011	10:53:27 AM	Helium MFC set to  0.000000
9/8/2011	10:53:27 AM	H2 MFC set to  0.000000
9/8/2011	10:53:27 AM	BCl3 MFC set to  0.000000
9/8/2011	10:53:27 AM	PHl3 MFC set to  0.000000
9/8/2011	10:53:27 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:53:27 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:53:28 AM	Tube furnace set to 0
9/8/2011	10:53:58 AM	Helium valve closed
9/8/2011	10:53:58 AM	H2 valve closed
9/8/2011	10:53:58 AM	BCl3 valve closed
9/8/2011	10:53:58 AM	PH3 valve closed
9/8/2011	10:53:58 AM	SiCl4 pre valve closed
9/8/2011	10:53:58 AM	SiCl4 post valve closed
9/8/2011	10:53:58 AM	Bypass valve closed
9/8/2011	10:53:58 AM	Bubbler valve closed
9/8/2011	10:53:58 AM	Main Vac valve opened
9/8/2011	10:53:58 AM	Helium MFC set to  0.000000
9/8/2011	10:53:58 AM	H2 MFC set to  0.000000
9/8/2011	10:53:58 AM	BCl3 MFC set to  0.000000
9/8/2011	10:53:58 AM	PHl3 MFC set to  0.000000
9/8/2011	10:53:58 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:53:58 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:53:58 AM	Tube furnace set to 0
9/8/2011	10:54:28 AM	H2 valve closed
9/8/2011	10:54:28 AM	BCl3 valve closed
9/8/2011	10:54:28 AM	PH3 valve closed
9/8/2011	10:54:28 AM	SiCl4 pre valve closed
9/8/2011	10:54:28 AM	SiCl4 post valve closed
9/8/2011	10:54:28 AM	Bypass valve closed
9/8/2011	10:54:28 AM	Bubbler valve closed
9/8/2011	10:54:28 AM	Helium valve opened
9/8/2011	10:54:28 AM	Main Vac valve opened
9/8/2011	10:54:28 AM	Helium MFC set to  20.000000
9/8/2011	10:54:28 AM	H2 MFC set to  0.000000
9/8/2011	10:54:28 AM	BCl3 MFC set to  0.000000
9/8/2011	10:54:28 AM	PHl3 MFC set to  0.000000
9/8/2011	10:54:28 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:54:28 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:54:28 AM	Tube furnace set to 0
9/8/2011	10:54:58 AM	Helium valve closed
9/8/2011	10:54:58 AM	H2 valve closed
9/8/2011	10:54:58 AM	BCl3 valve closed
9/8/2011	10:54:58 AM	PH3 valve closed
9/8/2011	10:54:58 AM	SiCl4 pre valve closed
9/8/2011	10:54:58 AM	SiCl4 post valve closed
9/8/2011	10:54:58 AM	Bypass valve closed
9/8/2011	10:54:58 AM	Bubbler valve closed
9/8/2011	10:54:58 AM	Main Vac valve opened
9/8/2011	10:54:58 AM	Helium MFC set to  0.000000
9/8/2011	10:54:58 AM	H2 MFC set to  0.000000
9/8/2011	10:54:58 AM	BCl3 MFC set to  0.000000
9/8/2011	10:54:58 AM	PHl3 MFC set to  0.000000
9/8/2011	10:54:58 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:54:58 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:54:58 AM	Tube furnace set to 0
9/8/2011	10:55:28 AM	H2 valve closed
9/8/2011	10:55:28 AM	BCl3 valve closed
9/8/2011	10:55:28 AM	PH3 valve closed
9/8/2011	10:55:28 AM	SiCl4 pre valve closed
9/8/2011	10:55:28 AM	SiCl4 post valve closed
9/8/2011	10:55:28 AM	Bypass valve closed
9/8/2011	10:55:28 AM	Bubbler valve closed
9/8/2011	10:55:28 AM	Helium valve opened
9/8/2011	10:55:28 AM	Main Vac valve opened
9/8/2011	10:55:28 AM	Helium MFC set to  20.000000
9/8/2011	10:55:28 AM	H2 MFC set to  0.000000
9/8/2011	10:55:28 AM	BCl3 MFC set to  0.000000
9/8/2011	10:55:28 AM	PHl3 MFC set to  0.000000
9/8/2011	10:55:28 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:55:28 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:55:28 AM	Tube furnace set to 0
9/8/2011	10:55:58 AM	Helium valve closed
9/8/2011	10:55:58 AM	H2 valve closed
9/8/2011	10:55:58 AM	BCl3 valve closed
9/8/2011	10:55:58 AM	PH3 valve closed
9/8/2011	10:55:58 AM	SiCl4 pre valve closed
9/8/2011	10:55:58 AM	SiCl4 post valve closed
9/8/2011	10:55:58 AM	Bypass valve closed
9/8/2011	10:55:58 AM	Bubbler valve closed
9/8/2011	10:55:58 AM	Main Vac valve opened
9/8/2011	10:55:58 AM	Helium MFC set to  0.000000
9/8/2011	10:55:58 AM	H2 MFC set to  0.000000
9/8/2011	10:55:58 AM	BCl3 MFC set to  0.000000
9/8/2011	10:55:58 AM	PHl3 MFC set to  0.000000
9/8/2011	10:55:58 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:55:58 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:55:59 AM	Tube furnace set to 0
9/8/2011	10:56:29 AM	H2 valve closed
9/8/2011	10:56:29 AM	BCl3 valve closed
9/8/2011	10:56:29 AM	PH3 valve closed
9/8/2011	10:56:29 AM	SiCl4 pre valve closed
9/8/2011	10:56:29 AM	SiCl4 post valve closed
9/8/2011	10:56:29 AM	Bypass valve closed
9/8/2011	10:56:29 AM	Bubbler valve closed
9/8/2011	10:56:29 AM	Helium valve opened
9/8/2011	10:56:29 AM	Main Vac valve opened
9/8/2011	10:56:29 AM	Helium MFC set to  20.000000
9/8/2011	10:56:29 AM	H2 MFC set to  0.000000
9/8/2011	10:56:29 AM	BCl3 MFC set to  0.000000
9/8/2011	10:56:29 AM	PHl3 MFC set to  0.000000
9/8/2011	10:56:29 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:56:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:56:29 AM	Tube furnace set to 0
9/8/2011	10:56:59 AM	Helium valve closed
9/8/2011	10:56:59 AM	H2 valve closed
9/8/2011	10:56:59 AM	BCl3 valve closed
9/8/2011	10:56:59 AM	PH3 valve closed
9/8/2011	10:56:59 AM	SiCl4 pre valve closed
9/8/2011	10:56:59 AM	SiCl4 post valve closed
9/8/2011	10:56:59 AM	Bypass valve closed
9/8/2011	10:56:59 AM	Bubbler valve closed
9/8/2011	10:56:59 AM	Main Vac valve opened
9/8/2011	10:56:59 AM	Helium MFC set to  0.000000
9/8/2011	10:56:59 AM	H2 MFC set to  0.000000
9/8/2011	10:56:59 AM	BCl3 MFC set to  0.000000
9/8/2011	10:56:59 AM	PHl3 MFC set to  0.000000
9/8/2011	10:56:59 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:56:59 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:56:59 AM	Tube furnace set to 0
9/8/2011	10:57:29 AM	H2 valve closed
9/8/2011	10:57:29 AM	BCl3 valve closed
9/8/2011	10:57:29 AM	PH3 valve closed
9/8/2011	10:57:29 AM	SiCl4 pre valve closed
9/8/2011	10:57:29 AM	SiCl4 post valve closed
9/8/2011	10:57:29 AM	Bypass valve closed
9/8/2011	10:57:29 AM	Bubbler valve closed
9/8/2011	10:57:29 AM	Helium valve opened
9/8/2011	10:57:29 AM	Main Vac valve opened
9/8/2011	10:57:29 AM	Helium MFC set to  20.000000
9/8/2011	10:57:29 AM	H2 MFC set to  0.000000
9/8/2011	10:57:29 AM	BCl3 MFC set to  0.000000
9/8/2011	10:57:29 AM	PHl3 MFC set to  0.000000
9/8/2011	10:57:29 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:57:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:57:29 AM	Tube furnace set to 0
9/8/2011	10:57:59 AM	Helium valve closed
9/8/2011	10:57:59 AM	H2 valve closed
9/8/2011	10:57:59 AM	BCl3 valve closed
9/8/2011	10:57:59 AM	PH3 valve closed
9/8/2011	10:57:59 AM	SiCl4 pre valve closed
9/8/2011	10:57:59 AM	SiCl4 post valve closed
9/8/2011	10:57:59 AM	Bypass valve closed
9/8/2011	10:57:59 AM	Bubbler valve closed
9/8/2011	10:57:59 AM	Main Vac valve opened
9/8/2011	10:57:59 AM	Helium MFC set to  0.000000
9/8/2011	10:57:59 AM	H2 MFC set to  0.000000
9/8/2011	10:57:59 AM	BCl3 MFC set to  0.000000
9/8/2011	10:57:59 AM	PHl3 MFC set to  0.000000
9/8/2011	10:57:59 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:57:59 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:58:00 AM	Tube furnace set to 0
9/8/2011	10:58:30 AM	H2 valve closed
9/8/2011	10:58:30 AM	BCl3 valve closed
9/8/2011	10:58:30 AM	PH3 valve closed
9/8/2011	10:58:30 AM	SiCl4 pre valve closed
9/8/2011	10:58:30 AM	SiCl4 post valve closed
9/8/2011	10:58:30 AM	Bypass valve closed
9/8/2011	10:58:30 AM	Bubbler valve closed
9/8/2011	10:58:30 AM	Helium valve opened
9/8/2011	10:58:30 AM	Main Vac valve opened
9/8/2011	10:58:30 AM	Helium MFC set to  20.000000
9/8/2011	10:58:30 AM	H2 MFC set to  0.000000
9/8/2011	10:58:30 AM	BCl3 MFC set to  0.000000
9/8/2011	10:58:30 AM	PHl3 MFC set to  0.000000
9/8/2011	10:58:30 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:58:30 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:58:30 AM	Tube furnace set to 0
9/8/2011	10:59:00 AM	Helium valve closed
9/8/2011	10:59:00 AM	H2 valve closed
9/8/2011	10:59:00 AM	BCl3 valve closed
9/8/2011	10:59:00 AM	PH3 valve closed
9/8/2011	10:59:00 AM	SiCl4 pre valve closed
9/8/2011	10:59:00 AM	SiCl4 post valve closed
9/8/2011	10:59:00 AM	Bypass valve closed
9/8/2011	10:59:00 AM	Bubbler valve closed
9/8/2011	10:59:00 AM	Main Vac valve opened
9/8/2011	10:59:00 AM	Helium MFC set to  0.000000
9/8/2011	10:59:00 AM	H2 MFC set to  0.000000
9/8/2011	10:59:00 AM	BCl3 MFC set to  0.000000
9/8/2011	10:59:00 AM	PHl3 MFC set to  0.000000
9/8/2011	10:59:00 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:59:00 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:59:00 AM	Tube furnace set to 0
9/8/2011	10:59:30 AM	H2 valve closed
9/8/2011	10:59:30 AM	BCl3 valve closed
9/8/2011	10:59:30 AM	PH3 valve closed
9/8/2011	10:59:30 AM	SiCl4 pre valve closed
9/8/2011	10:59:30 AM	SiCl4 post valve closed
9/8/2011	10:59:30 AM	Bypass valve closed
9/8/2011	10:59:30 AM	Bubbler valve closed
9/8/2011	10:59:30 AM	Helium valve opened
9/8/2011	10:59:30 AM	Main Vac valve opened
9/8/2011	10:59:30 AM	Helium MFC set to  20.000000
9/8/2011	10:59:30 AM	H2 MFC set to  0.000000
9/8/2011	10:59:30 AM	BCl3 MFC set to  0.000000
9/8/2011	10:59:30 AM	PHl3 MFC set to  0.000000
9/8/2011	10:59:30 AM	SiCl4 MFC set to  0.000000
9/8/2011	10:59:30 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	10:59:30 AM	Tube furnace set to 0
9/8/2011	11:00:00 AM	Helium valve closed
9/8/2011	11:00:00 AM	H2 valve closed
9/8/2011	11:00:00 AM	BCl3 valve closed
9/8/2011	11:00:00 AM	PH3 valve closed
9/8/2011	11:00:00 AM	SiCl4 pre valve closed
9/8/2011	11:00:00 AM	SiCl4 post valve closed
9/8/2011	11:00:00 AM	Bypass valve closed
9/8/2011	11:00:00 AM	Bubbler valve closed
9/8/2011	11:00:00 AM	Main Vac valve opened
9/8/2011	11:00:00 AM	Helium MFC set to  0.000000
9/8/2011	11:00:00 AM	H2 MFC set to  0.000000
9/8/2011	11:00:00 AM	BCl3 MFC set to  0.000000
9/8/2011	11:00:00 AM	PHl3 MFC set to  0.000000
9/8/2011	11:00:00 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:00:00 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:00:00 AM	Tube furnace set to 0
9/8/2011	11:00:30 AM	H2 valve closed
9/8/2011	11:00:30 AM	BCl3 valve closed
9/8/2011	11:00:30 AM	PH3 valve closed
9/8/2011	11:00:30 AM	SiCl4 pre valve closed
9/8/2011	11:00:30 AM	SiCl4 post valve closed
9/8/2011	11:00:30 AM	Bypass valve closed
9/8/2011	11:00:30 AM	Bubbler valve closed
9/8/2011	11:00:30 AM	Helium valve opened
9/8/2011	11:00:30 AM	Main Vac valve opened
9/8/2011	11:00:30 AM	Helium MFC set to  20.000000
9/8/2011	11:00:30 AM	H2 MFC set to  0.000000
9/8/2011	11:00:30 AM	BCl3 MFC set to  0.000000
9/8/2011	11:00:30 AM	PHl3 MFC set to  0.000000
9/8/2011	11:00:30 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:00:30 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:00:31 AM	Tube furnace set to 0
9/8/2011	11:01:01 AM	Helium valve closed
9/8/2011	11:01:01 AM	H2 valve closed
9/8/2011	11:01:01 AM	BCl3 valve closed
9/8/2011	11:01:01 AM	PH3 valve closed
9/8/2011	11:01:01 AM	SiCl4 pre valve closed
9/8/2011	11:01:01 AM	SiCl4 post valve closed
9/8/2011	11:01:01 AM	Bypass valve closed
9/8/2011	11:01:01 AM	Bubbler valve closed
9/8/2011	11:01:01 AM	Main Vac valve opened
9/8/2011	11:01:01 AM	Helium MFC set to  0.000000
9/8/2011	11:01:01 AM	H2 MFC set to  0.000000
9/8/2011	11:01:01 AM	BCl3 MFC set to  0.000000
9/8/2011	11:01:01 AM	PHl3 MFC set to  0.000000
9/8/2011	11:01:01 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:01:01 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:01:01 AM	Tube furnace set to 0
9/8/2011	11:01:31 AM	H2 valve closed
9/8/2011	11:01:31 AM	BCl3 valve closed
9/8/2011	11:01:31 AM	PH3 valve closed
9/8/2011	11:01:31 AM	SiCl4 pre valve closed
9/8/2011	11:01:31 AM	SiCl4 post valve closed
9/8/2011	11:01:31 AM	Bypass valve closed
9/8/2011	11:01:31 AM	Bubbler valve closed
9/8/2011	11:01:31 AM	Helium valve opened
9/8/2011	11:01:31 AM	Main Vac valve opened
9/8/2011	11:01:31 AM	Helium MFC set to  20.000000
9/8/2011	11:01:31 AM	H2 MFC set to  0.000000
9/8/2011	11:01:31 AM	BCl3 MFC set to  0.000000
9/8/2011	11:01:31 AM	PHl3 MFC set to  0.000000
9/8/2011	11:01:31 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:01:31 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:01:31 AM	Tube furnace set to 0
9/8/2011	11:02:01 AM	Helium valve closed
9/8/2011	11:02:01 AM	H2 valve closed
9/8/2011	11:02:01 AM	BCl3 valve closed
9/8/2011	11:02:01 AM	PH3 valve closed
9/8/2011	11:02:01 AM	SiCl4 pre valve closed
9/8/2011	11:02:01 AM	SiCl4 post valve closed
9/8/2011	11:02:01 AM	Bypass valve closed
9/8/2011	11:02:01 AM	Bubbler valve closed
9/8/2011	11:02:01 AM	Main Vac valve opened
9/8/2011	11:02:01 AM	Helium MFC set to  0.000000
9/8/2011	11:02:01 AM	H2 MFC set to  0.000000
9/8/2011	11:02:01 AM	BCl3 MFC set to  0.000000
9/8/2011	11:02:01 AM	PHl3 MFC set to  0.000000
9/8/2011	11:02:01 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:02:01 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:02:01 AM	Tube furnace set to 0
9/8/2011	11:02:31 AM	H2 valve closed
9/8/2011	11:02:31 AM	BCl3 valve closed
9/8/2011	11:02:31 AM	PH3 valve closed
9/8/2011	11:02:31 AM	SiCl4 pre valve closed
9/8/2011	11:02:31 AM	SiCl4 post valve closed
9/8/2011	11:02:31 AM	Bypass valve closed
9/8/2011	11:02:31 AM	Bubbler valve closed
9/8/2011	11:02:31 AM	Helium valve opened
9/8/2011	11:02:31 AM	Main Vac valve opened
9/8/2011	11:02:31 AM	Helium MFC set to  20.000000
9/8/2011	11:02:31 AM	H2 MFC set to  0.000000
9/8/2011	11:02:31 AM	BCl3 MFC set to  0.000000
9/8/2011	11:02:31 AM	PHl3 MFC set to  0.000000
9/8/2011	11:02:31 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:02:31 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:02:31 AM	Tube furnace set to 0
9/8/2011	11:03:01 AM	Helium valve closed
9/8/2011	11:03:01 AM	H2 valve closed
9/8/2011	11:03:01 AM	BCl3 valve closed
9/8/2011	11:03:01 AM	PH3 valve closed
9/8/2011	11:03:01 AM	SiCl4 pre valve closed
9/8/2011	11:03:01 AM	SiCl4 post valve closed
9/8/2011	11:03:01 AM	Bypass valve closed
9/8/2011	11:03:01 AM	Bubbler valve closed
9/8/2011	11:03:01 AM	Main Vac valve opened
9/8/2011	11:03:01 AM	Helium MFC set to  0.000000
9/8/2011	11:03:01 AM	H2 MFC set to  0.000000
9/8/2011	11:03:01 AM	BCl3 MFC set to  0.000000
9/8/2011	11:03:01 AM	PHl3 MFC set to  0.000000
9/8/2011	11:03:02 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:03:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:03:02 AM	Tube furnace set to 0
9/8/2011	11:03:32 AM	H2 valve closed
9/8/2011	11:03:32 AM	BCl3 valve closed
9/8/2011	11:03:32 AM	PH3 valve closed
9/8/2011	11:03:32 AM	SiCl4 pre valve closed
9/8/2011	11:03:32 AM	SiCl4 post valve closed
9/8/2011	11:03:32 AM	Bypass valve closed
9/8/2011	11:03:32 AM	Bubbler valve closed
9/8/2011	11:03:32 AM	Helium valve opened
9/8/2011	11:03:32 AM	Main Vac valve opened
9/8/2011	11:03:32 AM	Helium MFC set to  20.000000
9/8/2011	11:03:32 AM	H2 MFC set to  0.000000
9/8/2011	11:03:32 AM	BCl3 MFC set to  0.000000
9/8/2011	11:03:32 AM	PHl3 MFC set to  0.000000
9/8/2011	11:03:32 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:03:32 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:03:32 AM	Tube furnace set to 0
9/8/2011	11:04:02 AM	Helium valve closed
9/8/2011	11:04:02 AM	H2 valve closed
9/8/2011	11:04:02 AM	BCl3 valve closed
9/8/2011	11:04:02 AM	PH3 valve closed
9/8/2011	11:04:02 AM	SiCl4 pre valve closed
9/8/2011	11:04:02 AM	SiCl4 post valve closed
9/8/2011	11:04:02 AM	Bypass valve closed
9/8/2011	11:04:02 AM	Bubbler valve closed
9/8/2011	11:04:02 AM	Main Vac valve opened
9/8/2011	11:04:02 AM	Helium MFC set to  0.000000
9/8/2011	11:04:02 AM	H2 MFC set to  0.000000
9/8/2011	11:04:02 AM	BCl3 MFC set to  0.000000
9/8/2011	11:04:02 AM	PHl3 MFC set to  0.000000
9/8/2011	11:04:02 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:04:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:04:02 AM	Tube furnace set to 0
9/8/2011	11:04:03 AM	Run finished at 11:04 AM
9/8/2011	11:04:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	11:05:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	11:05:50 AM	Recipe started at 11:05 AM
9/8/2011	11:05:50 AM	Helium valve closed
9/8/2011	11:05:50 AM	H2 valve closed
9/8/2011	11:05:51 AM	BCl3 valve closed
9/8/2011	11:05:51 AM	PH3 valve closed
9/8/2011	11:05:51 AM	SiCl4 pre valve closed
9/8/2011	11:05:51 AM	SiCl4 post valve closed
9/8/2011	11:05:51 AM	Main Vac valve closed
9/8/2011	11:05:51 AM	Bubbler valve closed
9/8/2011	11:05:51 AM	Bypass valve opened
9/8/2011	11:05:51 AM	Helium MFC set to  0.000000
9/8/2011	11:05:51 AM	H2 MFC set to  0.000000
9/8/2011	11:05:51 AM	BCl3 MFC set to  0.000000
9/8/2011	11:05:51 AM	PHl3 MFC set to  0.000000
9/8/2011	11:05:51 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:05:51 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:05:51 AM	Tube furnace set to 0
9/8/2011	11:05:51 AM	Helium valve closed
9/8/2011	11:05:51 AM	H2 valve closed
9/8/2011	11:05:51 AM	BCl3 valve closed
9/8/2011	11:05:51 AM	PH3 valve closed
9/8/2011	11:05:51 AM	SiCl4 pre valve closed
9/8/2011	11:05:51 AM	SiCl4 post valve closed
9/8/2011	11:05:51 AM	Main Vac valve closed
9/8/2011	11:05:51 AM	Bubbler valve closed
9/8/2011	11:05:51 AM	Bypass valve opened
9/8/2011	11:05:51 AM	Helium MFC set to  0.000000
9/8/2011	11:05:51 AM	H2 MFC set to  0.000000
9/8/2011	11:05:51 AM	BCl3 MFC set to  0.000000
9/8/2011	11:05:51 AM	PHl3 MFC set to  0.000000
9/8/2011	11:05:51 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:05:51 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:05:51 AM	Tube furnace set to 0
9/8/2011	11:06:21 AM	Helium valve closed
9/8/2011	11:06:21 AM	H2 valve closed
9/8/2011	11:06:21 AM	BCl3 valve closed
9/8/2011	11:06:21 AM	PH3 valve closed
9/8/2011	11:06:21 AM	SiCl4 pre valve closed
9/8/2011	11:06:21 AM	SiCl4 post valve closed
9/8/2011	11:06:21 AM	Bypass valve closed
9/8/2011	11:06:21 AM	Bubbler valve closed
9/8/2011	11:06:21 AM	Main Vac valve opened
9/8/2011	11:06:21 AM	Helium MFC set to  0.000000
9/8/2011	11:06:21 AM	H2 MFC set to  0.000000
9/8/2011	11:06:21 AM	BCl3 MFC set to  0.000000
9/8/2011	11:06:21 AM	PHl3 MFC set to  0.000000
9/8/2011	11:06:21 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:06:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:06:21 AM	Tube furnace set to 0
9/8/2011	11:06:51 AM	H2 valve closed
9/8/2011	11:06:51 AM	BCl3 valve closed
9/8/2011	11:06:51 AM	PH3 valve closed
9/8/2011	11:06:51 AM	SiCl4 pre valve closed
9/8/2011	11:06:51 AM	SiCl4 post valve closed
9/8/2011	11:06:51 AM	Bypass valve closed
9/8/2011	11:06:51 AM	Bubbler valve closed
9/8/2011	11:06:51 AM	Helium valve opened
9/8/2011	11:06:51 AM	Main Vac valve opened
9/8/2011	11:06:51 AM	Helium MFC set to  20.000000
9/8/2011	11:06:51 AM	H2 MFC set to  0.000000
9/8/2011	11:06:51 AM	BCl3 MFC set to  0.000000
9/8/2011	11:06:51 AM	PHl3 MFC set to  0.000000
9/8/2011	11:06:51 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:06:51 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:06:52 AM	Tube furnace set to 0
9/8/2011	11:07:22 AM	Helium valve closed
9/8/2011	11:07:22 AM	H2 valve closed
9/8/2011	11:07:22 AM	BCl3 valve closed
9/8/2011	11:07:22 AM	PH3 valve closed
9/8/2011	11:07:22 AM	SiCl4 pre valve closed
9/8/2011	11:07:22 AM	SiCl4 post valve closed
9/8/2011	11:07:22 AM	Bypass valve closed
9/8/2011	11:07:22 AM	Bubbler valve closed
9/8/2011	11:07:22 AM	Main Vac valve opened
9/8/2011	11:07:22 AM	Helium MFC set to  0.000000
9/8/2011	11:07:22 AM	H2 MFC set to  0.000000
9/8/2011	11:07:22 AM	BCl3 MFC set to  0.000000
9/8/2011	11:07:22 AM	PHl3 MFC set to  0.000000
9/8/2011	11:07:22 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:07:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:07:22 AM	Tube furnace set to 0
9/8/2011	11:07:52 AM	H2 valve closed
9/8/2011	11:07:52 AM	BCl3 valve closed
9/8/2011	11:07:52 AM	PH3 valve closed
9/8/2011	11:07:52 AM	SiCl4 pre valve closed
9/8/2011	11:07:52 AM	SiCl4 post valve closed
9/8/2011	11:07:52 AM	Bypass valve closed
9/8/2011	11:07:52 AM	Bubbler valve closed
9/8/2011	11:07:52 AM	Helium valve opened
9/8/2011	11:07:52 AM	Main Vac valve opened
9/8/2011	11:07:52 AM	Helium MFC set to  20.000000
9/8/2011	11:07:52 AM	H2 MFC set to  0.000000
9/8/2011	11:07:52 AM	BCl3 MFC set to  0.000000
9/8/2011	11:07:52 AM	PHl3 MFC set to  0.000000
9/8/2011	11:07:52 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:07:52 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:07:52 AM	Tube furnace set to 0
9/8/2011	11:08:22 AM	Helium valve closed
9/8/2011	11:08:22 AM	H2 valve closed
9/8/2011	11:08:22 AM	BCl3 valve closed
9/8/2011	11:08:22 AM	PH3 valve closed
9/8/2011	11:08:22 AM	SiCl4 pre valve closed
9/8/2011	11:08:22 AM	SiCl4 post valve closed
9/8/2011	11:08:22 AM	Bypass valve closed
9/8/2011	11:08:22 AM	Bubbler valve closed
9/8/2011	11:08:22 AM	Main Vac valve opened
9/8/2011	11:08:22 AM	Helium MFC set to  0.000000
9/8/2011	11:08:22 AM	H2 MFC set to  0.000000
9/8/2011	11:08:22 AM	BCl3 MFC set to  0.000000
9/8/2011	11:08:22 AM	PHl3 MFC set to  0.000000
9/8/2011	11:08:22 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:08:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:08:22 AM	Tube furnace set to 0
9/8/2011	11:08:52 AM	H2 valve closed
9/8/2011	11:08:52 AM	BCl3 valve closed
9/8/2011	11:08:52 AM	PH3 valve closed
9/8/2011	11:08:52 AM	SiCl4 pre valve closed
9/8/2011	11:08:52 AM	SiCl4 post valve closed
9/8/2011	11:08:52 AM	Bypass valve closed
9/8/2011	11:08:52 AM	Bubbler valve closed
9/8/2011	11:08:52 AM	Helium valve opened
9/8/2011	11:08:52 AM	Main Vac valve opened
9/8/2011	11:08:52 AM	Helium MFC set to  20.000000
9/8/2011	11:08:52 AM	H2 MFC set to  0.000000
9/8/2011	11:08:52 AM	BCl3 MFC set to  0.000000
9/8/2011	11:08:52 AM	PHl3 MFC set to  0.000000
9/8/2011	11:08:52 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:08:52 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:08:52 AM	Tube furnace set to 0
9/8/2011	11:09:22 AM	Helium valve closed
9/8/2011	11:09:22 AM	H2 valve closed
9/8/2011	11:09:22 AM	BCl3 valve closed
9/8/2011	11:09:22 AM	PH3 valve closed
9/8/2011	11:09:22 AM	SiCl4 pre valve closed
9/8/2011	11:09:22 AM	SiCl4 post valve closed
9/8/2011	11:09:22 AM	Bypass valve closed
9/8/2011	11:09:22 AM	Bubbler valve closed
9/8/2011	11:09:22 AM	Main Vac valve opened
9/8/2011	11:09:22 AM	Helium MFC set to  0.000000
9/8/2011	11:09:22 AM	H2 MFC set to  0.000000
9/8/2011	11:09:22 AM	BCl3 MFC set to  0.000000
9/8/2011	11:09:22 AM	PHl3 MFC set to  0.000000
9/8/2011	11:09:22 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:09:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:09:23 AM	Tube furnace set to 0
9/8/2011	11:09:53 AM	H2 valve closed
9/8/2011	11:09:53 AM	BCl3 valve closed
9/8/2011	11:09:53 AM	PH3 valve closed
9/8/2011	11:09:53 AM	SiCl4 pre valve closed
9/8/2011	11:09:53 AM	SiCl4 post valve closed
9/8/2011	11:09:53 AM	Bypass valve closed
9/8/2011	11:09:53 AM	Bubbler valve closed
9/8/2011	11:09:53 AM	Helium valve opened
9/8/2011	11:09:53 AM	Main Vac valve opened
9/8/2011	11:09:53 AM	Helium MFC set to  20.000000
9/8/2011	11:09:53 AM	H2 MFC set to  0.000000
9/8/2011	11:09:53 AM	BCl3 MFC set to  0.000000
9/8/2011	11:09:53 AM	PHl3 MFC set to  0.000000
9/8/2011	11:09:53 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:09:53 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:09:53 AM	Tube furnace set to 0
9/8/2011	11:10:23 AM	Helium valve closed
9/8/2011	11:10:23 AM	H2 valve closed
9/8/2011	11:10:23 AM	BCl3 valve closed
9/8/2011	11:10:23 AM	PH3 valve closed
9/8/2011	11:10:23 AM	SiCl4 pre valve closed
9/8/2011	11:10:23 AM	SiCl4 post valve closed
9/8/2011	11:10:23 AM	Bypass valve closed
9/8/2011	11:10:23 AM	Bubbler valve closed
9/8/2011	11:10:23 AM	Main Vac valve opened
9/8/2011	11:10:23 AM	Helium MFC set to  0.000000
9/8/2011	11:10:23 AM	H2 MFC set to  0.000000
9/8/2011	11:10:23 AM	BCl3 MFC set to  0.000000
9/8/2011	11:10:23 AM	PHl3 MFC set to  0.000000
9/8/2011	11:10:23 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:10:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:10:23 AM	Tube furnace set to 0
9/8/2011	11:10:53 AM	H2 valve closed
9/8/2011	11:10:53 AM	BCl3 valve closed
9/8/2011	11:10:53 AM	PH3 valve closed
9/8/2011	11:10:53 AM	SiCl4 pre valve closed
9/8/2011	11:10:53 AM	SiCl4 post valve closed
9/8/2011	11:10:53 AM	Bypass valve closed
9/8/2011	11:10:53 AM	Bubbler valve closed
9/8/2011	11:10:53 AM	Helium valve opened
9/8/2011	11:10:53 AM	Main Vac valve opened
9/8/2011	11:10:53 AM	Helium MFC set to  20.000000
9/8/2011	11:10:53 AM	H2 MFC set to  0.000000
9/8/2011	11:10:53 AM	BCl3 MFC set to  0.000000
9/8/2011	11:10:53 AM	PHl3 MFC set to  0.000000
9/8/2011	11:10:53 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:10:53 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:10:53 AM	Tube furnace set to 0
9/8/2011	11:11:23 AM	Helium valve closed
9/8/2011	11:11:23 AM	H2 valve closed
9/8/2011	11:11:23 AM	BCl3 valve closed
9/8/2011	11:11:23 AM	PH3 valve closed
9/8/2011	11:11:23 AM	SiCl4 pre valve closed
9/8/2011	11:11:23 AM	SiCl4 post valve closed
9/8/2011	11:11:23 AM	Bypass valve closed
9/8/2011	11:11:23 AM	Bubbler valve closed
9/8/2011	11:11:23 AM	Main Vac valve opened
9/8/2011	11:11:23 AM	Helium MFC set to  0.000000
9/8/2011	11:11:23 AM	H2 MFC set to  0.000000
9/8/2011	11:11:23 AM	BCl3 MFC set to  0.000000
9/8/2011	11:11:23 AM	PHl3 MFC set to  0.000000
9/8/2011	11:11:23 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:11:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:11:23 AM	Tube furnace set to 0
9/8/2011	11:11:53 AM	H2 valve closed
9/8/2011	11:11:53 AM	BCl3 valve closed
9/8/2011	11:11:53 AM	PH3 valve closed
9/8/2011	11:11:53 AM	SiCl4 pre valve closed
9/8/2011	11:11:53 AM	SiCl4 post valve closed
9/8/2011	11:11:53 AM	Bypass valve closed
9/8/2011	11:11:53 AM	Bubbler valve closed
9/8/2011	11:11:53 AM	Helium valve opened
9/8/2011	11:11:53 AM	Main Vac valve opened
9/8/2011	11:11:53 AM	Helium MFC set to  20.000000
9/8/2011	11:11:53 AM	H2 MFC set to  0.000000
9/8/2011	11:11:53 AM	BCl3 MFC set to  0.000000
9/8/2011	11:11:54 AM	PHl3 MFC set to  0.000000
9/8/2011	11:11:54 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:11:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:11:54 AM	Tube furnace set to 0
9/8/2011	11:12:24 AM	Helium valve closed
9/8/2011	11:12:24 AM	H2 valve closed
9/8/2011	11:12:24 AM	BCl3 valve closed
9/8/2011	11:12:24 AM	PH3 valve closed
9/8/2011	11:12:24 AM	SiCl4 pre valve closed
9/8/2011	11:12:24 AM	SiCl4 post valve closed
9/8/2011	11:12:24 AM	Bypass valve closed
9/8/2011	11:12:24 AM	Bubbler valve closed
9/8/2011	11:12:24 AM	Main Vac valve opened
9/8/2011	11:12:24 AM	Helium MFC set to  0.000000
9/8/2011	11:12:24 AM	H2 MFC set to  0.000000
9/8/2011	11:12:24 AM	BCl3 MFC set to  0.000000
9/8/2011	11:12:24 AM	PHl3 MFC set to  0.000000
9/8/2011	11:12:24 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:12:24 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:12:24 AM	Tube furnace set to 0
9/8/2011	11:12:54 AM	H2 valve closed
9/8/2011	11:12:54 AM	BCl3 valve closed
9/8/2011	11:12:54 AM	PH3 valve closed
9/8/2011	11:12:54 AM	SiCl4 pre valve closed
9/8/2011	11:12:54 AM	SiCl4 post valve closed
9/8/2011	11:12:54 AM	Bypass valve closed
9/8/2011	11:12:54 AM	Bubbler valve closed
9/8/2011	11:12:54 AM	Helium valve opened
9/8/2011	11:12:54 AM	Main Vac valve opened
9/8/2011	11:12:54 AM	Helium MFC set to  20.000000
9/8/2011	11:12:54 AM	H2 MFC set to  0.000000
9/8/2011	11:12:54 AM	BCl3 MFC set to  0.000000
9/8/2011	11:12:54 AM	PHl3 MFC set to  0.000000
9/8/2011	11:12:54 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:12:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:12:54 AM	Tube furnace set to 0
9/8/2011	11:13:24 AM	Helium valve closed
9/8/2011	11:13:24 AM	H2 valve closed
9/8/2011	11:13:24 AM	BCl3 valve closed
9/8/2011	11:13:24 AM	PH3 valve closed
9/8/2011	11:13:24 AM	SiCl4 pre valve closed
9/8/2011	11:13:24 AM	SiCl4 post valve closed
9/8/2011	11:13:24 AM	Bypass valve closed
9/8/2011	11:13:24 AM	Bubbler valve closed
9/8/2011	11:13:24 AM	Main Vac valve opened
9/8/2011	11:13:24 AM	Helium MFC set to  0.000000
9/8/2011	11:13:24 AM	H2 MFC set to  0.000000
9/8/2011	11:13:24 AM	BCl3 MFC set to  0.000000
9/8/2011	11:13:24 AM	PHl3 MFC set to  0.000000
9/8/2011	11:13:24 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:13:24 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:13:24 AM	Tube furnace set to 0
9/8/2011	11:13:54 AM	H2 valve closed
9/8/2011	11:13:54 AM	BCl3 valve closed
9/8/2011	11:13:54 AM	PH3 valve closed
9/8/2011	11:13:54 AM	SiCl4 pre valve closed
9/8/2011	11:13:54 AM	SiCl4 post valve closed
9/8/2011	11:13:54 AM	Bypass valve closed
9/8/2011	11:13:54 AM	Bubbler valve closed
9/8/2011	11:13:54 AM	Helium valve opened
9/8/2011	11:13:54 AM	Main Vac valve opened
9/8/2011	11:13:54 AM	Helium MFC set to  20.000000
9/8/2011	11:13:54 AM	H2 MFC set to  0.000000
9/8/2011	11:13:54 AM	BCl3 MFC set to  0.000000
9/8/2011	11:13:54 AM	PHl3 MFC set to  0.000000
9/8/2011	11:13:54 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:13:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:13:55 AM	Tube furnace set to 0
9/8/2011	11:14:25 AM	Helium valve closed
9/8/2011	11:14:25 AM	H2 valve closed
9/8/2011	11:14:25 AM	BCl3 valve closed
9/8/2011	11:14:25 AM	PH3 valve closed
9/8/2011	11:14:25 AM	SiCl4 pre valve closed
9/8/2011	11:14:25 AM	SiCl4 post valve closed
9/8/2011	11:14:25 AM	Bypass valve closed
9/8/2011	11:14:25 AM	Bubbler valve closed
9/8/2011	11:14:25 AM	Main Vac valve opened
9/8/2011	11:14:25 AM	Helium MFC set to  0.000000
9/8/2011	11:14:25 AM	H2 MFC set to  0.000000
9/8/2011	11:14:25 AM	BCl3 MFC set to  0.000000
9/8/2011	11:14:25 AM	PHl3 MFC set to  0.000000
9/8/2011	11:14:25 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:14:25 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:14:25 AM	Tube furnace set to 0
9/8/2011	11:14:55 AM	H2 valve closed
9/8/2011	11:14:55 AM	BCl3 valve closed
9/8/2011	11:14:55 AM	PH3 valve closed
9/8/2011	11:14:55 AM	SiCl4 pre valve closed
9/8/2011	11:14:55 AM	SiCl4 post valve closed
9/8/2011	11:14:55 AM	Bypass valve closed
9/8/2011	11:14:55 AM	Bubbler valve closed
9/8/2011	11:14:55 AM	Helium valve opened
9/8/2011	11:14:55 AM	Main Vac valve opened
9/8/2011	11:14:55 AM	Helium MFC set to  20.000000
9/8/2011	11:14:55 AM	H2 MFC set to  0.000000
9/8/2011	11:14:55 AM	BCl3 MFC set to  0.000000
9/8/2011	11:14:55 AM	PHl3 MFC set to  0.000000
9/8/2011	11:14:55 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:14:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:14:55 AM	Tube furnace set to 0
9/8/2011	11:15:25 AM	Helium valve closed
9/8/2011	11:15:25 AM	H2 valve closed
9/8/2011	11:15:25 AM	BCl3 valve closed
9/8/2011	11:15:25 AM	PH3 valve closed
9/8/2011	11:15:25 AM	SiCl4 pre valve closed
9/8/2011	11:15:25 AM	SiCl4 post valve closed
9/8/2011	11:15:25 AM	Bypass valve closed
9/8/2011	11:15:25 AM	Bubbler valve closed
9/8/2011	11:15:25 AM	Main Vac valve opened
9/8/2011	11:15:25 AM	Helium MFC set to  0.000000
9/8/2011	11:15:25 AM	H2 MFC set to  0.000000
9/8/2011	11:15:25 AM	BCl3 MFC set to  0.000000
9/8/2011	11:15:25 AM	PHl3 MFC set to  0.000000
9/8/2011	11:15:25 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:15:25 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:15:25 AM	Tube furnace set to 0
9/8/2011	11:15:55 AM	H2 valve closed
9/8/2011	11:15:55 AM	BCl3 valve closed
9/8/2011	11:15:55 AM	PH3 valve closed
9/8/2011	11:15:55 AM	SiCl4 pre valve closed
9/8/2011	11:15:55 AM	SiCl4 post valve closed
9/8/2011	11:15:55 AM	Bypass valve closed
9/8/2011	11:15:55 AM	Bubbler valve closed
9/8/2011	11:15:55 AM	Helium valve opened
9/8/2011	11:15:55 AM	Main Vac valve opened
9/8/2011	11:15:55 AM	Helium MFC set to  20.000000
9/8/2011	11:15:55 AM	H2 MFC set to  0.000000
9/8/2011	11:15:55 AM	BCl3 MFC set to  0.000000
9/8/2011	11:15:55 AM	PHl3 MFC set to  0.000000
9/8/2011	11:15:55 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:15:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:15:55 AM	Tube furnace set to 0
9/8/2011	11:16:25 AM	Helium valve closed
9/8/2011	11:16:25 AM	H2 valve closed
9/8/2011	11:16:25 AM	BCl3 valve closed
9/8/2011	11:16:25 AM	PH3 valve closed
9/8/2011	11:16:25 AM	SiCl4 pre valve closed
9/8/2011	11:16:25 AM	SiCl4 post valve closed
9/8/2011	11:16:25 AM	Bypass valve closed
9/8/2011	11:16:25 AM	Bubbler valve closed
9/8/2011	11:16:25 AM	Main Vac valve opened
9/8/2011	11:16:25 AM	Helium MFC set to  0.000000
9/8/2011	11:16:25 AM	H2 MFC set to  0.000000
9/8/2011	11:16:25 AM	BCl3 MFC set to  0.000000
9/8/2011	11:16:25 AM	PHl3 MFC set to  0.000000
9/8/2011	11:16:25 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:16:25 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:16:26 AM	Tube furnace set to 0
9/8/2011	11:16:27 AM	Run finished at 11:16 AM
9/8/2011	11:16:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	11:23:33 AM	Main Vac valve closed
9/8/2011	11:23:39 AM	Main Vac valve opened
9/8/2011	11:24:08 AM	Recipe started at 11:24 AM
9/8/2011	11:24:08 AM	Helium valve closed
9/8/2011	11:24:08 AM	H2 valve closed
9/8/2011	11:24:08 AM	BCl3 valve closed
9/8/2011	11:24:08 AM	PH3 valve closed
9/8/2011	11:24:08 AM	SiCl4 pre valve closed
9/8/2011	11:24:08 AM	SiCl4 post valve closed
9/8/2011	11:24:08 AM	Main Vac valve closed
9/8/2011	11:24:08 AM	Bypass valve closed
9/8/2011	11:24:08 AM	Bubbler valve closed
9/8/2011	11:24:08 AM	Helium MFC set to  0.000000
9/8/2011	11:24:08 AM	H2 MFC set to  0.000000
9/8/2011	11:24:08 AM	BCl3 MFC set to  0.000000
9/8/2011	11:24:08 AM	PHl3 MFC set to  0.000000
9/8/2011	11:24:08 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:24:08 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:24:08 AM	Tube furnace set to 0
9/8/2011	11:24:11 AM	Helium valve closed
9/8/2011	11:24:11 AM	BCl3 valve closed
9/8/2011	11:24:11 AM	PH3 valve closed
9/8/2011	11:24:11 AM	SiCl4 pre valve closed
9/8/2011	11:24:11 AM	SiCl4 post valve closed
9/8/2011	11:24:11 AM	Main Vac valve closed
9/8/2011	11:24:11 AM	Bypass valve closed
9/8/2011	11:24:11 AM	Bubbler valve closed
9/8/2011	11:24:11 AM	H2 valve opened
9/8/2011	11:24:11 AM	Helium MFC set to  0.000000
9/8/2011	11:24:11 AM	H2 MFC set to  500.000000
9/8/2011	11:24:11 AM	BCl3 MFC set to  0.000000
9/8/2011	11:24:11 AM	PHl3 MFC set to  0.000000
9/8/2011	11:24:11 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:24:11 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:24:11 AM	Tube furnace set to 0
9/8/2011	11:25:17 AM	Helium valve closed
9/8/2011	11:25:17 AM	BCl3 valve closed
9/8/2011	11:25:17 AM	PH3 valve closed
9/8/2011	11:25:17 AM	SiCl4 pre valve closed
9/8/2011	11:25:17 AM	SiCl4 post valve closed
9/8/2011	11:25:17 AM	Main Vac valve closed
9/8/2011	11:25:17 AM	Bypass valve closed
9/8/2011	11:25:17 AM	H2 valve opened
9/8/2011	11:25:17 AM	Bubbler valve opened
9/8/2011	11:25:17 AM	Helium MFC set to  0.000000
9/8/2011	11:25:17 AM	H2 MFC set to  500.000000
9/8/2011	11:25:17 AM	BCl3 MFC set to  0.000000
9/8/2011	11:25:17 AM	PHl3 MFC set to  0.000000
9/8/2011	11:25:17 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:25:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:25:17 AM	Tube furnace set to 0
9/8/2011	11:25:18 AM	Helium valve closed
9/8/2011	11:25:18 AM	BCl3 valve closed
9/8/2011	11:25:18 AM	PH3 valve closed
9/8/2011	11:25:18 AM	SiCl4 pre valve closed
9/8/2011	11:25:18 AM	SiCl4 post valve closed
9/8/2011	11:25:18 AM	Main Vac valve closed
9/8/2011	11:25:18 AM	Bypass valve closed
9/8/2011	11:25:18 AM	H2 valve opened
9/8/2011	11:25:18 AM	Bubbler valve opened
9/8/2011	11:25:18 AM	Helium MFC set to  0.000000
9/8/2011	11:25:18 AM	H2 MFC set to  500.000000
9/8/2011	11:25:19 AM	BCl3 MFC set to  0.000000
9/8/2011	11:25:19 AM	PHl3 MFC set to  0.000000
9/8/2011	11:25:19 AM	SiCl4 MFC set to  0.000000
9/8/2011	11:25:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:25:19 AM	Tube furnace set to 1000
9/8/2011	11:45:19 AM	Helium valve closed
9/8/2011	11:45:19 AM	PH3 valve closed
9/8/2011	11:45:19 AM	Main Vac valve closed
9/8/2011	11:45:19 AM	Bypass valve closed
9/8/2011	11:45:19 AM	H2 valve opened
9/8/2011	11:45:19 AM	BCl3 valve opened
9/8/2011	11:45:19 AM	SiCl4 pre valve opened
9/8/2011	11:45:19 AM	SiCl4 post valve opened
9/8/2011	11:45:19 AM	Bubbler valve opened
9/8/2011	11:45:19 AM	Helium MFC set to  0.000000
9/8/2011	11:45:19 AM	H2 MFC set to  500.000000
9/8/2011	11:45:19 AM	BCl3 MFC set to  2.000000
9/8/2011	11:45:19 AM	PHl3 MFC set to  0.000000
9/8/2011	11:45:19 AM	SiCl4 MFC set to  50.000000
9/8/2011	11:45:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2011	11:45:19 AM	Tube furnace set to 1000
9/8/2011	12:01:59 PM	Helium valve closed
9/8/2011	12:01:59 PM	BCl3 valve closed
9/8/2011	12:01:59 PM	PH3 valve closed
9/8/2011	12:01:59 PM	SiCl4 pre valve closed
9/8/2011	12:01:59 PM	SiCl4 post valve closed
9/8/2011	12:01:59 PM	Main Vac valve closed
9/8/2011	12:01:59 PM	Bypass valve closed
9/8/2011	12:01:59 PM	H2 valve opened
9/8/2011	12:01:59 PM	Bubbler valve opened
9/8/2011	12:01:59 PM	Helium MFC set to  0.000000
9/8/2011	12:01:59 PM	H2 MFC set to  500.000000
9/8/2011	12:01:59 PM	BCl3 MFC set to  0.000000
9/8/2011	12:01:59 PM	PHl3 MFC set to  0.000000
9/8/2011	12:01:59 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:01:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:01:59 PM	Tube furnace set to 750
9/8/2011	12:06:59 PM	H2 valve closed
9/8/2011	12:06:59 PM	BCl3 valve closed
9/8/2011	12:06:59 PM	PH3 valve closed
9/8/2011	12:06:59 PM	SiCl4 pre valve closed
9/8/2011	12:06:59 PM	SiCl4 post valve closed
9/8/2011	12:06:59 PM	Main Vac valve closed
9/8/2011	12:06:59 PM	Bypass valve closed
9/8/2011	12:06:59 PM	Helium valve opened
9/8/2011	12:06:59 PM	Bubbler valve opened
9/8/2011	12:06:59 PM	Helium MFC set to  500.000000
9/8/2011	12:06:59 PM	H2 MFC set to  0.000000
9/8/2011	12:06:59 PM	BCl3 MFC set to  0.000000
9/8/2011	12:06:59 PM	PHl3 MFC set to  0.000000
9/8/2011	12:06:59 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:06:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:06:59 PM	Tube furnace set to 0
9/8/2011	12:11:00 PM	Run aborted at 12:11 PM
9/8/2011	12:11:00 PM	Helium valve closed
9/8/2011	12:11:00 PM	H2 valve closed
9/8/2011	12:11:00 PM	BCl3 valve closed
9/8/2011	12:11:00 PM	PH3 valve closed
9/8/2011	12:11:00 PM	SiCl4 pre valve closed
9/8/2011	12:11:00 PM	SiCl4 post valve closed
9/8/2011	12:11:00 PM	Bypass valve closed
9/8/2011	12:11:00 PM	Main Vac valve closed
9/8/2011	12:11:00 PM	Bubbler valve closed
9/8/2011	12:11:00 PM	Helium MFC set to  0.000000
9/8/2011	12:11:00 PM	H2 MFC set to  0.000000
9/8/2011	12:11:00 PM	BCl3 MFC set to  0.000000
9/8/2011	12:11:00 PM	PHl3 MFC set to  0.000000
9/8/2011	12:11:00 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:11:00 PM	Tube furnace set to 0
9/8/2011	12:17:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	12:17:24 PM	Recipe started at 12:17 PM
9/8/2011	12:17:24 PM	Helium valve closed
9/8/2011	12:17:24 PM	H2 valve closed
9/8/2011	12:17:24 PM	BCl3 valve closed
9/8/2011	12:17:24 PM	PH3 valve closed
9/8/2011	12:17:24 PM	SiCl4 pre valve closed
9/8/2011	12:17:24 PM	SiCl4 post valve closed
9/8/2011	12:17:24 PM	Main Vac valve closed
9/8/2011	12:17:24 PM	Bubbler valve closed
9/8/2011	12:17:24 PM	Bypass valve opened
9/8/2011	12:17:24 PM	Helium MFC set to  0.000000
9/8/2011	12:17:24 PM	H2 MFC set to  0.000000
9/8/2011	12:17:24 PM	BCl3 MFC set to  0.000000
9/8/2011	12:17:24 PM	PHl3 MFC set to  0.000000
9/8/2011	12:17:24 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:17:24 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:17:24 PM	Tube furnace set to 0
9/8/2011	12:18:24 PM	Helium valve closed
9/8/2011	12:18:24 PM	H2 valve closed
9/8/2011	12:18:24 PM	BCl3 valve closed
9/8/2011	12:18:24 PM	PH3 valve closed
9/8/2011	12:18:24 PM	SiCl4 pre valve closed
9/8/2011	12:18:24 PM	SiCl4 post valve closed
9/8/2011	12:18:24 PM	Main Vac valve closed
9/8/2011	12:18:24 PM	Bubbler valve closed
9/8/2011	12:18:24 PM	Bypass valve opened
9/8/2011	12:18:24 PM	Helium MFC set to  0.000000
9/8/2011	12:18:24 PM	H2 MFC set to  0.000000
9/8/2011	12:18:24 PM	BCl3 MFC set to  0.000000
9/8/2011	12:18:24 PM	PHl3 MFC set to  0.000000
9/8/2011	12:18:24 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:18:24 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:18:24 PM	Tube furnace set to 0
9/8/2011	12:19:24 PM	Helium valve closed
9/8/2011	12:19:24 PM	H2 valve closed
9/8/2011	12:19:24 PM	BCl3 valve closed
9/8/2011	12:19:24 PM	PH3 valve closed
9/8/2011	12:19:24 PM	SiCl4 pre valve closed
9/8/2011	12:19:24 PM	SiCl4 post valve closed
9/8/2011	12:19:24 PM	Bypass valve closed
9/8/2011	12:19:24 PM	Bubbler valve closed
9/8/2011	12:19:24 PM	Main Vac valve opened
9/8/2011	12:19:24 PM	Helium MFC set to  0.000000
9/8/2011	12:19:24 PM	H2 MFC set to  0.000000
9/8/2011	12:19:24 PM	BCl3 MFC set to  0.000000
9/8/2011	12:19:24 PM	PHl3 MFC set to  0.000000
9/8/2011	12:19:24 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:19:24 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:19:24 PM	Tube furnace set to 0
9/8/2011	12:19:25 PM	Run finished at 12:19 PM
9/8/2011	12:19:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	12:19:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	12:19:43 PM	Recipe started at 12:19 PM
9/8/2011	12:19:43 PM	Helium valve closed
9/8/2011	12:19:43 PM	H2 valve closed
9/8/2011	12:19:43 PM	BCl3 valve closed
9/8/2011	12:19:43 PM	PH3 valve closed
9/8/2011	12:19:43 PM	SiCl4 pre valve closed
9/8/2011	12:19:43 PM	SiCl4 post valve closed
9/8/2011	12:19:43 PM	Main Vac valve closed
9/8/2011	12:19:43 PM	Bubbler valve closed
9/8/2011	12:19:43 PM	Bypass valve opened
9/8/2011	12:19:43 PM	Helium MFC set to  0.000000
9/8/2011	12:19:43 PM	H2 MFC set to  0.000000
9/8/2011	12:19:43 PM	BCl3 MFC set to  0.000000
9/8/2011	12:19:43 PM	PHl3 MFC set to  0.000000
9/8/2011	12:19:43 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:19:43 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:19:43 PM	Tube furnace set to 0
9/8/2011	12:19:43 PM	Helium valve closed
9/8/2011	12:19:43 PM	H2 valve closed
9/8/2011	12:19:43 PM	BCl3 valve closed
9/8/2011	12:19:43 PM	PH3 valve closed
9/8/2011	12:19:43 PM	SiCl4 pre valve closed
9/8/2011	12:19:43 PM	SiCl4 post valve closed
9/8/2011	12:19:43 PM	Main Vac valve closed
9/8/2011	12:19:43 PM	Bubbler valve closed
9/8/2011	12:19:43 PM	Bypass valve opened
9/8/2011	12:19:43 PM	Helium MFC set to  0.000000
9/8/2011	12:19:43 PM	H2 MFC set to  0.000000
9/8/2011	12:19:43 PM	BCl3 MFC set to  0.000000
9/8/2011	12:19:43 PM	PHl3 MFC set to  0.000000
9/8/2011	12:19:43 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:19:43 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:19:43 PM	Tube furnace set to 0
9/8/2011	12:20:13 PM	Helium valve closed
9/8/2011	12:20:13 PM	H2 valve closed
9/8/2011	12:20:13 PM	BCl3 valve closed
9/8/2011	12:20:13 PM	PH3 valve closed
9/8/2011	12:20:13 PM	SiCl4 pre valve closed
9/8/2011	12:20:13 PM	SiCl4 post valve closed
9/8/2011	12:20:13 PM	Bypass valve closed
9/8/2011	12:20:13 PM	Bubbler valve closed
9/8/2011	12:20:13 PM	Main Vac valve opened
9/8/2011	12:20:13 PM	Helium MFC set to  0.000000
9/8/2011	12:20:13 PM	H2 MFC set to  0.000000
9/8/2011	12:20:13 PM	BCl3 MFC set to  0.000000
9/8/2011	12:20:13 PM	PHl3 MFC set to  0.000000
9/8/2011	12:20:13 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:20:13 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:20:14 PM	Tube furnace set to 0
9/8/2011	12:20:44 PM	H2 valve closed
9/8/2011	12:20:44 PM	BCl3 valve closed
9/8/2011	12:20:44 PM	PH3 valve closed
9/8/2011	12:20:44 PM	SiCl4 pre valve closed
9/8/2011	12:20:44 PM	SiCl4 post valve closed
9/8/2011	12:20:44 PM	Bypass valve closed
9/8/2011	12:20:44 PM	Bubbler valve closed
9/8/2011	12:20:44 PM	Helium valve opened
9/8/2011	12:20:44 PM	Main Vac valve opened
9/8/2011	12:20:44 PM	Helium MFC set to  20.000000
9/8/2011	12:20:44 PM	H2 MFC set to  0.000000
9/8/2011	12:20:44 PM	BCl3 MFC set to  0.000000
9/8/2011	12:20:44 PM	PHl3 MFC set to  0.000000
9/8/2011	12:20:44 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:20:44 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:20:44 PM	Tube furnace set to 0
9/8/2011	12:21:14 PM	Helium valve closed
9/8/2011	12:21:14 PM	H2 valve closed
9/8/2011	12:21:14 PM	BCl3 valve closed
9/8/2011	12:21:14 PM	PH3 valve closed
9/8/2011	12:21:14 PM	SiCl4 pre valve closed
9/8/2011	12:21:14 PM	SiCl4 post valve closed
9/8/2011	12:21:14 PM	Bypass valve closed
9/8/2011	12:21:14 PM	Bubbler valve closed
9/8/2011	12:21:14 PM	Main Vac valve opened
9/8/2011	12:21:14 PM	Helium MFC set to  0.000000
9/8/2011	12:21:14 PM	H2 MFC set to  0.000000
9/8/2011	12:21:14 PM	BCl3 MFC set to  0.000000
9/8/2011	12:21:14 PM	PHl3 MFC set to  0.000000
9/8/2011	12:21:14 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:21:14 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:21:14 PM	Tube furnace set to 0
9/8/2011	12:21:44 PM	H2 valve closed
9/8/2011	12:21:44 PM	BCl3 valve closed
9/8/2011	12:21:44 PM	PH3 valve closed
9/8/2011	12:21:44 PM	SiCl4 pre valve closed
9/8/2011	12:21:44 PM	SiCl4 post valve closed
9/8/2011	12:21:44 PM	Bypass valve closed
9/8/2011	12:21:44 PM	Bubbler valve closed
9/8/2011	12:21:44 PM	Helium valve opened
9/8/2011	12:21:44 PM	Main Vac valve opened
9/8/2011	12:21:44 PM	Helium MFC set to  20.000000
9/8/2011	12:21:44 PM	H2 MFC set to  0.000000
9/8/2011	12:21:44 PM	BCl3 MFC set to  0.000000
9/8/2011	12:21:44 PM	PHl3 MFC set to  0.000000
9/8/2011	12:21:44 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:21:44 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:21:44 PM	Tube furnace set to 0
9/8/2011	12:22:14 PM	Helium valve closed
9/8/2011	12:22:14 PM	H2 valve closed
9/8/2011	12:22:14 PM	BCl3 valve closed
9/8/2011	12:22:14 PM	PH3 valve closed
9/8/2011	12:22:14 PM	SiCl4 pre valve closed
9/8/2011	12:22:14 PM	SiCl4 post valve closed
9/8/2011	12:22:14 PM	Bypass valve closed
9/8/2011	12:22:14 PM	Bubbler valve closed
9/8/2011	12:22:14 PM	Main Vac valve opened
9/8/2011	12:22:14 PM	Helium MFC set to  0.000000
9/8/2011	12:22:14 PM	H2 MFC set to  0.000000
9/8/2011	12:22:14 PM	BCl3 MFC set to  0.000000
9/8/2011	12:22:14 PM	PHl3 MFC set to  0.000000
9/8/2011	12:22:14 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:22:14 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:22:14 PM	Tube furnace set to 0
9/8/2011	12:22:44 PM	H2 valve closed
9/8/2011	12:22:44 PM	BCl3 valve closed
9/8/2011	12:22:44 PM	PH3 valve closed
9/8/2011	12:22:44 PM	SiCl4 pre valve closed
9/8/2011	12:22:44 PM	SiCl4 post valve closed
9/8/2011	12:22:44 PM	Bypass valve closed
9/8/2011	12:22:44 PM	Bubbler valve closed
9/8/2011	12:22:44 PM	Helium valve opened
9/8/2011	12:22:44 PM	Main Vac valve opened
9/8/2011	12:22:44 PM	Helium MFC set to  20.000000
9/8/2011	12:22:44 PM	H2 MFC set to  0.000000
9/8/2011	12:22:44 PM	BCl3 MFC set to  0.000000
9/8/2011	12:22:44 PM	PHl3 MFC set to  0.000000
9/8/2011	12:22:44 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:22:44 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:22:45 PM	Tube furnace set to 0
9/8/2011	12:23:15 PM	Helium valve closed
9/8/2011	12:23:15 PM	H2 valve closed
9/8/2011	12:23:15 PM	BCl3 valve closed
9/8/2011	12:23:15 PM	PH3 valve closed
9/8/2011	12:23:15 PM	SiCl4 pre valve closed
9/8/2011	12:23:15 PM	SiCl4 post valve closed
9/8/2011	12:23:15 PM	Bypass valve closed
9/8/2011	12:23:15 PM	Bubbler valve closed
9/8/2011	12:23:15 PM	Main Vac valve opened
9/8/2011	12:23:15 PM	Helium MFC set to  0.000000
9/8/2011	12:23:15 PM	H2 MFC set to  0.000000
9/8/2011	12:23:15 PM	BCl3 MFC set to  0.000000
9/8/2011	12:23:15 PM	PHl3 MFC set to  0.000000
9/8/2011	12:23:15 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:23:15 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:23:15 PM	Tube furnace set to 0
9/8/2011	12:23:45 PM	H2 valve closed
9/8/2011	12:23:45 PM	BCl3 valve closed
9/8/2011	12:23:45 PM	PH3 valve closed
9/8/2011	12:23:45 PM	SiCl4 pre valve closed
9/8/2011	12:23:45 PM	SiCl4 post valve closed
9/8/2011	12:23:45 PM	Bypass valve closed
9/8/2011	12:23:45 PM	Bubbler valve closed
9/8/2011	12:23:45 PM	Helium valve opened
9/8/2011	12:23:45 PM	Main Vac valve opened
9/8/2011	12:23:45 PM	Helium MFC set to  20.000000
9/8/2011	12:23:45 PM	H2 MFC set to  0.000000
9/8/2011	12:23:45 PM	BCl3 MFC set to  0.000000
9/8/2011	12:23:45 PM	PHl3 MFC set to  0.000000
9/8/2011	12:23:45 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:23:45 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:23:45 PM	Tube furnace set to 0
9/8/2011	12:24:15 PM	Helium valve closed
9/8/2011	12:24:15 PM	H2 valve closed
9/8/2011	12:24:15 PM	BCl3 valve closed
9/8/2011	12:24:15 PM	PH3 valve closed
9/8/2011	12:24:15 PM	SiCl4 pre valve closed
9/8/2011	12:24:15 PM	SiCl4 post valve closed
9/8/2011	12:24:15 PM	Bypass valve closed
9/8/2011	12:24:15 PM	Bubbler valve closed
9/8/2011	12:24:15 PM	Main Vac valve opened
9/8/2011	12:24:15 PM	Helium MFC set to  0.000000
9/8/2011	12:24:15 PM	H2 MFC set to  0.000000
9/8/2011	12:24:15 PM	BCl3 MFC set to  0.000000
9/8/2011	12:24:15 PM	PHl3 MFC set to  0.000000
9/8/2011	12:24:15 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:24:15 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:24:15 PM	Tube furnace set to 0
9/8/2011	12:24:45 PM	H2 valve closed
9/8/2011	12:24:45 PM	BCl3 valve closed
9/8/2011	12:24:45 PM	PH3 valve closed
9/8/2011	12:24:45 PM	SiCl4 pre valve closed
9/8/2011	12:24:45 PM	SiCl4 post valve closed
9/8/2011	12:24:45 PM	Bypass valve closed
9/8/2011	12:24:45 PM	Bubbler valve closed
9/8/2011	12:24:45 PM	Helium valve opened
9/8/2011	12:24:45 PM	Main Vac valve opened
9/8/2011	12:24:45 PM	Helium MFC set to  20.000000
9/8/2011	12:24:45 PM	H2 MFC set to  0.000000
9/8/2011	12:24:45 PM	BCl3 MFC set to  0.000000
9/8/2011	12:24:45 PM	PHl3 MFC set to  0.000000
9/8/2011	12:24:45 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:24:45 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:24:45 PM	Tube furnace set to 0
9/8/2011	12:25:15 PM	Helium valve closed
9/8/2011	12:25:15 PM	H2 valve closed
9/8/2011	12:25:15 PM	BCl3 valve closed
9/8/2011	12:25:15 PM	PH3 valve closed
9/8/2011	12:25:15 PM	SiCl4 pre valve closed
9/8/2011	12:25:15 PM	SiCl4 post valve closed
9/8/2011	12:25:15 PM	Bypass valve closed
9/8/2011	12:25:15 PM	Bubbler valve closed
9/8/2011	12:25:15 PM	Main Vac valve opened
9/8/2011	12:25:15 PM	Helium MFC set to  0.000000
9/8/2011	12:25:15 PM	H2 MFC set to  0.000000
9/8/2011	12:25:15 PM	BCl3 MFC set to  0.000000
9/8/2011	12:25:15 PM	PHl3 MFC set to  0.000000
9/8/2011	12:25:15 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:25:15 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:25:16 PM	Tube furnace set to 0
9/8/2011	12:25:46 PM	H2 valve closed
9/8/2011	12:25:46 PM	BCl3 valve closed
9/8/2011	12:25:46 PM	PH3 valve closed
9/8/2011	12:25:46 PM	SiCl4 pre valve closed
9/8/2011	12:25:46 PM	SiCl4 post valve closed
9/8/2011	12:25:46 PM	Bypass valve closed
9/8/2011	12:25:46 PM	Bubbler valve closed
9/8/2011	12:25:46 PM	Helium valve opened
9/8/2011	12:25:46 PM	Main Vac valve opened
9/8/2011	12:25:46 PM	Helium MFC set to  20.000000
9/8/2011	12:25:46 PM	H2 MFC set to  0.000000
9/8/2011	12:25:46 PM	BCl3 MFC set to  0.000000
9/8/2011	12:25:46 PM	PHl3 MFC set to  0.000000
9/8/2011	12:25:46 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:25:46 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:25:46 PM	Tube furnace set to 0
9/8/2011	12:26:16 PM	Helium valve closed
9/8/2011	12:26:16 PM	H2 valve closed
9/8/2011	12:26:16 PM	BCl3 valve closed
9/8/2011	12:26:16 PM	PH3 valve closed
9/8/2011	12:26:16 PM	SiCl4 pre valve closed
9/8/2011	12:26:16 PM	SiCl4 post valve closed
9/8/2011	12:26:16 PM	Bypass valve closed
9/8/2011	12:26:16 PM	Bubbler valve closed
9/8/2011	12:26:16 PM	Main Vac valve opened
9/8/2011	12:26:16 PM	Helium MFC set to  0.000000
9/8/2011	12:26:16 PM	H2 MFC set to  0.000000
9/8/2011	12:26:16 PM	BCl3 MFC set to  0.000000
9/8/2011	12:26:16 PM	PHl3 MFC set to  0.000000
9/8/2011	12:26:16 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:26:16 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:26:16 PM	Tube furnace set to 0
9/8/2011	12:26:46 PM	H2 valve closed
9/8/2011	12:26:46 PM	BCl3 valve closed
9/8/2011	12:26:46 PM	PH3 valve closed
9/8/2011	12:26:46 PM	SiCl4 pre valve closed
9/8/2011	12:26:46 PM	SiCl4 post valve closed
9/8/2011	12:26:46 PM	Bypass valve closed
9/8/2011	12:26:46 PM	Bubbler valve closed
9/8/2011	12:26:46 PM	Helium valve opened
9/8/2011	12:26:46 PM	Main Vac valve opened
9/8/2011	12:26:46 PM	Helium MFC set to  20.000000
9/8/2011	12:26:46 PM	H2 MFC set to  0.000000
9/8/2011	12:26:46 PM	BCl3 MFC set to  0.000000
9/8/2011	12:26:46 PM	PHl3 MFC set to  0.000000
9/8/2011	12:26:46 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:26:46 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:26:46 PM	Tube furnace set to 0
9/8/2011	12:27:16 PM	Helium valve closed
9/8/2011	12:27:16 PM	H2 valve closed
9/8/2011	12:27:16 PM	BCl3 valve closed
9/8/2011	12:27:16 PM	PH3 valve closed
9/8/2011	12:27:16 PM	SiCl4 pre valve closed
9/8/2011	12:27:16 PM	SiCl4 post valve closed
9/8/2011	12:27:16 PM	Bypass valve closed
9/8/2011	12:27:16 PM	Bubbler valve closed
9/8/2011	12:27:16 PM	Main Vac valve opened
9/8/2011	12:27:16 PM	Helium MFC set to  0.000000
9/8/2011	12:27:16 PM	H2 MFC set to  0.000000
9/8/2011	12:27:16 PM	BCl3 MFC set to  0.000000
9/8/2011	12:27:16 PM	PHl3 MFC set to  0.000000
9/8/2011	12:27:16 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:27:16 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:27:16 PM	Tube furnace set to 0
9/8/2011	12:27:46 PM	H2 valve closed
9/8/2011	12:27:46 PM	BCl3 valve closed
9/8/2011	12:27:46 PM	PH3 valve closed
9/8/2011	12:27:46 PM	SiCl4 pre valve closed
9/8/2011	12:27:46 PM	SiCl4 post valve closed
9/8/2011	12:27:46 PM	Bypass valve closed
9/8/2011	12:27:46 PM	Bubbler valve closed
9/8/2011	12:27:46 PM	Helium valve opened
9/8/2011	12:27:46 PM	Main Vac valve opened
9/8/2011	12:27:46 PM	Helium MFC set to  20.000000
9/8/2011	12:27:46 PM	H2 MFC set to  0.000000
9/8/2011	12:27:46 PM	BCl3 MFC set to  0.000000
9/8/2011	12:27:46 PM	PHl3 MFC set to  0.000000
9/8/2011	12:27:46 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:27:46 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:27:46 PM	Tube furnace set to 0
9/8/2011	12:28:17 PM	Helium valve closed
9/8/2011	12:28:17 PM	H2 valve closed
9/8/2011	12:28:17 PM	BCl3 valve closed
9/8/2011	12:28:17 PM	PH3 valve closed
9/8/2011	12:28:17 PM	SiCl4 pre valve closed
9/8/2011	12:28:17 PM	SiCl4 post valve closed
9/8/2011	12:28:17 PM	Bypass valve closed
9/8/2011	12:28:17 PM	Bubbler valve closed
9/8/2011	12:28:17 PM	Main Vac valve opened
9/8/2011	12:28:17 PM	Helium MFC set to  0.000000
9/8/2011	12:28:17 PM	H2 MFC set to  0.000000
9/8/2011	12:28:17 PM	BCl3 MFC set to  0.000000
9/8/2011	12:28:17 PM	PHl3 MFC set to  0.000000
9/8/2011	12:28:17 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:28:17 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:28:17 PM	Tube furnace set to 0
9/8/2011	12:28:47 PM	H2 valve closed
9/8/2011	12:28:47 PM	BCl3 valve closed
9/8/2011	12:28:47 PM	PH3 valve closed
9/8/2011	12:28:47 PM	SiCl4 pre valve closed
9/8/2011	12:28:47 PM	SiCl4 post valve closed
9/8/2011	12:28:47 PM	Bypass valve closed
9/8/2011	12:28:47 PM	Bubbler valve closed
9/8/2011	12:28:47 PM	Helium valve opened
9/8/2011	12:28:47 PM	Main Vac valve opened
9/8/2011	12:28:47 PM	Helium MFC set to  20.000000
9/8/2011	12:28:47 PM	H2 MFC set to  0.000000
9/8/2011	12:28:47 PM	BCl3 MFC set to  0.000000
9/8/2011	12:28:47 PM	PHl3 MFC set to  0.000000
9/8/2011	12:28:47 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:28:47 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:28:47 PM	Tube furnace set to 0
9/8/2011	12:29:17 PM	Helium valve closed
9/8/2011	12:29:17 PM	H2 valve closed
9/8/2011	12:29:17 PM	BCl3 valve closed
9/8/2011	12:29:17 PM	PH3 valve closed
9/8/2011	12:29:17 PM	SiCl4 pre valve closed
9/8/2011	12:29:17 PM	SiCl4 post valve closed
9/8/2011	12:29:17 PM	Bypass valve closed
9/8/2011	12:29:17 PM	Bubbler valve closed
9/8/2011	12:29:17 PM	Main Vac valve opened
9/8/2011	12:29:17 PM	Helium MFC set to  0.000000
9/8/2011	12:29:17 PM	H2 MFC set to  0.000000
9/8/2011	12:29:17 PM	BCl3 MFC set to  0.000000
9/8/2011	12:29:17 PM	PHl3 MFC set to  0.000000
9/8/2011	12:29:17 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:29:17 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:29:17 PM	Tube furnace set to 0
9/8/2011	12:29:47 PM	H2 valve closed
9/8/2011	12:29:47 PM	BCl3 valve closed
9/8/2011	12:29:47 PM	PH3 valve closed
9/8/2011	12:29:47 PM	SiCl4 pre valve closed
9/8/2011	12:29:47 PM	SiCl4 post valve closed
9/8/2011	12:29:47 PM	Bypass valve closed
9/8/2011	12:29:47 PM	Bubbler valve closed
9/8/2011	12:29:47 PM	Helium valve opened
9/8/2011	12:29:47 PM	Main Vac valve opened
9/8/2011	12:29:47 PM	Helium MFC set to  20.000000
9/8/2011	12:29:47 PM	H2 MFC set to  0.000000
9/8/2011	12:29:47 PM	BCl3 MFC set to  0.000000
9/8/2011	12:29:47 PM	PHl3 MFC set to  0.000000
9/8/2011	12:29:47 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:29:47 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:29:47 PM	Tube furnace set to 0
9/8/2011	12:30:17 PM	Helium valve closed
9/8/2011	12:30:17 PM	H2 valve closed
9/8/2011	12:30:17 PM	BCl3 valve closed
9/8/2011	12:30:17 PM	PH3 valve closed
9/8/2011	12:30:17 PM	SiCl4 pre valve closed
9/8/2011	12:30:17 PM	SiCl4 post valve closed
9/8/2011	12:30:17 PM	Bypass valve closed
9/8/2011	12:30:17 PM	Bubbler valve closed
9/8/2011	12:30:17 PM	Main Vac valve opened
9/8/2011	12:30:17 PM	Helium MFC set to  0.000000
9/8/2011	12:30:17 PM	H2 MFC set to  0.000000
9/8/2011	12:30:17 PM	BCl3 MFC set to  0.000000
9/8/2011	12:30:17 PM	PHl3 MFC set to  0.000000
9/8/2011	12:30:17 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:30:17 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:30:17 PM	Tube furnace set to 0
9/8/2011	12:30:18 PM	Run finished at 12:30 PM
9/8/2011	12:30:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	12:56:54 PM	Main Vac valve closed
9/8/2011	12:57:03 PM	Main Vac valve opened
9/8/2011	12:57:58 PM	Recipe started at 12:57 PM
9/8/2011	12:57:58 PM	Helium valve closed
9/8/2011	12:57:58 PM	H2 valve closed
9/8/2011	12:57:58 PM	BCl3 valve closed
9/8/2011	12:57:58 PM	PH3 valve closed
9/8/2011	12:57:58 PM	SiCl4 pre valve closed
9/8/2011	12:57:58 PM	SiCl4 post valve closed
9/8/2011	12:57:58 PM	Main Vac valve closed
9/8/2011	12:57:58 PM	Bypass valve closed
9/8/2011	12:57:58 PM	Bubbler valve closed
9/8/2011	12:57:58 PM	Helium MFC set to  0.000000
9/8/2011	12:57:58 PM	H2 MFC set to  0.000000
9/8/2011	12:57:58 PM	BCl3 MFC set to  0.000000
9/8/2011	12:57:58 PM	PHl3 MFC set to  0.000000
9/8/2011	12:57:58 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:57:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:57:58 PM	Tube furnace set to 0
9/8/2011	12:58:01 PM	Helium valve closed
9/8/2011	12:58:01 PM	BCl3 valve closed
9/8/2011	12:58:01 PM	PH3 valve closed
9/8/2011	12:58:01 PM	SiCl4 pre valve closed
9/8/2011	12:58:01 PM	SiCl4 post valve closed
9/8/2011	12:58:01 PM	Main Vac valve closed
9/8/2011	12:58:01 PM	Bypass valve closed
9/8/2011	12:58:01 PM	Bubbler valve closed
9/8/2011	12:58:01 PM	H2 valve opened
9/8/2011	12:58:01 PM	Helium MFC set to  0.000000
9/8/2011	12:58:01 PM	H2 MFC set to  500.000000
9/8/2011	12:58:01 PM	BCl3 MFC set to  0.000000
9/8/2011	12:58:01 PM	PHl3 MFC set to  0.000000
9/8/2011	12:58:01 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:58:01 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:58:01 PM	Tube furnace set to 0
9/8/2011	12:59:07 PM	Helium valve closed
9/8/2011	12:59:07 PM	BCl3 valve closed
9/8/2011	12:59:07 PM	PH3 valve closed
9/8/2011	12:59:07 PM	SiCl4 pre valve closed
9/8/2011	12:59:07 PM	SiCl4 post valve closed
9/8/2011	12:59:07 PM	Main Vac valve closed
9/8/2011	12:59:07 PM	Bypass valve closed
9/8/2011	12:59:07 PM	H2 valve opened
9/8/2011	12:59:07 PM	Bubbler valve opened
9/8/2011	12:59:07 PM	Helium MFC set to  0.000000
9/8/2011	12:59:07 PM	H2 MFC set to  500.000000
9/8/2011	12:59:07 PM	BCl3 MFC set to  0.000000
9/8/2011	12:59:07 PM	PHl3 MFC set to  0.000000
9/8/2011	12:59:07 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:59:07 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:59:07 PM	Tube furnace set to 0
9/8/2011	12:59:08 PM	Helium valve closed
9/8/2011	12:59:08 PM	BCl3 valve closed
9/8/2011	12:59:08 PM	PH3 valve closed
9/8/2011	12:59:08 PM	SiCl4 pre valve closed
9/8/2011	12:59:08 PM	SiCl4 post valve closed
9/8/2011	12:59:08 PM	Main Vac valve closed
9/8/2011	12:59:08 PM	Bypass valve closed
9/8/2011	12:59:08 PM	H2 valve opened
9/8/2011	12:59:08 PM	Bubbler valve opened
9/8/2011	12:59:08 PM	Helium MFC set to  0.000000
9/8/2011	12:59:08 PM	H2 MFC set to  500.000000
9/8/2011	12:59:08 PM	BCl3 MFC set to  0.000000
9/8/2011	12:59:08 PM	PHl3 MFC set to  0.000000
9/8/2011	12:59:08 PM	SiCl4 MFC set to  0.000000
9/8/2011	12:59:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	12:59:09 PM	Tube furnace set to 1000
9/8/2011	1:19:09 PM	Helium valve closed
9/8/2011	1:19:09 PM	PH3 valve closed
9/8/2011	1:19:09 PM	Main Vac valve closed
9/8/2011	1:19:09 PM	Bypass valve closed
9/8/2011	1:19:09 PM	H2 valve opened
9/8/2011	1:19:09 PM	BCl3 valve opened
9/8/2011	1:19:09 PM	SiCl4 pre valve opened
9/8/2011	1:19:09 PM	SiCl4 post valve opened
9/8/2011	1:19:09 PM	Bubbler valve opened
9/8/2011	1:19:09 PM	Helium MFC set to  0.000000
9/8/2011	1:19:09 PM	H2 MFC set to  500.000000
9/8/2011	1:19:09 PM	BCl3 MFC set to  2.200000
9/8/2011	1:19:09 PM	PHl3 MFC set to  0.000000
9/8/2011	1:19:09 PM	SiCl4 MFC set to  50.000000
9/8/2011	1:19:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:19:09 PM	Tube furnace set to 1000
9/8/2011	1:35:49 PM	Helium valve closed
9/8/2011	1:35:49 PM	BCl3 valve closed
9/8/2011	1:35:49 PM	PH3 valve closed
9/8/2011	1:35:49 PM	SiCl4 pre valve closed
9/8/2011	1:35:49 PM	SiCl4 post valve closed
9/8/2011	1:35:49 PM	Main Vac valve closed
9/8/2011	1:35:49 PM	Bypass valve closed
9/8/2011	1:35:49 PM	H2 valve opened
9/8/2011	1:35:49 PM	Bubbler valve opened
9/8/2011	1:35:49 PM	Helium MFC set to  0.000000
9/8/2011	1:35:49 PM	H2 MFC set to  500.000000
9/8/2011	1:35:49 PM	BCl3 MFC set to  0.000000
9/8/2011	1:35:49 PM	PHl3 MFC set to  0.000000
9/8/2011	1:35:49 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:35:49 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:35:49 PM	Tube furnace set to 750
9/8/2011	1:40:49 PM	H2 valve closed
9/8/2011	1:40:49 PM	BCl3 valve closed
9/8/2011	1:40:49 PM	PH3 valve closed
9/8/2011	1:40:49 PM	SiCl4 pre valve closed
9/8/2011	1:40:49 PM	SiCl4 post valve closed
9/8/2011	1:40:49 PM	Main Vac valve closed
9/8/2011	1:40:49 PM	Bypass valve closed
9/8/2011	1:40:49 PM	Helium valve opened
9/8/2011	1:40:49 PM	Bubbler valve opened
9/8/2011	1:40:49 PM	Helium MFC set to  500.000000
9/8/2011	1:40:49 PM	H2 MFC set to  0.000000
9/8/2011	1:40:49 PM	BCl3 MFC set to  0.000000
9/8/2011	1:40:49 PM	PHl3 MFC set to  0.000000
9/8/2011	1:40:49 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:40:49 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:40:49 PM	Tube furnace set to 0
9/8/2011	1:51:20 PM	Helium valve closed
9/8/2011	1:51:20 PM	H2 valve closed
9/8/2011	1:51:20 PM	BCl3 valve closed
9/8/2011	1:51:20 PM	PH3 valve closed
9/8/2011	1:51:20 PM	SiCl4 pre valve closed
9/8/2011	1:51:20 PM	SiCl4 post valve closed
9/8/2011	1:51:20 PM	Main Vac valve closed
9/8/2011	1:51:20 PM	Bypass valve closed
9/8/2011	1:51:20 PM	Bubbler valve closed
9/8/2011	1:51:20 PM	Helium MFC set to  0.000000
9/8/2011	1:51:20 PM	H2 MFC set to  0.000000
9/8/2011	1:51:20 PM	BCl3 MFC set to  0.000000
9/8/2011	1:51:20 PM	PHl3 MFC set to  0.000000
9/8/2011	1:51:20 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:51:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:51:20 PM	Tube furnace set to 0
9/8/2011	1:51:21 PM	Run finished at 1:51 PM
9/8/2011	1:53:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	1:53:43 PM	Recipe started at 1:53 PM
9/8/2011	1:53:43 PM	Helium valve closed
9/8/2011	1:53:43 PM	H2 valve closed
9/8/2011	1:53:43 PM	BCl3 valve closed
9/8/2011	1:53:43 PM	PH3 valve closed
9/8/2011	1:53:43 PM	SiCl4 pre valve closed
9/8/2011	1:53:43 PM	SiCl4 post valve closed
9/8/2011	1:53:43 PM	Main Vac valve closed
9/8/2011	1:53:43 PM	Bubbler valve closed
9/8/2011	1:53:43 PM	Bypass valve opened
9/8/2011	1:53:43 PM	Helium MFC set to  0.000000
9/8/2011	1:53:43 PM	H2 MFC set to  0.000000
9/8/2011	1:53:43 PM	BCl3 MFC set to  0.000000
9/8/2011	1:53:43 PM	PHl3 MFC set to  0.000000
9/8/2011	1:53:43 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:53:43 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:53:43 PM	Tube furnace set to 0
9/8/2011	1:54:39 PM	Helium valve closed
9/8/2011	1:54:39 PM	H2 valve closed
9/8/2011	1:54:39 PM	BCl3 valve closed
9/8/2011	1:54:39 PM	PH3 valve closed
9/8/2011	1:54:39 PM	SiCl4 pre valve closed
9/8/2011	1:54:39 PM	SiCl4 post valve closed
9/8/2011	1:54:39 PM	Main Vac valve closed
9/8/2011	1:54:39 PM	Bubbler valve closed
9/8/2011	1:54:39 PM	Bypass valve opened
9/8/2011	1:54:39 PM	Helium MFC set to  0.000000
9/8/2011	1:54:39 PM	H2 MFC set to  0.000000
9/8/2011	1:54:39 PM	BCl3 MFC set to  0.000000
9/8/2011	1:54:39 PM	PHl3 MFC set to  0.000000
9/8/2011	1:54:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:54:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:54:39 PM	Tube furnace set to 0
9/8/2011	1:55:39 PM	Helium valve closed
9/8/2011	1:55:39 PM	H2 valve closed
9/8/2011	1:55:39 PM	BCl3 valve closed
9/8/2011	1:55:39 PM	PH3 valve closed
9/8/2011	1:55:39 PM	SiCl4 pre valve closed
9/8/2011	1:55:39 PM	SiCl4 post valve closed
9/8/2011	1:55:39 PM	Bypass valve closed
9/8/2011	1:55:39 PM	Bubbler valve closed
9/8/2011	1:55:39 PM	Main Vac valve opened
9/8/2011	1:55:39 PM	Helium MFC set to  0.000000
9/8/2011	1:55:39 PM	H2 MFC set to  0.000000
9/8/2011	1:55:39 PM	BCl3 MFC set to  0.000000
9/8/2011	1:55:39 PM	PHl3 MFC set to  0.000000
9/8/2011	1:55:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:55:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:55:39 PM	Tube furnace set to 0
9/8/2011	1:55:40 PM	Run finished at 1:55 PM
9/8/2011	1:55:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	1:55:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	1:56:07 PM	Recipe started at 1:56 PM
9/8/2011	1:56:07 PM	Helium valve closed
9/8/2011	1:56:07 PM	H2 valve closed
9/8/2011	1:56:07 PM	BCl3 valve closed
9/8/2011	1:56:07 PM	PH3 valve closed
9/8/2011	1:56:07 PM	SiCl4 pre valve closed
9/8/2011	1:56:07 PM	SiCl4 post valve closed
9/8/2011	1:56:07 PM	Main Vac valve closed
9/8/2011	1:56:07 PM	Bubbler valve closed
9/8/2011	1:56:07 PM	Bypass valve opened
9/8/2011	1:56:07 PM	Helium MFC set to  0.000000
9/8/2011	1:56:07 PM	H2 MFC set to  0.000000
9/8/2011	1:56:07 PM	BCl3 MFC set to  0.000000
9/8/2011	1:56:07 PM	PHl3 MFC set to  0.000000
9/8/2011	1:56:07 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:56:07 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:56:08 PM	Tube furnace set to 0
9/8/2011	1:56:08 PM	Helium valve closed
9/8/2011	1:56:08 PM	H2 valve closed
9/8/2011	1:56:08 PM	BCl3 valve closed
9/8/2011	1:56:08 PM	PH3 valve closed
9/8/2011	1:56:08 PM	SiCl4 pre valve closed
9/8/2011	1:56:08 PM	SiCl4 post valve closed
9/8/2011	1:56:08 PM	Main Vac valve closed
9/8/2011	1:56:08 PM	Bubbler valve closed
9/8/2011	1:56:08 PM	Bypass valve opened
9/8/2011	1:56:08 PM	Helium MFC set to  0.000000
9/8/2011	1:56:08 PM	H2 MFC set to  0.000000
9/8/2011	1:56:08 PM	BCl3 MFC set to  0.000000
9/8/2011	1:56:08 PM	PHl3 MFC set to  0.000000
9/8/2011	1:56:08 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:56:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:56:08 PM	Tube furnace set to 0
9/8/2011	1:56:38 PM	Helium valve closed
9/8/2011	1:56:38 PM	H2 valve closed
9/8/2011	1:56:38 PM	BCl3 valve closed
9/8/2011	1:56:38 PM	PH3 valve closed
9/8/2011	1:56:38 PM	SiCl4 pre valve closed
9/8/2011	1:56:38 PM	SiCl4 post valve closed
9/8/2011	1:56:38 PM	Bypass valve closed
9/8/2011	1:56:38 PM	Bubbler valve closed
9/8/2011	1:56:38 PM	Main Vac valve opened
9/8/2011	1:56:38 PM	Helium MFC set to  0.000000
9/8/2011	1:56:38 PM	H2 MFC set to  0.000000
9/8/2011	1:56:38 PM	BCl3 MFC set to  0.000000
9/8/2011	1:56:38 PM	PHl3 MFC set to  0.000000
9/8/2011	1:56:38 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:56:38 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:56:38 PM	Tube furnace set to 0
9/8/2011	1:57:08 PM	H2 valve closed
9/8/2011	1:57:08 PM	BCl3 valve closed
9/8/2011	1:57:08 PM	PH3 valve closed
9/8/2011	1:57:08 PM	SiCl4 pre valve closed
9/8/2011	1:57:08 PM	SiCl4 post valve closed
9/8/2011	1:57:08 PM	Bypass valve closed
9/8/2011	1:57:08 PM	Bubbler valve closed
9/8/2011	1:57:08 PM	Helium valve opened
9/8/2011	1:57:08 PM	Main Vac valve opened
9/8/2011	1:57:08 PM	Helium MFC set to  20.000000
9/8/2011	1:57:08 PM	H2 MFC set to  0.000000
9/8/2011	1:57:08 PM	BCl3 MFC set to  0.000000
9/8/2011	1:57:08 PM	PHl3 MFC set to  0.000000
9/8/2011	1:57:08 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:57:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:57:08 PM	Tube furnace set to 0
9/8/2011	1:57:38 PM	Helium valve closed
9/8/2011	1:57:38 PM	H2 valve closed
9/8/2011	1:57:38 PM	BCl3 valve closed
9/8/2011	1:57:39 PM	PH3 valve closed
9/8/2011	1:57:39 PM	SiCl4 pre valve closed
9/8/2011	1:57:39 PM	SiCl4 post valve closed
9/8/2011	1:57:39 PM	Bypass valve closed
9/8/2011	1:57:39 PM	Bubbler valve closed
9/8/2011	1:57:39 PM	Main Vac valve opened
9/8/2011	1:57:39 PM	Helium MFC set to  0.000000
9/8/2011	1:57:39 PM	H2 MFC set to  0.000000
9/8/2011	1:57:39 PM	BCl3 MFC set to  0.000000
9/8/2011	1:57:39 PM	PHl3 MFC set to  0.000000
9/8/2011	1:57:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:57:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:57:39 PM	Tube furnace set to 0
9/8/2011	1:58:09 PM	H2 valve closed
9/8/2011	1:58:09 PM	BCl3 valve closed
9/8/2011	1:58:09 PM	PH3 valve closed
9/8/2011	1:58:09 PM	SiCl4 pre valve closed
9/8/2011	1:58:09 PM	SiCl4 post valve closed
9/8/2011	1:58:09 PM	Bypass valve closed
9/8/2011	1:58:09 PM	Bubbler valve closed
9/8/2011	1:58:09 PM	Helium valve opened
9/8/2011	1:58:09 PM	Main Vac valve opened
9/8/2011	1:58:09 PM	Helium MFC set to  20.000000
9/8/2011	1:58:09 PM	H2 MFC set to  0.000000
9/8/2011	1:58:09 PM	BCl3 MFC set to  0.000000
9/8/2011	1:58:09 PM	PHl3 MFC set to  0.000000
9/8/2011	1:58:09 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:58:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:58:09 PM	Tube furnace set to 0
9/8/2011	1:58:39 PM	Helium valve closed
9/8/2011	1:58:39 PM	H2 valve closed
9/8/2011	1:58:39 PM	BCl3 valve closed
9/8/2011	1:58:39 PM	PH3 valve closed
9/8/2011	1:58:39 PM	SiCl4 pre valve closed
9/8/2011	1:58:39 PM	SiCl4 post valve closed
9/8/2011	1:58:39 PM	Bypass valve closed
9/8/2011	1:58:39 PM	Bubbler valve closed
9/8/2011	1:58:39 PM	Main Vac valve opened
9/8/2011	1:58:39 PM	Helium MFC set to  0.000000
9/8/2011	1:58:39 PM	H2 MFC set to  0.000000
9/8/2011	1:58:39 PM	BCl3 MFC set to  0.000000
9/8/2011	1:58:39 PM	PHl3 MFC set to  0.000000
9/8/2011	1:58:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:58:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:58:39 PM	Tube furnace set to 0
9/8/2011	1:59:09 PM	H2 valve closed
9/8/2011	1:59:09 PM	BCl3 valve closed
9/8/2011	1:59:09 PM	PH3 valve closed
9/8/2011	1:59:09 PM	SiCl4 pre valve closed
9/8/2011	1:59:09 PM	SiCl4 post valve closed
9/8/2011	1:59:09 PM	Bypass valve closed
9/8/2011	1:59:09 PM	Bubbler valve closed
9/8/2011	1:59:09 PM	Helium valve opened
9/8/2011	1:59:09 PM	Main Vac valve opened
9/8/2011	1:59:09 PM	Helium MFC set to  20.000000
9/8/2011	1:59:09 PM	H2 MFC set to  0.000000
9/8/2011	1:59:09 PM	BCl3 MFC set to  0.000000
9/8/2011	1:59:09 PM	PHl3 MFC set to  0.000000
9/8/2011	1:59:09 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:59:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:59:09 PM	Tube furnace set to 0
9/8/2011	1:59:39 PM	Helium valve closed
9/8/2011	1:59:39 PM	H2 valve closed
9/8/2011	1:59:39 PM	BCl3 valve closed
9/8/2011	1:59:39 PM	PH3 valve closed
9/8/2011	1:59:39 PM	SiCl4 pre valve closed
9/8/2011	1:59:39 PM	SiCl4 post valve closed
9/8/2011	1:59:39 PM	Bypass valve closed
9/8/2011	1:59:39 PM	Bubbler valve closed
9/8/2011	1:59:39 PM	Main Vac valve opened
9/8/2011	1:59:39 PM	Helium MFC set to  0.000000
9/8/2011	1:59:39 PM	H2 MFC set to  0.000000
9/8/2011	1:59:39 PM	BCl3 MFC set to  0.000000
9/8/2011	1:59:39 PM	PHl3 MFC set to  0.000000
9/8/2011	1:59:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	1:59:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	1:59:39 PM	Tube furnace set to 0
9/8/2011	2:00:09 PM	H2 valve closed
9/8/2011	2:00:09 PM	BCl3 valve closed
9/8/2011	2:00:09 PM	PH3 valve closed
9/8/2011	2:00:09 PM	SiCl4 pre valve closed
9/8/2011	2:00:09 PM	SiCl4 post valve closed
9/8/2011	2:00:09 PM	Bypass valve closed
9/8/2011	2:00:09 PM	Bubbler valve closed
9/8/2011	2:00:09 PM	Helium valve opened
9/8/2011	2:00:09 PM	Main Vac valve opened
9/8/2011	2:00:09 PM	Helium MFC set to  20.000000
9/8/2011	2:00:10 PM	H2 MFC set to  0.000000
9/8/2011	2:00:10 PM	BCl3 MFC set to  0.000000
9/8/2011	2:00:10 PM	PHl3 MFC set to  0.000000
9/8/2011	2:00:10 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:00:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:00:10 PM	Tube furnace set to 0
9/8/2011	2:00:40 PM	Helium valve closed
9/8/2011	2:00:40 PM	H2 valve closed
9/8/2011	2:00:40 PM	BCl3 valve closed
9/8/2011	2:00:40 PM	PH3 valve closed
9/8/2011	2:00:40 PM	SiCl4 pre valve closed
9/8/2011	2:00:40 PM	SiCl4 post valve closed
9/8/2011	2:00:40 PM	Bypass valve closed
9/8/2011	2:00:40 PM	Bubbler valve closed
9/8/2011	2:00:40 PM	Main Vac valve opened
9/8/2011	2:00:40 PM	Helium MFC set to  0.000000
9/8/2011	2:00:40 PM	H2 MFC set to  0.000000
9/8/2011	2:00:40 PM	BCl3 MFC set to  0.000000
9/8/2011	2:00:40 PM	PHl3 MFC set to  0.000000
9/8/2011	2:00:40 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:00:40 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:00:40 PM	Tube furnace set to 0
9/8/2011	2:01:10 PM	H2 valve closed
9/8/2011	2:01:10 PM	BCl3 valve closed
9/8/2011	2:01:10 PM	PH3 valve closed
9/8/2011	2:01:10 PM	SiCl4 pre valve closed
9/8/2011	2:01:10 PM	SiCl4 post valve closed
9/8/2011	2:01:10 PM	Bypass valve closed
9/8/2011	2:01:10 PM	Bubbler valve closed
9/8/2011	2:01:10 PM	Helium valve opened
9/8/2011	2:01:10 PM	Main Vac valve opened
9/8/2011	2:01:10 PM	Helium MFC set to  20.000000
9/8/2011	2:01:10 PM	H2 MFC set to  0.000000
9/8/2011	2:01:10 PM	BCl3 MFC set to  0.000000
9/8/2011	2:01:10 PM	PHl3 MFC set to  0.000000
9/8/2011	2:01:10 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:01:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:01:10 PM	Tube furnace set to 0
9/8/2011	2:01:40 PM	Helium valve closed
9/8/2011	2:01:40 PM	H2 valve closed
9/8/2011	2:01:40 PM	BCl3 valve closed
9/8/2011	2:01:40 PM	PH3 valve closed
9/8/2011	2:01:40 PM	SiCl4 pre valve closed
9/8/2011	2:01:40 PM	SiCl4 post valve closed
9/8/2011	2:01:40 PM	Bypass valve closed
9/8/2011	2:01:40 PM	Bubbler valve closed
9/8/2011	2:01:40 PM	Main Vac valve opened
9/8/2011	2:01:40 PM	Helium MFC set to  0.000000
9/8/2011	2:01:40 PM	H2 MFC set to  0.000000
9/8/2011	2:01:40 PM	BCl3 MFC set to  0.000000
9/8/2011	2:01:40 PM	PHl3 MFC set to  0.000000
9/8/2011	2:01:40 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:01:40 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:01:40 PM	Tube furnace set to 0
9/8/2011	2:02:10 PM	H2 valve closed
9/8/2011	2:02:10 PM	BCl3 valve closed
9/8/2011	2:02:10 PM	PH3 valve closed
9/8/2011	2:02:10 PM	SiCl4 pre valve closed
9/8/2011	2:02:10 PM	SiCl4 post valve closed
9/8/2011	2:02:10 PM	Bypass valve closed
9/8/2011	2:02:10 PM	Bubbler valve closed
9/8/2011	2:02:10 PM	Helium valve opened
9/8/2011	2:02:10 PM	Main Vac valve opened
9/8/2011	2:02:10 PM	Helium MFC set to  20.000000
9/8/2011	2:02:10 PM	H2 MFC set to  0.000000
9/8/2011	2:02:10 PM	BCl3 MFC set to  0.000000
9/8/2011	2:02:10 PM	PHl3 MFC set to  0.000000
9/8/2011	2:02:10 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:02:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:02:10 PM	Tube furnace set to 0
9/8/2011	2:02:40 PM	Helium valve closed
9/8/2011	2:02:40 PM	H2 valve closed
9/8/2011	2:02:40 PM	BCl3 valve closed
9/8/2011	2:02:40 PM	PH3 valve closed
9/8/2011	2:02:40 PM	SiCl4 pre valve closed
9/8/2011	2:02:40 PM	SiCl4 post valve closed
9/8/2011	2:02:40 PM	Bypass valve closed
9/8/2011	2:02:40 PM	Bubbler valve closed
9/8/2011	2:02:40 PM	Main Vac valve opened
9/8/2011	2:02:40 PM	Helium MFC set to  0.000000
9/8/2011	2:02:40 PM	H2 MFC set to  0.000000
9/8/2011	2:02:40 PM	BCl3 MFC set to  0.000000
9/8/2011	2:02:40 PM	PHl3 MFC set to  0.000000
9/8/2011	2:02:40 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:02:40 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:02:41 PM	Tube furnace set to 0
9/8/2011	2:03:11 PM	H2 valve closed
9/8/2011	2:03:11 PM	BCl3 valve closed
9/8/2011	2:03:11 PM	PH3 valve closed
9/8/2011	2:03:11 PM	SiCl4 pre valve closed
9/8/2011	2:03:11 PM	SiCl4 post valve closed
9/8/2011	2:03:11 PM	Bypass valve closed
9/8/2011	2:03:11 PM	Bubbler valve closed
9/8/2011	2:03:11 PM	Helium valve opened
9/8/2011	2:03:11 PM	Main Vac valve opened
9/8/2011	2:03:11 PM	Helium MFC set to  20.000000
9/8/2011	2:03:11 PM	H2 MFC set to  0.000000
9/8/2011	2:03:11 PM	BCl3 MFC set to  0.000000
9/8/2011	2:03:11 PM	PHl3 MFC set to  0.000000
9/8/2011	2:03:11 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:03:11 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:03:11 PM	Tube furnace set to 0
9/8/2011	2:03:41 PM	Helium valve closed
9/8/2011	2:03:41 PM	H2 valve closed
9/8/2011	2:03:41 PM	BCl3 valve closed
9/8/2011	2:03:41 PM	PH3 valve closed
9/8/2011	2:03:41 PM	SiCl4 pre valve closed
9/8/2011	2:03:41 PM	SiCl4 post valve closed
9/8/2011	2:03:41 PM	Bypass valve closed
9/8/2011	2:03:41 PM	Bubbler valve closed
9/8/2011	2:03:41 PM	Main Vac valve opened
9/8/2011	2:03:41 PM	Helium MFC set to  0.000000
9/8/2011	2:03:41 PM	H2 MFC set to  0.000000
9/8/2011	2:03:41 PM	BCl3 MFC set to  0.000000
9/8/2011	2:03:41 PM	PHl3 MFC set to  0.000000
9/8/2011	2:03:41 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:03:41 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:03:41 PM	Tube furnace set to 0
9/8/2011	2:04:11 PM	H2 valve closed
9/8/2011	2:04:11 PM	BCl3 valve closed
9/8/2011	2:04:11 PM	PH3 valve closed
9/8/2011	2:04:11 PM	SiCl4 pre valve closed
9/8/2011	2:04:11 PM	SiCl4 post valve closed
9/8/2011	2:04:11 PM	Bypass valve closed
9/8/2011	2:04:11 PM	Bubbler valve closed
9/8/2011	2:04:11 PM	Helium valve opened
9/8/2011	2:04:11 PM	Main Vac valve opened
9/8/2011	2:04:11 PM	Helium MFC set to  20.000000
9/8/2011	2:04:11 PM	H2 MFC set to  0.000000
9/8/2011	2:04:11 PM	BCl3 MFC set to  0.000000
9/8/2011	2:04:11 PM	PHl3 MFC set to  0.000000
9/8/2011	2:04:11 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:04:11 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:04:11 PM	Tube furnace set to 0
9/8/2011	2:04:41 PM	Helium valve closed
9/8/2011	2:04:41 PM	H2 valve closed
9/8/2011	2:04:41 PM	BCl3 valve closed
9/8/2011	2:04:41 PM	PH3 valve closed
9/8/2011	2:04:41 PM	SiCl4 pre valve closed
9/8/2011	2:04:41 PM	SiCl4 post valve closed
9/8/2011	2:04:41 PM	Bypass valve closed
9/8/2011	2:04:41 PM	Bubbler valve closed
9/8/2011	2:04:41 PM	Main Vac valve opened
9/8/2011	2:04:41 PM	Helium MFC set to  0.000000
9/8/2011	2:04:41 PM	H2 MFC set to  0.000000
9/8/2011	2:04:41 PM	BCl3 MFC set to  0.000000
9/8/2011	2:04:41 PM	PHl3 MFC set to  0.000000
9/8/2011	2:04:41 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:04:41 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:04:41 PM	Tube furnace set to 0
9/8/2011	2:05:11 PM	H2 valve closed
9/8/2011	2:05:11 PM	BCl3 valve closed
9/8/2011	2:05:11 PM	PH3 valve closed
9/8/2011	2:05:11 PM	SiCl4 pre valve closed
9/8/2011	2:05:11 PM	SiCl4 post valve closed
9/8/2011	2:05:11 PM	Bypass valve closed
9/8/2011	2:05:11 PM	Bubbler valve closed
9/8/2011	2:05:11 PM	Helium valve opened
9/8/2011	2:05:11 PM	Main Vac valve opened
9/8/2011	2:05:11 PM	Helium MFC set to  20.000000
9/8/2011	2:05:11 PM	H2 MFC set to  0.000000
9/8/2011	2:05:11 PM	BCl3 MFC set to  0.000000
9/8/2011	2:05:11 PM	PHl3 MFC set to  0.000000
9/8/2011	2:05:11 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:05:11 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:05:12 PM	Tube furnace set to 0
9/8/2011	2:05:42 PM	Helium valve closed
9/8/2011	2:05:42 PM	H2 valve closed
9/8/2011	2:05:42 PM	BCl3 valve closed
9/8/2011	2:05:42 PM	PH3 valve closed
9/8/2011	2:05:42 PM	SiCl4 pre valve closed
9/8/2011	2:05:42 PM	SiCl4 post valve closed
9/8/2011	2:05:42 PM	Bypass valve closed
9/8/2011	2:05:42 PM	Bubbler valve closed
9/8/2011	2:05:42 PM	Main Vac valve opened
9/8/2011	2:05:42 PM	Helium MFC set to  0.000000
9/8/2011	2:05:42 PM	H2 MFC set to  0.000000
9/8/2011	2:05:42 PM	BCl3 MFC set to  0.000000
9/8/2011	2:05:42 PM	PHl3 MFC set to  0.000000
9/8/2011	2:05:42 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:05:42 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:05:42 PM	Tube furnace set to 0
9/8/2011	2:06:12 PM	H2 valve closed
9/8/2011	2:06:12 PM	BCl3 valve closed
9/8/2011	2:06:12 PM	PH3 valve closed
9/8/2011	2:06:12 PM	SiCl4 pre valve closed
9/8/2011	2:06:12 PM	SiCl4 post valve closed
9/8/2011	2:06:12 PM	Bypass valve closed
9/8/2011	2:06:12 PM	Bubbler valve closed
9/8/2011	2:06:12 PM	Helium valve opened
9/8/2011	2:06:12 PM	Main Vac valve opened
9/8/2011	2:06:12 PM	Helium MFC set to  20.000000
9/8/2011	2:06:12 PM	H2 MFC set to  0.000000
9/8/2011	2:06:12 PM	BCl3 MFC set to  0.000000
9/8/2011	2:06:12 PM	PHl3 MFC set to  0.000000
9/8/2011	2:06:12 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:06:12 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:06:12 PM	Tube furnace set to 0
9/8/2011	2:06:42 PM	Helium valve closed
9/8/2011	2:06:42 PM	H2 valve closed
9/8/2011	2:06:42 PM	BCl3 valve closed
9/8/2011	2:06:42 PM	PH3 valve closed
9/8/2011	2:06:42 PM	SiCl4 pre valve closed
9/8/2011	2:06:42 PM	SiCl4 post valve closed
9/8/2011	2:06:42 PM	Bypass valve closed
9/8/2011	2:06:42 PM	Bubbler valve closed
9/8/2011	2:06:42 PM	Main Vac valve opened
9/8/2011	2:06:42 PM	Helium MFC set to  0.000000
9/8/2011	2:06:42 PM	H2 MFC set to  0.000000
9/8/2011	2:06:42 PM	BCl3 MFC set to  0.000000
9/8/2011	2:06:42 PM	PHl3 MFC set to  0.000000
9/8/2011	2:06:42 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:06:42 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:06:42 PM	Tube furnace set to 0
9/8/2011	2:06:43 PM	Run finished at 2:06 PM
9/8/2011	2:06:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	2:08:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	2:08:52 PM	Recipe started at 2:08 PM
9/8/2011	2:08:52 PM	Helium valve closed
9/8/2011	2:08:52 PM	H2 valve closed
9/8/2011	2:08:52 PM	BCl3 valve closed
9/8/2011	2:08:52 PM	PH3 valve closed
9/8/2011	2:08:52 PM	SiCl4 pre valve closed
9/8/2011	2:08:52 PM	SiCl4 post valve closed
9/8/2011	2:08:52 PM	Main Vac valve closed
9/8/2011	2:08:52 PM	Bubbler valve closed
9/8/2011	2:08:52 PM	Bypass valve opened
9/8/2011	2:08:52 PM	Helium MFC set to  0.000000
9/8/2011	2:08:52 PM	H2 MFC set to  0.000000
9/8/2011	2:08:52 PM	BCl3 MFC set to  0.000000
9/8/2011	2:08:52 PM	PHl3 MFC set to  0.000000
9/8/2011	2:08:52 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:08:52 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:08:52 PM	Tube furnace set to 0
9/8/2011	2:08:53 PM	Helium valve closed
9/8/2011	2:08:53 PM	H2 valve closed
9/8/2011	2:08:53 PM	BCl3 valve closed
9/8/2011	2:08:53 PM	PH3 valve closed
9/8/2011	2:08:53 PM	SiCl4 pre valve closed
9/8/2011	2:08:53 PM	SiCl4 post valve closed
9/8/2011	2:08:53 PM	Main Vac valve closed
9/8/2011	2:08:53 PM	Bubbler valve closed
9/8/2011	2:08:53 PM	Bypass valve opened
9/8/2011	2:08:53 PM	Helium MFC set to  0.000000
9/8/2011	2:08:53 PM	H2 MFC set to  0.000000
9/8/2011	2:08:53 PM	BCl3 MFC set to  0.000000
9/8/2011	2:08:53 PM	PHl3 MFC set to  0.000000
9/8/2011	2:08:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:08:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:08:53 PM	Tube furnace set to 0
9/8/2011	2:09:23 PM	Helium valve closed
9/8/2011	2:09:23 PM	H2 valve closed
9/8/2011	2:09:23 PM	BCl3 valve closed
9/8/2011	2:09:23 PM	PH3 valve closed
9/8/2011	2:09:23 PM	SiCl4 pre valve closed
9/8/2011	2:09:23 PM	SiCl4 post valve closed
9/8/2011	2:09:23 PM	Bypass valve closed
9/8/2011	2:09:23 PM	Bubbler valve closed
9/8/2011	2:09:23 PM	Main Vac valve opened
9/8/2011	2:09:23 PM	Helium MFC set to  0.000000
9/8/2011	2:09:23 PM	H2 MFC set to  0.000000
9/8/2011	2:09:23 PM	BCl3 MFC set to  0.000000
9/8/2011	2:09:23 PM	PHl3 MFC set to  0.000000
9/8/2011	2:09:23 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:09:23 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:09:23 PM	Tube furnace set to 0
9/8/2011	2:09:53 PM	H2 valve closed
9/8/2011	2:09:53 PM	BCl3 valve closed
9/8/2011	2:09:53 PM	PH3 valve closed
9/8/2011	2:09:53 PM	SiCl4 pre valve closed
9/8/2011	2:09:53 PM	SiCl4 post valve closed
9/8/2011	2:09:53 PM	Bypass valve closed
9/8/2011	2:09:53 PM	Bubbler valve closed
9/8/2011	2:09:53 PM	Helium valve opened
9/8/2011	2:09:53 PM	Main Vac valve opened
9/8/2011	2:09:53 PM	Helium MFC set to  20.000000
9/8/2011	2:09:53 PM	H2 MFC set to  0.000000
9/8/2011	2:09:53 PM	BCl3 MFC set to  0.000000
9/8/2011	2:09:53 PM	PHl3 MFC set to  0.000000
9/8/2011	2:09:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:09:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:09:53 PM	Tube furnace set to 0
9/8/2011	2:10:23 PM	Helium valve closed
9/8/2011	2:10:23 PM	H2 valve closed
9/8/2011	2:10:23 PM	BCl3 valve closed
9/8/2011	2:10:23 PM	PH3 valve closed
9/8/2011	2:10:23 PM	SiCl4 pre valve closed
9/8/2011	2:10:23 PM	SiCl4 post valve closed
9/8/2011	2:10:23 PM	Bypass valve closed
9/8/2011	2:10:23 PM	Bubbler valve closed
9/8/2011	2:10:23 PM	Main Vac valve opened
9/8/2011	2:10:23 PM	Helium MFC set to  0.000000
9/8/2011	2:10:23 PM	H2 MFC set to  0.000000
9/8/2011	2:10:23 PM	BCl3 MFC set to  0.000000
9/8/2011	2:10:23 PM	PHl3 MFC set to  0.000000
9/8/2011	2:10:23 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:10:23 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:10:23 PM	Tube furnace set to 0
9/8/2011	2:10:53 PM	H2 valve closed
9/8/2011	2:10:53 PM	BCl3 valve closed
9/8/2011	2:10:53 PM	PH3 valve closed
9/8/2011	2:10:53 PM	SiCl4 pre valve closed
9/8/2011	2:10:53 PM	SiCl4 post valve closed
9/8/2011	2:10:53 PM	Bypass valve closed
9/8/2011	2:10:53 PM	Bubbler valve closed
9/8/2011	2:10:53 PM	Helium valve opened
9/8/2011	2:10:53 PM	Main Vac valve opened
9/8/2011	2:10:53 PM	Helium MFC set to  20.000000
9/8/2011	2:10:53 PM	H2 MFC set to  0.000000
9/8/2011	2:10:53 PM	BCl3 MFC set to  0.000000
9/8/2011	2:10:53 PM	PHl3 MFC set to  0.000000
9/8/2011	2:10:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:10:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:10:54 PM	Tube furnace set to 0
9/8/2011	2:11:24 PM	Helium valve closed
9/8/2011	2:11:24 PM	H2 valve closed
9/8/2011	2:11:24 PM	BCl3 valve closed
9/8/2011	2:11:24 PM	PH3 valve closed
9/8/2011	2:11:24 PM	SiCl4 pre valve closed
9/8/2011	2:11:24 PM	SiCl4 post valve closed
9/8/2011	2:11:24 PM	Bypass valve closed
9/8/2011	2:11:24 PM	Bubbler valve closed
9/8/2011	2:11:24 PM	Main Vac valve opened
9/8/2011	2:11:24 PM	Helium MFC set to  0.000000
9/8/2011	2:11:24 PM	H2 MFC set to  0.000000
9/8/2011	2:11:24 PM	BCl3 MFC set to  0.000000
9/8/2011	2:11:24 PM	PHl3 MFC set to  0.000000
9/8/2011	2:11:24 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:11:24 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:11:24 PM	Tube furnace set to 0
9/8/2011	2:11:54 PM	H2 valve closed
9/8/2011	2:11:54 PM	BCl3 valve closed
9/8/2011	2:11:54 PM	PH3 valve closed
9/8/2011	2:11:54 PM	SiCl4 pre valve closed
9/8/2011	2:11:54 PM	SiCl4 post valve closed
9/8/2011	2:11:54 PM	Bypass valve closed
9/8/2011	2:11:54 PM	Bubbler valve closed
9/8/2011	2:11:54 PM	Helium valve opened
9/8/2011	2:11:54 PM	Main Vac valve opened
9/8/2011	2:11:54 PM	Helium MFC set to  20.000000
9/8/2011	2:11:54 PM	H2 MFC set to  0.000000
9/8/2011	2:11:54 PM	BCl3 MFC set to  0.000000
9/8/2011	2:11:54 PM	PHl3 MFC set to  0.000000
9/8/2011	2:11:54 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:11:54 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:11:54 PM	Tube furnace set to 0
9/8/2011	2:12:24 PM	Helium valve closed
9/8/2011	2:12:24 PM	H2 valve closed
9/8/2011	2:12:24 PM	BCl3 valve closed
9/8/2011	2:12:24 PM	PH3 valve closed
9/8/2011	2:12:24 PM	SiCl4 pre valve closed
9/8/2011	2:12:24 PM	SiCl4 post valve closed
9/8/2011	2:12:24 PM	Bypass valve closed
9/8/2011	2:12:24 PM	Bubbler valve closed
9/8/2011	2:12:24 PM	Main Vac valve opened
9/8/2011	2:12:24 PM	Helium MFC set to  0.000000
9/8/2011	2:12:24 PM	H2 MFC set to  0.000000
9/8/2011	2:12:24 PM	BCl3 MFC set to  0.000000
9/8/2011	2:12:24 PM	PHl3 MFC set to  0.000000
9/8/2011	2:12:24 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:12:24 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:12:24 PM	Tube furnace set to 0
9/8/2011	2:12:54 PM	H2 valve closed
9/8/2011	2:12:54 PM	BCl3 valve closed
9/8/2011	2:12:54 PM	PH3 valve closed
9/8/2011	2:12:54 PM	SiCl4 pre valve closed
9/8/2011	2:12:54 PM	SiCl4 post valve closed
9/8/2011	2:12:54 PM	Bypass valve closed
9/8/2011	2:12:54 PM	Bubbler valve closed
9/8/2011	2:12:54 PM	Helium valve opened
9/8/2011	2:12:54 PM	Main Vac valve opened
9/8/2011	2:12:54 PM	Helium MFC set to  20.000000
9/8/2011	2:12:54 PM	H2 MFC set to  0.000000
9/8/2011	2:12:54 PM	BCl3 MFC set to  0.000000
9/8/2011	2:12:54 PM	PHl3 MFC set to  0.000000
9/8/2011	2:12:54 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:12:54 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:12:54 PM	Tube furnace set to 0
9/8/2011	2:13:24 PM	Helium valve closed
9/8/2011	2:13:24 PM	H2 valve closed
9/8/2011	2:13:24 PM	BCl3 valve closed
9/8/2011	2:13:24 PM	PH3 valve closed
9/8/2011	2:13:24 PM	SiCl4 pre valve closed
9/8/2011	2:13:24 PM	SiCl4 post valve closed
9/8/2011	2:13:24 PM	Bypass valve closed
9/8/2011	2:13:24 PM	Bubbler valve closed
9/8/2011	2:13:24 PM	Main Vac valve opened
9/8/2011	2:13:24 PM	Helium MFC set to  0.000000
9/8/2011	2:13:24 PM	H2 MFC set to  0.000000
9/8/2011	2:13:24 PM	BCl3 MFC set to  0.000000
9/8/2011	2:13:24 PM	PHl3 MFC set to  0.000000
9/8/2011	2:13:24 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:13:24 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:13:25 PM	Tube furnace set to 0
9/8/2011	2:13:55 PM	H2 valve closed
9/8/2011	2:13:55 PM	BCl3 valve closed
9/8/2011	2:13:55 PM	PH3 valve closed
9/8/2011	2:13:55 PM	SiCl4 pre valve closed
9/8/2011	2:13:55 PM	SiCl4 post valve closed
9/8/2011	2:13:55 PM	Bypass valve closed
9/8/2011	2:13:55 PM	Bubbler valve closed
9/8/2011	2:13:55 PM	Helium valve opened
9/8/2011	2:13:55 PM	Main Vac valve opened
9/8/2011	2:13:55 PM	Helium MFC set to  20.000000
9/8/2011	2:13:55 PM	H2 MFC set to  0.000000
9/8/2011	2:13:55 PM	BCl3 MFC set to  0.000000
9/8/2011	2:13:55 PM	PHl3 MFC set to  0.000000
9/8/2011	2:13:55 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:13:55 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:13:55 PM	Tube furnace set to 0
9/8/2011	2:14:25 PM	Helium valve closed
9/8/2011	2:14:25 PM	H2 valve closed
9/8/2011	2:14:25 PM	BCl3 valve closed
9/8/2011	2:14:25 PM	PH3 valve closed
9/8/2011	2:14:25 PM	SiCl4 pre valve closed
9/8/2011	2:14:25 PM	SiCl4 post valve closed
9/8/2011	2:14:25 PM	Bypass valve closed
9/8/2011	2:14:25 PM	Bubbler valve closed
9/8/2011	2:14:25 PM	Main Vac valve opened
9/8/2011	2:14:25 PM	Helium MFC set to  0.000000
9/8/2011	2:14:25 PM	H2 MFC set to  0.000000
9/8/2011	2:14:25 PM	BCl3 MFC set to  0.000000
9/8/2011	2:14:25 PM	PHl3 MFC set to  0.000000
9/8/2011	2:14:25 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:14:25 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:14:25 PM	Tube furnace set to 0
9/8/2011	2:14:53 PM	Run aborted at 2:14 PM
9/8/2011	2:14:53 PM	Helium valve closed
9/8/2011	2:14:53 PM	H2 valve closed
9/8/2011	2:14:53 PM	BCl3 valve closed
9/8/2011	2:14:53 PM	PH3 valve closed
9/8/2011	2:14:53 PM	SiCl4 pre valve closed
9/8/2011	2:14:53 PM	SiCl4 post valve closed
9/8/2011	2:14:53 PM	Bypass valve closed
9/8/2011	2:14:53 PM	Main Vac valve closed
9/8/2011	2:14:53 PM	Bubbler valve closed
9/8/2011	2:14:53 PM	Helium MFC set to  0.000000
9/8/2011	2:14:53 PM	H2 MFC set to  0.000000
9/8/2011	2:14:53 PM	BCl3 MFC set to  0.000000
9/8/2011	2:14:53 PM	PHl3 MFC set to  0.000000
9/8/2011	2:14:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:14:54 PM	Tube furnace set to 0
9/8/2011	2:14:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	2:15:03 PM	Main Vac valve opened
9/8/2011	2:16:00 PM	Recipe started at 2:15 PM
9/8/2011	2:16:00 PM	Helium valve closed
9/8/2011	2:16:00 PM	H2 valve closed
9/8/2011	2:16:00 PM	BCl3 valve closed
9/8/2011	2:16:00 PM	PH3 valve closed
9/8/2011	2:16:00 PM	SiCl4 pre valve closed
9/8/2011	2:16:00 PM	SiCl4 post valve closed
9/8/2011	2:16:00 PM	Main Vac valve closed
9/8/2011	2:16:00 PM	Bypass valve closed
9/8/2011	2:16:00 PM	Bubbler valve closed
9/8/2011	2:16:00 PM	Helium MFC set to  0.000000
9/8/2011	2:16:00 PM	H2 MFC set to  0.000000
9/8/2011	2:16:00 PM	BCl3 MFC set to  0.000000
9/8/2011	2:16:00 PM	PHl3 MFC set to  0.000000
9/8/2011	2:16:00 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:16:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:16:00 PM	Tube furnace set to 0
9/8/2011	2:16:03 PM	Helium valve closed
9/8/2011	2:16:03 PM	BCl3 valve closed
9/8/2011	2:16:03 PM	PH3 valve closed
9/8/2011	2:16:03 PM	SiCl4 pre valve closed
9/8/2011	2:16:03 PM	SiCl4 post valve closed
9/8/2011	2:16:03 PM	Main Vac valve closed
9/8/2011	2:16:03 PM	Bypass valve closed
9/8/2011	2:16:03 PM	Bubbler valve closed
9/8/2011	2:16:03 PM	H2 valve opened
9/8/2011	2:16:03 PM	Helium MFC set to  0.000000
9/8/2011	2:16:03 PM	H2 MFC set to  500.000000
9/8/2011	2:16:03 PM	BCl3 MFC set to  0.000000
9/8/2011	2:16:03 PM	PHl3 MFC set to  0.000000
9/8/2011	2:16:03 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:16:03 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:16:03 PM	Tube furnace set to 0
9/8/2011	2:17:09 PM	Helium valve closed
9/8/2011	2:17:09 PM	BCl3 valve closed
9/8/2011	2:17:09 PM	PH3 valve closed
9/8/2011	2:17:09 PM	SiCl4 pre valve closed
9/8/2011	2:17:09 PM	SiCl4 post valve closed
9/8/2011	2:17:09 PM	Main Vac valve closed
9/8/2011	2:17:09 PM	Bypass valve closed
9/8/2011	2:17:09 PM	H2 valve opened
9/8/2011	2:17:09 PM	Bubbler valve opened
9/8/2011	2:17:09 PM	Helium MFC set to  0.000000
9/8/2011	2:17:09 PM	H2 MFC set to  500.000000
9/8/2011	2:17:09 PM	BCl3 MFC set to  0.000000
9/8/2011	2:17:09 PM	PHl3 MFC set to  0.000000
9/8/2011	2:17:09 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:17:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:17:09 PM	Tube furnace set to 0
9/8/2011	2:17:10 PM	Helium valve closed
9/8/2011	2:17:10 PM	BCl3 valve closed
9/8/2011	2:17:10 PM	PH3 valve closed
9/8/2011	2:17:10 PM	SiCl4 pre valve closed
9/8/2011	2:17:10 PM	SiCl4 post valve closed
9/8/2011	2:17:10 PM	Main Vac valve closed
9/8/2011	2:17:10 PM	Bypass valve closed
9/8/2011	2:17:10 PM	H2 valve opened
9/8/2011	2:17:10 PM	Bubbler valve opened
9/8/2011	2:17:10 PM	Helium MFC set to  0.000000
9/8/2011	2:17:10 PM	H2 MFC set to  500.000000
9/8/2011	2:17:10 PM	BCl3 MFC set to  0.000000
9/8/2011	2:17:10 PM	PHl3 MFC set to  0.000000
9/8/2011	2:17:10 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:17:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:17:10 PM	Tube furnace set to 1000
9/8/2011	2:37:10 PM	Helium valve closed
9/8/2011	2:37:10 PM	PH3 valve closed
9/8/2011	2:37:10 PM	Main Vac valve closed
9/8/2011	2:37:10 PM	Bypass valve closed
9/8/2011	2:37:10 PM	H2 valve opened
9/8/2011	2:37:10 PM	BCl3 valve opened
9/8/2011	2:37:10 PM	SiCl4 pre valve opened
9/8/2011	2:37:10 PM	SiCl4 post valve opened
9/8/2011	2:37:10 PM	Bubbler valve opened
9/8/2011	2:37:10 PM	Helium MFC set to  0.000000
9/8/2011	2:37:10 PM	H2 MFC set to  500.000000
9/8/2011	2:37:10 PM	BCl3 MFC set to  2.000000
9/8/2011	2:37:10 PM	PHl3 MFC set to  0.000000
9/8/2011	2:37:10 PM	SiCl4 MFC set to  50.000000
9/8/2011	2:37:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:37:10 PM	Tube furnace set to 1000
9/8/2011	2:53:50 PM	Helium valve closed
9/8/2011	2:53:50 PM	BCl3 valve closed
9/8/2011	2:53:50 PM	PH3 valve closed
9/8/2011	2:53:50 PM	SiCl4 pre valve closed
9/8/2011	2:53:50 PM	SiCl4 post valve closed
9/8/2011	2:53:50 PM	Main Vac valve closed
9/8/2011	2:53:50 PM	Bypass valve closed
9/8/2011	2:53:50 PM	H2 valve opened
9/8/2011	2:53:50 PM	Bubbler valve opened
9/8/2011	2:53:50 PM	Helium MFC set to  0.000000
9/8/2011	2:53:50 PM	H2 MFC set to  500.000000
9/8/2011	2:53:50 PM	BCl3 MFC set to  0.000000
9/8/2011	2:53:50 PM	PHl3 MFC set to  0.000000
9/8/2011	2:53:50 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:53:50 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:53:50 PM	Tube furnace set to 750
9/8/2011	2:58:50 PM	H2 valve closed
9/8/2011	2:58:50 PM	BCl3 valve closed
9/8/2011	2:58:50 PM	PH3 valve closed
9/8/2011	2:58:50 PM	SiCl4 pre valve closed
9/8/2011	2:58:50 PM	SiCl4 post valve closed
9/8/2011	2:58:50 PM	Main Vac valve closed
9/8/2011	2:58:50 PM	Bypass valve closed
9/8/2011	2:58:50 PM	Helium valve opened
9/8/2011	2:58:50 PM	Bubbler valve opened
9/8/2011	2:58:50 PM	Helium MFC set to  500.000000
9/8/2011	2:58:50 PM	H2 MFC set to  0.000000
9/8/2011	2:58:50 PM	BCl3 MFC set to  0.000000
9/8/2011	2:58:50 PM	PHl3 MFC set to  0.000000
9/8/2011	2:58:50 PM	SiCl4 MFC set to  0.000000
9/8/2011	2:58:50 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	2:58:50 PM	Tube furnace set to 0
9/8/2011	3:18:50 PM	Helium valve closed
9/8/2011	3:18:50 PM	H2 valve closed
9/8/2011	3:18:50 PM	BCl3 valve closed
9/8/2011	3:18:50 PM	PH3 valve closed
9/8/2011	3:18:50 PM	SiCl4 pre valve closed
9/8/2011	3:18:50 PM	SiCl4 post valve closed
9/8/2011	3:18:50 PM	Main Vac valve closed
9/8/2011	3:18:50 PM	Bypass valve closed
9/8/2011	3:18:50 PM	Bubbler valve closed
9/8/2011	3:18:50 PM	Helium MFC set to  0.000000
9/8/2011	3:18:50 PM	H2 MFC set to  0.000000
9/8/2011	3:18:50 PM	BCl3 MFC set to  0.000000
9/8/2011	3:18:50 PM	PHl3 MFC set to  0.000000
9/8/2011	3:18:50 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:18:50 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:18:51 PM	Tube furnace set to 0
9/8/2011	3:18:52 PM	Run finished at 3:18 PM
9/8/2011	3:39:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	3:39:59 PM	Recipe started at 3:39 PM
9/8/2011	3:39:59 PM	Helium valve closed
9/8/2011	3:39:59 PM	H2 valve closed
9/8/2011	3:39:59 PM	BCl3 valve closed
9/8/2011	3:39:59 PM	PH3 valve closed
9/8/2011	3:39:59 PM	SiCl4 pre valve closed
9/8/2011	3:39:59 PM	SiCl4 post valve closed
9/8/2011	3:39:59 PM	Main Vac valve closed
9/8/2011	3:39:59 PM	Bubbler valve closed
9/8/2011	3:39:59 PM	Bypass valve opened
9/8/2011	3:39:59 PM	Helium MFC set to  0.000000
9/8/2011	3:39:59 PM	H2 MFC set to  0.000000
9/8/2011	3:39:59 PM	BCl3 MFC set to  0.000000
9/8/2011	3:39:59 PM	PHl3 MFC set to  0.000000
9/8/2011	3:39:59 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:39:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:39:59 PM	Tube furnace set to 0
9/8/2011	3:41:07 PM	Helium valve closed
9/8/2011	3:41:07 PM	H2 valve closed
9/8/2011	3:41:07 PM	BCl3 valve closed
9/8/2011	3:41:07 PM	PH3 valve closed
9/8/2011	3:41:07 PM	SiCl4 pre valve closed
9/8/2011	3:41:07 PM	SiCl4 post valve closed
9/8/2011	3:41:07 PM	Main Vac valve closed
9/8/2011	3:41:07 PM	Bubbler valve closed
9/8/2011	3:41:07 PM	Bypass valve opened
9/8/2011	3:41:07 PM	Helium MFC set to  0.000000
9/8/2011	3:41:07 PM	H2 MFC set to  0.000000
9/8/2011	3:41:07 PM	BCl3 MFC set to  0.000000
9/8/2011	3:41:07 PM	PHl3 MFC set to  0.000000
9/8/2011	3:41:07 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:41:07 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:41:07 PM	Tube furnace set to 0
9/8/2011	3:42:07 PM	Helium valve closed
9/8/2011	3:42:07 PM	H2 valve closed
9/8/2011	3:42:07 PM	BCl3 valve closed
9/8/2011	3:42:07 PM	PH3 valve closed
9/8/2011	3:42:07 PM	SiCl4 pre valve closed
9/8/2011	3:42:07 PM	SiCl4 post valve closed
9/8/2011	3:42:07 PM	Bypass valve closed
9/8/2011	3:42:07 PM	Bubbler valve closed
9/8/2011	3:42:07 PM	Main Vac valve opened
9/8/2011	3:42:07 PM	Helium MFC set to  0.000000
9/8/2011	3:42:07 PM	H2 MFC set to  0.000000
9/8/2011	3:42:07 PM	BCl3 MFC set to  0.000000
9/8/2011	3:42:07 PM	PHl3 MFC set to  0.000000
9/8/2011	3:42:07 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:42:07 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:42:07 PM	Tube furnace set to 0
9/8/2011	3:42:08 PM	Run finished at 3:42 PM
9/8/2011	3:42:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	3:42:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2011	3:42:53 PM	Recipe started at 3:42 PM
9/8/2011	3:42:53 PM	Helium valve closed
9/8/2011	3:42:53 PM	H2 valve closed
9/8/2011	3:42:53 PM	BCl3 valve closed
9/8/2011	3:42:53 PM	PH3 valve closed
9/8/2011	3:42:53 PM	SiCl4 pre valve closed
9/8/2011	3:42:53 PM	SiCl4 post valve closed
9/8/2011	3:42:53 PM	Main Vac valve closed
9/8/2011	3:42:53 PM	Bypass valve closed
9/8/2011	3:42:53 PM	Bubbler valve closed
9/8/2011	3:42:53 PM	Helium MFC set to  0.000000
9/8/2011	3:42:53 PM	H2 MFC set to  0.000000
9/8/2011	3:42:53 PM	BCl3 MFC set to  0.000000
9/8/2011	3:42:53 PM	PHl3 MFC set to  0.000000
9/8/2011	3:42:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:42:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:42:54 PM	Tube furnace set to 0
9/8/2011	3:42:57 PM	H2 valve closed
9/8/2011	3:42:57 PM	BCl3 valve closed
9/8/2011	3:42:57 PM	PH3 valve closed
9/8/2011	3:42:57 PM	SiCl4 pre valve closed
9/8/2011	3:42:57 PM	SiCl4 post valve closed
9/8/2011	3:42:57 PM	Main Vac valve closed
9/8/2011	3:42:57 PM	Bypass valve closed
9/8/2011	3:42:57 PM	Bubbler valve closed
9/8/2011	3:42:57 PM	Helium valve opened
9/8/2011	3:42:57 PM	Helium MFC set to  500.000000
9/8/2011	3:42:57 PM	H2 MFC set to  0.000000
9/8/2011	3:42:57 PM	BCl3 MFC set to  0.000000
9/8/2011	3:42:57 PM	PHl3 MFC set to  0.000000
9/8/2011	3:42:57 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:42:57 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:42:57 PM	Tube furnace set to 0
9/8/2011	3:44:00 PM	Helium valve closed
9/8/2011	3:44:00 PM	H2 valve closed
9/8/2011	3:44:00 PM	BCl3 valve closed
9/8/2011	3:44:00 PM	PH3 valve closed
9/8/2011	3:44:00 PM	SiCl4 pre valve closed
9/8/2011	3:44:00 PM	SiCl4 post valve closed
9/8/2011	3:44:00 PM	Main Vac valve closed
9/8/2011	3:44:00 PM	Bypass valve closed
9/8/2011	3:44:00 PM	Bubbler valve closed
9/8/2011	3:44:00 PM	Helium MFC set to  0.000000
9/8/2011	3:44:00 PM	H2 MFC set to  0.000000
9/8/2011	3:44:00 PM	BCl3 MFC set to  0.000000
9/8/2011	3:44:00 PM	PHl3 MFC set to  0.000000
9/8/2011	3:44:00 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:44:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:44:00 PM	Tube furnace set to 0
9/8/2011	3:44:01 PM	Run finished at 3:44 PM
9/8/2011	3:44:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2011	3:44:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	3:44:05 PM	Recipe started at 3:44 PM
9/8/2011	3:44:05 PM	Helium valve closed
9/8/2011	3:44:05 PM	H2 valve closed
9/8/2011	3:44:05 PM	BCl3 valve closed
9/8/2011	3:44:05 PM	PH3 valve closed
9/8/2011	3:44:05 PM	SiCl4 pre valve closed
9/8/2011	3:44:05 PM	SiCl4 post valve closed
9/8/2011	3:44:05 PM	Main Vac valve closed
9/8/2011	3:44:05 PM	Bubbler valve closed
9/8/2011	3:44:05 PM	Bypass valve opened
9/8/2011	3:44:05 PM	Helium MFC set to  0.000000
9/8/2011	3:44:05 PM	H2 MFC set to  0.000000
9/8/2011	3:44:05 PM	BCl3 MFC set to  0.000000
9/8/2011	3:44:05 PM	PHl3 MFC set to  0.000000
9/8/2011	3:44:05 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:44:05 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:44:05 PM	Tube furnace set to 0
9/8/2011	3:44:58 PM	Helium valve closed
9/8/2011	3:44:58 PM	H2 valve closed
9/8/2011	3:44:58 PM	BCl3 valve closed
9/8/2011	3:44:58 PM	PH3 valve closed
9/8/2011	3:44:58 PM	SiCl4 pre valve closed
9/8/2011	3:44:58 PM	SiCl4 post valve closed
9/8/2011	3:44:58 PM	Main Vac valve closed
9/8/2011	3:44:58 PM	Bubbler valve closed
9/8/2011	3:44:58 PM	Bypass valve opened
9/8/2011	3:44:58 PM	Helium MFC set to  0.000000
9/8/2011	3:44:58 PM	H2 MFC set to  0.000000
9/8/2011	3:44:58 PM	BCl3 MFC set to  0.000000
9/8/2011	3:44:58 PM	PHl3 MFC set to  0.000000
9/8/2011	3:44:58 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:44:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:44:58 PM	Tube furnace set to 0
9/8/2011	3:45:58 PM	Helium valve closed
9/8/2011	3:45:58 PM	H2 valve closed
9/8/2011	3:45:58 PM	BCl3 valve closed
9/8/2011	3:45:58 PM	PH3 valve closed
9/8/2011	3:45:58 PM	SiCl4 pre valve closed
9/8/2011	3:45:58 PM	SiCl4 post valve closed
9/8/2011	3:45:58 PM	Bypass valve closed
9/8/2011	3:45:58 PM	Bubbler valve closed
9/8/2011	3:45:58 PM	Main Vac valve opened
9/8/2011	3:45:58 PM	Helium MFC set to  0.000000
9/8/2011	3:45:58 PM	H2 MFC set to  0.000000
9/8/2011	3:45:58 PM	BCl3 MFC set to  0.000000
9/8/2011	3:45:58 PM	PHl3 MFC set to  0.000000
9/8/2011	3:45:58 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:45:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:45:58 PM	Tube furnace set to 0
9/8/2011	3:45:59 PM	Run finished at 3:45 PM
9/8/2011	3:45:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	3:50:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	3:50:35 PM	Recipe started at 3:50 PM
9/8/2011	3:50:35 PM	Helium valve closed
9/8/2011	3:50:35 PM	H2 valve closed
9/8/2011	3:50:35 PM	BCl3 valve closed
9/8/2011	3:50:35 PM	PH3 valve closed
9/8/2011	3:50:35 PM	SiCl4 pre valve closed
9/8/2011	3:50:35 PM	SiCl4 post valve closed
9/8/2011	3:50:35 PM	Main Vac valve closed
9/8/2011	3:50:35 PM	Bubbler valve closed
9/8/2011	3:50:35 PM	Bypass valve opened
9/8/2011	3:50:35 PM	Helium MFC set to  0.000000
9/8/2011	3:50:35 PM	H2 MFC set to  0.000000
9/8/2011	3:50:35 PM	BCl3 MFC set to  0.000000
9/8/2011	3:50:35 PM	PHl3 MFC set to  0.000000
9/8/2011	3:50:35 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:50:35 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:50:35 PM	Tube furnace set to 0
9/8/2011	3:50:35 PM	Helium valve closed
9/8/2011	3:50:35 PM	H2 valve closed
9/8/2011	3:50:35 PM	BCl3 valve closed
9/8/2011	3:50:35 PM	PH3 valve closed
9/8/2011	3:50:35 PM	SiCl4 pre valve closed
9/8/2011	3:50:35 PM	SiCl4 post valve closed
9/8/2011	3:50:35 PM	Main Vac valve closed
9/8/2011	3:50:35 PM	Bubbler valve closed
9/8/2011	3:50:35 PM	Bypass valve opened
9/8/2011	3:50:35 PM	Helium MFC set to  0.000000
9/8/2011	3:50:35 PM	H2 MFC set to  0.000000
9/8/2011	3:50:35 PM	BCl3 MFC set to  0.000000
9/8/2011	3:50:35 PM	PHl3 MFC set to  0.000000
9/8/2011	3:50:35 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:50:35 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:50:35 PM	Tube furnace set to 0
9/8/2011	3:50:37 PM	Helium valve closed
9/8/2011	3:50:37 PM	H2 valve closed
9/8/2011	3:50:37 PM	BCl3 valve closed
9/8/2011	3:50:37 PM	PH3 valve closed
9/8/2011	3:50:37 PM	SiCl4 pre valve closed
9/8/2011	3:50:37 PM	SiCl4 post valve closed
9/8/2011	3:50:37 PM	Bypass valve closed
9/8/2011	3:50:37 PM	Bubbler valve closed
9/8/2011	3:50:37 PM	Main Vac valve opened
9/8/2011	3:50:37 PM	Helium MFC set to  0.000000
9/8/2011	3:50:37 PM	H2 MFC set to  0.000000
9/8/2011	3:50:37 PM	BCl3 MFC set to  0.000000
9/8/2011	3:50:37 PM	PHl3 MFC set to  0.000000
9/8/2011	3:50:37 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:50:37 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:50:37 PM	Tube furnace set to 0
9/8/2011	3:51:07 PM	H2 valve closed
9/8/2011	3:51:07 PM	BCl3 valve closed
9/8/2011	3:51:07 PM	PH3 valve closed
9/8/2011	3:51:07 PM	SiCl4 pre valve closed
9/8/2011	3:51:07 PM	SiCl4 post valve closed
9/8/2011	3:51:07 PM	Bypass valve closed
9/8/2011	3:51:07 PM	Bubbler valve closed
9/8/2011	3:51:07 PM	Helium valve opened
9/8/2011	3:51:07 PM	Main Vac valve opened
9/8/2011	3:51:07 PM	Helium MFC set to  20.000000
9/8/2011	3:51:07 PM	H2 MFC set to  0.000000
9/8/2011	3:51:07 PM	BCl3 MFC set to  0.000000
9/8/2011	3:51:07 PM	PHl3 MFC set to  0.000000
9/8/2011	3:51:07 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:51:07 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:51:07 PM	Tube furnace set to 0
9/8/2011	3:51:37 PM	Helium valve closed
9/8/2011	3:51:37 PM	H2 valve closed
9/8/2011	3:51:37 PM	BCl3 valve closed
9/8/2011	3:51:37 PM	PH3 valve closed
9/8/2011	3:51:37 PM	SiCl4 pre valve closed
9/8/2011	3:51:37 PM	SiCl4 post valve closed
9/8/2011	3:51:37 PM	Bypass valve closed
9/8/2011	3:51:37 PM	Bubbler valve closed
9/8/2011	3:51:37 PM	Main Vac valve opened
9/8/2011	3:51:37 PM	Helium MFC set to  0.000000
9/8/2011	3:51:37 PM	H2 MFC set to  0.000000
9/8/2011	3:51:37 PM	BCl3 MFC set to  0.000000
9/8/2011	3:51:37 PM	PHl3 MFC set to  0.000000
9/8/2011	3:51:37 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:51:37 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:51:37 PM	Tube furnace set to 0
9/8/2011	3:52:07 PM	H2 valve closed
9/8/2011	3:52:07 PM	BCl3 valve closed
9/8/2011	3:52:07 PM	PH3 valve closed
9/8/2011	3:52:07 PM	SiCl4 pre valve closed
9/8/2011	3:52:07 PM	SiCl4 post valve closed
9/8/2011	3:52:07 PM	Bypass valve closed
9/8/2011	3:52:07 PM	Bubbler valve closed
9/8/2011	3:52:07 PM	Helium valve opened
9/8/2011	3:52:07 PM	Main Vac valve opened
9/8/2011	3:52:07 PM	Helium MFC set to  20.000000
9/8/2011	3:52:07 PM	H2 MFC set to  0.000000
9/8/2011	3:52:07 PM	BCl3 MFC set to  0.000000
9/8/2011	3:52:07 PM	PHl3 MFC set to  0.000000
9/8/2011	3:52:07 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:52:07 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:52:07 PM	Tube furnace set to 0
9/8/2011	3:52:37 PM	Helium valve closed
9/8/2011	3:52:37 PM	H2 valve closed
9/8/2011	3:52:37 PM	BCl3 valve closed
9/8/2011	3:52:37 PM	PH3 valve closed
9/8/2011	3:52:37 PM	SiCl4 pre valve closed
9/8/2011	3:52:37 PM	SiCl4 post valve closed
9/8/2011	3:52:37 PM	Bypass valve closed
9/8/2011	3:52:37 PM	Bubbler valve closed
9/8/2011	3:52:37 PM	Main Vac valve opened
9/8/2011	3:52:37 PM	Helium MFC set to  0.000000
9/8/2011	3:52:37 PM	H2 MFC set to  0.000000
9/8/2011	3:52:38 PM	BCl3 MFC set to  0.000000
9/8/2011	3:52:38 PM	PHl3 MFC set to  0.000000
9/8/2011	3:52:38 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:52:38 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:52:38 PM	Tube furnace set to 0
9/8/2011	3:53:08 PM	H2 valve closed
9/8/2011	3:53:08 PM	BCl3 valve closed
9/8/2011	3:53:08 PM	PH3 valve closed
9/8/2011	3:53:08 PM	SiCl4 pre valve closed
9/8/2011	3:53:08 PM	SiCl4 post valve closed
9/8/2011	3:53:08 PM	Bypass valve closed
9/8/2011	3:53:08 PM	Bubbler valve closed
9/8/2011	3:53:08 PM	Helium valve opened
9/8/2011	3:53:08 PM	Main Vac valve opened
9/8/2011	3:53:08 PM	Helium MFC set to  20.000000
9/8/2011	3:53:08 PM	H2 MFC set to  0.000000
9/8/2011	3:53:08 PM	BCl3 MFC set to  0.000000
9/8/2011	3:53:08 PM	PHl3 MFC set to  0.000000
9/8/2011	3:53:08 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:53:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:53:08 PM	Tube furnace set to 0
9/8/2011	3:53:38 PM	Helium valve closed
9/8/2011	3:53:38 PM	H2 valve closed
9/8/2011	3:53:38 PM	BCl3 valve closed
9/8/2011	3:53:38 PM	PH3 valve closed
9/8/2011	3:53:38 PM	SiCl4 pre valve closed
9/8/2011	3:53:38 PM	SiCl4 post valve closed
9/8/2011	3:53:38 PM	Bypass valve closed
9/8/2011	3:53:38 PM	Bubbler valve closed
9/8/2011	3:53:38 PM	Main Vac valve opened
9/8/2011	3:53:38 PM	Helium MFC set to  0.000000
9/8/2011	3:53:38 PM	H2 MFC set to  0.000000
9/8/2011	3:53:38 PM	BCl3 MFC set to  0.000000
9/8/2011	3:53:38 PM	PHl3 MFC set to  0.000000
9/8/2011	3:53:38 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:53:38 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:53:38 PM	Tube furnace set to 0
9/8/2011	3:54:08 PM	H2 valve closed
9/8/2011	3:54:08 PM	BCl3 valve closed
9/8/2011	3:54:08 PM	PH3 valve closed
9/8/2011	3:54:08 PM	SiCl4 pre valve closed
9/8/2011	3:54:08 PM	SiCl4 post valve closed
9/8/2011	3:54:08 PM	Bypass valve closed
9/8/2011	3:54:08 PM	Bubbler valve closed
9/8/2011	3:54:08 PM	Helium valve opened
9/8/2011	3:54:08 PM	Main Vac valve opened
9/8/2011	3:54:08 PM	Helium MFC set to  20.000000
9/8/2011	3:54:08 PM	H2 MFC set to  0.000000
9/8/2011	3:54:08 PM	BCl3 MFC set to  0.000000
9/8/2011	3:54:08 PM	PHl3 MFC set to  0.000000
9/8/2011	3:54:08 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:54:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:54:08 PM	Tube furnace set to 0
9/8/2011	3:54:38 PM	Helium valve closed
9/8/2011	3:54:38 PM	H2 valve closed
9/8/2011	3:54:38 PM	BCl3 valve closed
9/8/2011	3:54:38 PM	PH3 valve closed
9/8/2011	3:54:38 PM	SiCl4 pre valve closed
9/8/2011	3:54:38 PM	SiCl4 post valve closed
9/8/2011	3:54:38 PM	Bypass valve closed
9/8/2011	3:54:38 PM	Bubbler valve closed
9/8/2011	3:54:38 PM	Main Vac valve opened
9/8/2011	3:54:38 PM	Helium MFC set to  0.000000
9/8/2011	3:54:38 PM	H2 MFC set to  0.000000
9/8/2011	3:54:38 PM	BCl3 MFC set to  0.000000
9/8/2011	3:54:38 PM	PHl3 MFC set to  0.000000
9/8/2011	3:54:38 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:54:38 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:54:38 PM	Tube furnace set to 0
9/8/2011	3:55:08 PM	H2 valve closed
9/8/2011	3:55:08 PM	BCl3 valve closed
9/8/2011	3:55:08 PM	PH3 valve closed
9/8/2011	3:55:09 PM	SiCl4 pre valve closed
9/8/2011	3:55:09 PM	SiCl4 post valve closed
9/8/2011	3:55:09 PM	Bypass valve closed
9/8/2011	3:55:09 PM	Bubbler valve closed
9/8/2011	3:55:09 PM	Helium valve opened
9/8/2011	3:55:09 PM	Main Vac valve opened
9/8/2011	3:55:09 PM	Helium MFC set to  20.000000
9/8/2011	3:55:09 PM	H2 MFC set to  0.000000
9/8/2011	3:55:09 PM	BCl3 MFC set to  0.000000
9/8/2011	3:55:09 PM	PHl3 MFC set to  0.000000
9/8/2011	3:55:09 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:55:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:55:09 PM	Tube furnace set to 0
9/8/2011	3:55:39 PM	Helium valve closed
9/8/2011	3:55:39 PM	H2 valve closed
9/8/2011	3:55:39 PM	BCl3 valve closed
9/8/2011	3:55:39 PM	PH3 valve closed
9/8/2011	3:55:39 PM	SiCl4 pre valve closed
9/8/2011	3:55:39 PM	SiCl4 post valve closed
9/8/2011	3:55:39 PM	Bypass valve closed
9/8/2011	3:55:39 PM	Bubbler valve closed
9/8/2011	3:55:39 PM	Main Vac valve opened
9/8/2011	3:55:39 PM	Helium MFC set to  0.000000
9/8/2011	3:55:39 PM	H2 MFC set to  0.000000
9/8/2011	3:55:39 PM	BCl3 MFC set to  0.000000
9/8/2011	3:55:39 PM	PHl3 MFC set to  0.000000
9/8/2011	3:55:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:55:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:55:39 PM	Tube furnace set to 0
9/8/2011	3:56:09 PM	H2 valve closed
9/8/2011	3:56:09 PM	BCl3 valve closed
9/8/2011	3:56:09 PM	PH3 valve closed
9/8/2011	3:56:09 PM	SiCl4 pre valve closed
9/8/2011	3:56:09 PM	SiCl4 post valve closed
9/8/2011	3:56:09 PM	Bypass valve closed
9/8/2011	3:56:09 PM	Bubbler valve closed
9/8/2011	3:56:09 PM	Helium valve opened
9/8/2011	3:56:09 PM	Main Vac valve opened
9/8/2011	3:56:09 PM	Helium MFC set to  20.000000
9/8/2011	3:56:09 PM	H2 MFC set to  0.000000
9/8/2011	3:56:09 PM	BCl3 MFC set to  0.000000
9/8/2011	3:56:09 PM	PHl3 MFC set to  0.000000
9/8/2011	3:56:09 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:56:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:56:09 PM	Tube furnace set to 0
9/8/2011	3:56:39 PM	Helium valve closed
9/8/2011	3:56:39 PM	H2 valve closed
9/8/2011	3:56:39 PM	BCl3 valve closed
9/8/2011	3:56:39 PM	PH3 valve closed
9/8/2011	3:56:39 PM	SiCl4 pre valve closed
9/8/2011	3:56:39 PM	SiCl4 post valve closed
9/8/2011	3:56:39 PM	Bypass valve closed
9/8/2011	3:56:39 PM	Bubbler valve closed
9/8/2011	3:56:39 PM	Main Vac valve opened
9/8/2011	3:56:39 PM	Helium MFC set to  0.000000
9/8/2011	3:56:39 PM	H2 MFC set to  0.000000
9/8/2011	3:56:39 PM	BCl3 MFC set to  0.000000
9/8/2011	3:56:39 PM	PHl3 MFC set to  0.000000
9/8/2011	3:56:39 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:56:39 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:56:39 PM	Tube furnace set to 0
9/8/2011	3:57:09 PM	H2 valve closed
9/8/2011	3:57:09 PM	BCl3 valve closed
9/8/2011	3:57:09 PM	PH3 valve closed
9/8/2011	3:57:09 PM	SiCl4 pre valve closed
9/8/2011	3:57:09 PM	SiCl4 post valve closed
9/8/2011	3:57:09 PM	Bypass valve closed
9/8/2011	3:57:09 PM	Bubbler valve closed
9/8/2011	3:57:09 PM	Helium valve opened
9/8/2011	3:57:09 PM	Main Vac valve opened
9/8/2011	3:57:09 PM	Helium MFC set to  20.000000
9/8/2011	3:57:09 PM	H2 MFC set to  0.000000
9/8/2011	3:57:09 PM	BCl3 MFC set to  0.000000
9/8/2011	3:57:09 PM	PHl3 MFC set to  0.000000
9/8/2011	3:57:09 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:57:09 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:57:10 PM	Tube furnace set to 0
9/8/2011	3:57:40 PM	Helium valve closed
9/8/2011	3:57:40 PM	H2 valve closed
9/8/2011	3:57:40 PM	BCl3 valve closed
9/8/2011	3:57:40 PM	PH3 valve closed
9/8/2011	3:57:40 PM	SiCl4 pre valve closed
9/8/2011	3:57:40 PM	SiCl4 post valve closed
9/8/2011	3:57:40 PM	Bypass valve closed
9/8/2011	3:57:40 PM	Bubbler valve closed
9/8/2011	3:57:40 PM	Main Vac valve opened
9/8/2011	3:57:40 PM	Helium MFC set to  0.000000
9/8/2011	3:57:40 PM	H2 MFC set to  0.000000
9/8/2011	3:57:40 PM	BCl3 MFC set to  0.000000
9/8/2011	3:57:40 PM	PHl3 MFC set to  0.000000
9/8/2011	3:57:40 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:57:40 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:57:40 PM	Tube furnace set to 0
9/8/2011	3:58:10 PM	H2 valve closed
9/8/2011	3:58:10 PM	BCl3 valve closed
9/8/2011	3:58:10 PM	PH3 valve closed
9/8/2011	3:58:10 PM	SiCl4 pre valve closed
9/8/2011	3:58:10 PM	SiCl4 post valve closed
9/8/2011	3:58:10 PM	Bypass valve closed
9/8/2011	3:58:10 PM	Bubbler valve closed
9/8/2011	3:58:10 PM	Helium valve opened
9/8/2011	3:58:10 PM	Main Vac valve opened
9/8/2011	3:58:10 PM	Helium MFC set to  20.000000
9/8/2011	3:58:10 PM	H2 MFC set to  0.000000
9/8/2011	3:58:10 PM	BCl3 MFC set to  0.000000
9/8/2011	3:58:10 PM	PHl3 MFC set to  0.000000
9/8/2011	3:58:10 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:58:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:58:10 PM	Tube furnace set to 0
9/8/2011	3:58:40 PM	Helium valve closed
9/8/2011	3:58:40 PM	H2 valve closed
9/8/2011	3:58:40 PM	BCl3 valve closed
9/8/2011	3:58:40 PM	PH3 valve closed
9/8/2011	3:58:40 PM	SiCl4 pre valve closed
9/8/2011	3:58:40 PM	SiCl4 post valve closed
9/8/2011	3:58:40 PM	Bypass valve closed
9/8/2011	3:58:40 PM	Bubbler valve closed
9/8/2011	3:58:40 PM	Main Vac valve opened
9/8/2011	3:58:40 PM	Helium MFC set to  0.000000
9/8/2011	3:58:40 PM	H2 MFC set to  0.000000
9/8/2011	3:58:40 PM	BCl3 MFC set to  0.000000
9/8/2011	3:58:40 PM	PHl3 MFC set to  0.000000
9/8/2011	3:58:40 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:58:40 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:58:40 PM	Tube furnace set to 0
9/8/2011	3:59:10 PM	H2 valve closed
9/8/2011	3:59:10 PM	BCl3 valve closed
9/8/2011	3:59:10 PM	PH3 valve closed
9/8/2011	3:59:10 PM	SiCl4 pre valve closed
9/8/2011	3:59:10 PM	SiCl4 post valve closed
9/8/2011	3:59:10 PM	Bypass valve closed
9/8/2011	3:59:10 PM	Bubbler valve closed
9/8/2011	3:59:10 PM	Helium valve opened
9/8/2011	3:59:10 PM	Main Vac valve opened
9/8/2011	3:59:10 PM	Helium MFC set to  20.000000
9/8/2011	3:59:10 PM	H2 MFC set to  0.000000
9/8/2011	3:59:10 PM	BCl3 MFC set to  0.000000
9/8/2011	3:59:10 PM	PHl3 MFC set to  0.000000
9/8/2011	3:59:10 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:59:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:59:10 PM	Tube furnace set to 0
9/8/2011	3:59:40 PM	Helium valve closed
9/8/2011	3:59:41 PM	H2 valve closed
9/8/2011	3:59:41 PM	BCl3 valve closed
9/8/2011	3:59:41 PM	PH3 valve closed
9/8/2011	3:59:41 PM	SiCl4 pre valve closed
9/8/2011	3:59:41 PM	SiCl4 post valve closed
9/8/2011	3:59:41 PM	Bypass valve closed
9/8/2011	3:59:41 PM	Bubbler valve closed
9/8/2011	3:59:41 PM	Main Vac valve opened
9/8/2011	3:59:41 PM	Helium MFC set to  0.000000
9/8/2011	3:59:41 PM	H2 MFC set to  0.000000
9/8/2011	3:59:41 PM	BCl3 MFC set to  0.000000
9/8/2011	3:59:41 PM	PHl3 MFC set to  0.000000
9/8/2011	3:59:41 PM	SiCl4 MFC set to  0.000000
9/8/2011	3:59:41 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	3:59:41 PM	Tube furnace set to 0
9/8/2011	4:00:11 PM	H2 valve closed
9/8/2011	4:00:11 PM	BCl3 valve closed
9/8/2011	4:00:11 PM	PH3 valve closed
9/8/2011	4:00:11 PM	SiCl4 pre valve closed
9/8/2011	4:00:11 PM	SiCl4 post valve closed
9/8/2011	4:00:11 PM	Bypass valve closed
9/8/2011	4:00:11 PM	Bubbler valve closed
9/8/2011	4:00:11 PM	Helium valve opened
9/8/2011	4:00:11 PM	Main Vac valve opened
9/8/2011	4:00:11 PM	Helium MFC set to  20.000000
9/8/2011	4:00:11 PM	H2 MFC set to  0.000000
9/8/2011	4:00:11 PM	BCl3 MFC set to  0.000000
9/8/2011	4:00:11 PM	PHl3 MFC set to  0.000000
9/8/2011	4:00:11 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:00:11 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:00:11 PM	Tube furnace set to 0
9/8/2011	4:00:41 PM	Helium valve closed
9/8/2011	4:00:41 PM	H2 valve closed
9/8/2011	4:00:41 PM	BCl3 valve closed
9/8/2011	4:00:41 PM	PH3 valve closed
9/8/2011	4:00:41 PM	SiCl4 pre valve closed
9/8/2011	4:00:41 PM	SiCl4 post valve closed
9/8/2011	4:00:41 PM	Bypass valve closed
9/8/2011	4:00:41 PM	Bubbler valve closed
9/8/2011	4:00:41 PM	Main Vac valve opened
9/8/2011	4:00:41 PM	Helium MFC set to  0.000000
9/8/2011	4:00:41 PM	H2 MFC set to  0.000000
9/8/2011	4:00:41 PM	BCl3 MFC set to  0.000000
9/8/2011	4:00:41 PM	PHl3 MFC set to  0.000000
9/8/2011	4:00:41 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:00:41 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:00:41 PM	Tube furnace set to 0
9/8/2011	4:00:42 PM	Run finished at 4:00 PM
9/8/2011	4:00:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	4:09:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	4:09:53 PM	Recipe started at 4:09 PM
9/8/2011	4:09:53 PM	Helium valve closed
9/8/2011	4:09:53 PM	H2 valve closed
9/8/2011	4:09:53 PM	BCl3 valve closed
9/8/2011	4:09:53 PM	PH3 valve closed
9/8/2011	4:09:53 PM	SiCl4 pre valve closed
9/8/2011	4:09:53 PM	SiCl4 post valve closed
9/8/2011	4:09:53 PM	Main Vac valve closed
9/8/2011	4:09:53 PM	Bubbler valve closed
9/8/2011	4:09:53 PM	Bypass valve opened
9/8/2011	4:09:53 PM	Helium MFC set to  0.000000
9/8/2011	4:09:53 PM	H2 MFC set to  0.000000
9/8/2011	4:09:53 PM	BCl3 MFC set to  0.000000
9/8/2011	4:09:53 PM	PHl3 MFC set to  0.000000
9/8/2011	4:09:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:09:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:09:53 PM	Tube furnace set to 0
9/8/2011	4:09:53 PM	Helium valve closed
9/8/2011	4:09:53 PM	H2 valve closed
9/8/2011	4:09:53 PM	BCl3 valve closed
9/8/2011	4:09:53 PM	PH3 valve closed
9/8/2011	4:09:53 PM	SiCl4 pre valve closed
9/8/2011	4:09:53 PM	SiCl4 post valve closed
9/8/2011	4:09:53 PM	Main Vac valve closed
9/8/2011	4:09:53 PM	Bubbler valve closed
9/8/2011	4:09:53 PM	Bypass valve opened
9/8/2011	4:09:53 PM	Helium MFC set to  0.000000
9/8/2011	4:09:53 PM	H2 MFC set to  0.000000
9/8/2011	4:09:53 PM	BCl3 MFC set to  0.000000
9/8/2011	4:09:53 PM	PHl3 MFC set to  0.000000
9/8/2011	4:09:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:09:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:09:53 PM	Tube furnace set to 0
9/8/2011	4:09:55 PM	Helium valve closed
9/8/2011	4:09:55 PM	H2 valve closed
9/8/2011	4:09:56 PM	BCl3 valve closed
9/8/2011	4:09:56 PM	PH3 valve closed
9/8/2011	4:09:56 PM	SiCl4 pre valve closed
9/8/2011	4:09:56 PM	SiCl4 post valve closed
9/8/2011	4:09:56 PM	Bypass valve closed
9/8/2011	4:09:56 PM	Bubbler valve closed
9/8/2011	4:09:56 PM	Main Vac valve opened
9/8/2011	4:09:56 PM	Helium MFC set to  0.000000
9/8/2011	4:09:56 PM	H2 MFC set to  0.000000
9/8/2011	4:09:56 PM	BCl3 MFC set to  0.000000
9/8/2011	4:09:56 PM	PHl3 MFC set to  0.000000
9/8/2011	4:09:56 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:09:56 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:09:56 PM	Tube furnace set to 0
9/8/2011	4:10:26 PM	H2 valve closed
9/8/2011	4:10:26 PM	BCl3 valve closed
9/8/2011	4:10:26 PM	PH3 valve closed
9/8/2011	4:10:26 PM	SiCl4 pre valve closed
9/8/2011	4:10:26 PM	SiCl4 post valve closed
9/8/2011	4:10:26 PM	Bypass valve closed
9/8/2011	4:10:26 PM	Bubbler valve closed
9/8/2011	4:10:26 PM	Helium valve opened
9/8/2011	4:10:26 PM	Main Vac valve opened
9/8/2011	4:10:26 PM	Helium MFC set to  20.000000
9/8/2011	4:10:26 PM	H2 MFC set to  0.000000
9/8/2011	4:10:26 PM	BCl3 MFC set to  0.000000
9/8/2011	4:10:26 PM	PHl3 MFC set to  0.000000
9/8/2011	4:10:26 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:10:26 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:10:26 PM	Tube furnace set to 0
9/8/2011	4:10:56 PM	Helium valve closed
9/8/2011	4:10:56 PM	H2 valve closed
9/8/2011	4:10:56 PM	BCl3 valve closed
9/8/2011	4:10:56 PM	PH3 valve closed
9/8/2011	4:10:56 PM	SiCl4 pre valve closed
9/8/2011	4:10:56 PM	SiCl4 post valve closed
9/8/2011	4:10:56 PM	Bypass valve closed
9/8/2011	4:10:56 PM	Bubbler valve closed
9/8/2011	4:10:56 PM	Main Vac valve opened
9/8/2011	4:10:56 PM	Helium MFC set to  0.000000
9/8/2011	4:10:56 PM	H2 MFC set to  0.000000
9/8/2011	4:10:56 PM	BCl3 MFC set to  0.000000
9/8/2011	4:10:56 PM	PHl3 MFC set to  0.000000
9/8/2011	4:10:56 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:10:56 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:10:56 PM	Tube furnace set to 0
9/8/2011	4:11:26 PM	H2 valve closed
9/8/2011	4:11:26 PM	BCl3 valve closed
9/8/2011	4:11:26 PM	PH3 valve closed
9/8/2011	4:11:26 PM	SiCl4 pre valve closed
9/8/2011	4:11:26 PM	SiCl4 post valve closed
9/8/2011	4:11:26 PM	Bypass valve closed
9/8/2011	4:11:26 PM	Bubbler valve closed
9/8/2011	4:11:26 PM	Helium valve opened
9/8/2011	4:11:26 PM	Main Vac valve opened
9/8/2011	4:11:26 PM	Helium MFC set to  20.000000
9/8/2011	4:11:26 PM	H2 MFC set to  0.000000
9/8/2011	4:11:26 PM	BCl3 MFC set to  0.000000
9/8/2011	4:11:26 PM	PHl3 MFC set to  0.000000
9/8/2011	4:11:26 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:11:26 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:11:26 PM	Tube furnace set to 0
9/8/2011	4:11:56 PM	Helium valve closed
9/8/2011	4:11:56 PM	H2 valve closed
9/8/2011	4:11:56 PM	BCl3 valve closed
9/8/2011	4:11:56 PM	PH3 valve closed
9/8/2011	4:11:56 PM	SiCl4 pre valve closed
9/8/2011	4:11:56 PM	SiCl4 post valve closed
9/8/2011	4:11:56 PM	Bypass valve closed
9/8/2011	4:11:56 PM	Bubbler valve closed
9/8/2011	4:11:56 PM	Main Vac valve opened
9/8/2011	4:11:56 PM	Helium MFC set to  0.000000
9/8/2011	4:11:56 PM	H2 MFC set to  0.000000
9/8/2011	4:11:56 PM	BCl3 MFC set to  0.000000
9/8/2011	4:11:56 PM	PHl3 MFC set to  0.000000
9/8/2011	4:11:56 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:11:56 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:11:57 PM	Tube furnace set to 0
9/8/2011	4:12:27 PM	H2 valve closed
9/8/2011	4:12:27 PM	BCl3 valve closed
9/8/2011	4:12:27 PM	PH3 valve closed
9/8/2011	4:12:27 PM	SiCl4 pre valve closed
9/8/2011	4:12:27 PM	SiCl4 post valve closed
9/8/2011	4:12:27 PM	Bypass valve closed
9/8/2011	4:12:27 PM	Bubbler valve closed
9/8/2011	4:12:27 PM	Helium valve opened
9/8/2011	4:12:27 PM	Main Vac valve opened
9/8/2011	4:12:27 PM	Helium MFC set to  20.000000
9/8/2011	4:12:27 PM	H2 MFC set to  0.000000
9/8/2011	4:12:27 PM	BCl3 MFC set to  0.000000
9/8/2011	4:12:27 PM	PHl3 MFC set to  0.000000
9/8/2011	4:12:27 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:12:27 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:12:27 PM	Tube furnace set to 0
9/8/2011	4:12:57 PM	Helium valve closed
9/8/2011	4:12:57 PM	H2 valve closed
9/8/2011	4:12:57 PM	BCl3 valve closed
9/8/2011	4:12:57 PM	PH3 valve closed
9/8/2011	4:12:57 PM	SiCl4 pre valve closed
9/8/2011	4:12:57 PM	SiCl4 post valve closed
9/8/2011	4:12:57 PM	Bypass valve closed
9/8/2011	4:12:57 PM	Bubbler valve closed
9/8/2011	4:12:57 PM	Main Vac valve opened
9/8/2011	4:12:57 PM	Helium MFC set to  0.000000
9/8/2011	4:12:57 PM	H2 MFC set to  0.000000
9/8/2011	4:12:57 PM	BCl3 MFC set to  0.000000
9/8/2011	4:12:57 PM	PHl3 MFC set to  0.000000
9/8/2011	4:12:57 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:12:57 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:12:57 PM	Tube furnace set to 0
9/8/2011	4:13:27 PM	H2 valve closed
9/8/2011	4:13:27 PM	BCl3 valve closed
9/8/2011	4:13:27 PM	PH3 valve closed
9/8/2011	4:13:27 PM	SiCl4 pre valve closed
9/8/2011	4:13:27 PM	SiCl4 post valve closed
9/8/2011	4:13:27 PM	Bypass valve closed
9/8/2011	4:13:27 PM	Bubbler valve closed
9/8/2011	4:13:27 PM	Helium valve opened
9/8/2011	4:13:27 PM	Main Vac valve opened
9/8/2011	4:13:27 PM	Helium MFC set to  20.000000
9/8/2011	4:13:27 PM	H2 MFC set to  0.000000
9/8/2011	4:13:27 PM	BCl3 MFC set to  0.000000
9/8/2011	4:13:27 PM	PHl3 MFC set to  0.000000
9/8/2011	4:13:27 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:13:27 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:13:27 PM	Tube furnace set to 0
9/8/2011	4:13:57 PM	Helium valve closed
9/8/2011	4:13:57 PM	H2 valve closed
9/8/2011	4:13:57 PM	BCl3 valve closed
9/8/2011	4:13:57 PM	PH3 valve closed
9/8/2011	4:13:57 PM	SiCl4 pre valve closed
9/8/2011	4:13:57 PM	SiCl4 post valve closed
9/8/2011	4:13:57 PM	Bypass valve closed
9/8/2011	4:13:57 PM	Bubbler valve closed
9/8/2011	4:13:57 PM	Main Vac valve opened
9/8/2011	4:13:57 PM	Helium MFC set to  0.000000
9/8/2011	4:13:57 PM	H2 MFC set to  0.000000
9/8/2011	4:13:57 PM	BCl3 MFC set to  0.000000
9/8/2011	4:13:57 PM	PHl3 MFC set to  0.000000
9/8/2011	4:13:57 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:13:57 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:13:57 PM	Tube furnace set to 0
9/8/2011	4:14:27 PM	H2 valve closed
9/8/2011	4:14:27 PM	BCl3 valve closed
9/8/2011	4:14:28 PM	PH3 valve closed
9/8/2011	4:14:28 PM	SiCl4 pre valve closed
9/8/2011	4:14:28 PM	SiCl4 post valve closed
9/8/2011	4:14:28 PM	Bypass valve closed
9/8/2011	4:14:28 PM	Bubbler valve closed
9/8/2011	4:14:28 PM	Helium valve opened
9/8/2011	4:14:28 PM	Main Vac valve opened
9/8/2011	4:14:28 PM	Helium MFC set to  20.000000
9/8/2011	4:14:28 PM	H2 MFC set to  0.000000
9/8/2011	4:14:28 PM	BCl3 MFC set to  0.000000
9/8/2011	4:14:28 PM	PHl3 MFC set to  0.000000
9/8/2011	4:14:28 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:14:28 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:14:28 PM	Tube furnace set to 0
9/8/2011	4:14:58 PM	Helium valve closed
9/8/2011	4:14:58 PM	H2 valve closed
9/8/2011	4:14:58 PM	BCl3 valve closed
9/8/2011	4:14:58 PM	PH3 valve closed
9/8/2011	4:14:58 PM	SiCl4 pre valve closed
9/8/2011	4:14:58 PM	SiCl4 post valve closed
9/8/2011	4:14:58 PM	Bypass valve closed
9/8/2011	4:14:58 PM	Bubbler valve closed
9/8/2011	4:14:58 PM	Main Vac valve opened
9/8/2011	4:14:58 PM	Helium MFC set to  0.000000
9/8/2011	4:14:58 PM	H2 MFC set to  0.000000
9/8/2011	4:14:58 PM	BCl3 MFC set to  0.000000
9/8/2011	4:14:58 PM	PHl3 MFC set to  0.000000
9/8/2011	4:14:58 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:14:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:14:58 PM	Tube furnace set to 0
9/8/2011	4:15:28 PM	H2 valve closed
9/8/2011	4:15:28 PM	BCl3 valve closed
9/8/2011	4:15:28 PM	PH3 valve closed
9/8/2011	4:15:28 PM	SiCl4 pre valve closed
9/8/2011	4:15:28 PM	SiCl4 post valve closed
9/8/2011	4:15:28 PM	Bypass valve closed
9/8/2011	4:15:28 PM	Bubbler valve closed
9/8/2011	4:15:28 PM	Helium valve opened
9/8/2011	4:15:28 PM	Main Vac valve opened
9/8/2011	4:15:28 PM	Helium MFC set to  20.000000
9/8/2011	4:15:28 PM	H2 MFC set to  0.000000
9/8/2011	4:15:28 PM	BCl3 MFC set to  0.000000
9/8/2011	4:15:28 PM	PHl3 MFC set to  0.000000
9/8/2011	4:15:28 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:15:28 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:15:28 PM	Tube furnace set to 0
9/8/2011	4:15:58 PM	Helium valve closed
9/8/2011	4:15:58 PM	H2 valve closed
9/8/2011	4:15:58 PM	BCl3 valve closed
9/8/2011	4:15:58 PM	PH3 valve closed
9/8/2011	4:15:58 PM	SiCl4 pre valve closed
9/8/2011	4:15:58 PM	SiCl4 post valve closed
9/8/2011	4:15:58 PM	Bypass valve closed
9/8/2011	4:15:58 PM	Bubbler valve closed
9/8/2011	4:15:58 PM	Main Vac valve opened
9/8/2011	4:15:58 PM	Helium MFC set to  0.000000
9/8/2011	4:15:58 PM	H2 MFC set to  0.000000
9/8/2011	4:15:58 PM	BCl3 MFC set to  0.000000
9/8/2011	4:15:58 PM	PHl3 MFC set to  0.000000
9/8/2011	4:15:58 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:15:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:15:58 PM	Tube furnace set to 0
9/8/2011	4:16:28 PM	H2 valve closed
9/8/2011	4:16:28 PM	BCl3 valve closed
9/8/2011	4:16:28 PM	PH3 valve closed
9/8/2011	4:16:28 PM	SiCl4 pre valve closed
9/8/2011	4:16:28 PM	SiCl4 post valve closed
9/8/2011	4:16:28 PM	Bypass valve closed
9/8/2011	4:16:28 PM	Bubbler valve closed
9/8/2011	4:16:28 PM	Helium valve opened
9/8/2011	4:16:28 PM	Main Vac valve opened
9/8/2011	4:16:28 PM	Helium MFC set to  20.000000
9/8/2011	4:16:28 PM	H2 MFC set to  0.000000
9/8/2011	4:16:28 PM	BCl3 MFC set to  0.000000
9/8/2011	4:16:28 PM	PHl3 MFC set to  0.000000
9/8/2011	4:16:28 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:16:28 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:16:29 PM	Tube furnace set to 0
9/8/2011	4:16:59 PM	Helium valve closed
9/8/2011	4:16:59 PM	H2 valve closed
9/8/2011	4:16:59 PM	BCl3 valve closed
9/8/2011	4:16:59 PM	PH3 valve closed
9/8/2011	4:16:59 PM	SiCl4 pre valve closed
9/8/2011	4:16:59 PM	SiCl4 post valve closed
9/8/2011	4:16:59 PM	Bypass valve closed
9/8/2011	4:16:59 PM	Bubbler valve closed
9/8/2011	4:16:59 PM	Main Vac valve opened
9/8/2011	4:16:59 PM	Helium MFC set to  0.000000
9/8/2011	4:16:59 PM	H2 MFC set to  0.000000
9/8/2011	4:16:59 PM	BCl3 MFC set to  0.000000
9/8/2011	4:16:59 PM	PHl3 MFC set to  0.000000
9/8/2011	4:16:59 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:16:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:16:59 PM	Tube furnace set to 0
9/8/2011	4:17:19 PM	Run aborted at 4:17 PM
9/8/2011	4:17:19 PM	Helium valve closed
9/8/2011	4:17:19 PM	H2 valve closed
9/8/2011	4:17:19 PM	BCl3 valve closed
9/8/2011	4:17:19 PM	PH3 valve closed
9/8/2011	4:17:19 PM	SiCl4 pre valve closed
9/8/2011	4:17:19 PM	SiCl4 post valve closed
9/8/2011	4:17:19 PM	Bypass valve closed
9/8/2011	4:17:19 PM	Main Vac valve closed
9/8/2011	4:17:19 PM	Bubbler valve closed
9/8/2011	4:17:19 PM	Helium MFC set to  0.000000
9/8/2011	4:17:19 PM	H2 MFC set to  0.000000
9/8/2011	4:17:19 PM	BCl3 MFC set to  0.000000
9/8/2011	4:17:19 PM	PHl3 MFC set to  0.000000
9/8/2011	4:17:19 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:17:19 PM	Tube furnace set to 0
9/8/2011	4:17:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	4:17:28 PM	Main Vac valve opened
9/8/2011	4:18:12 PM	Recipe started at 4:18 PM
9/8/2011	4:18:12 PM	Helium valve closed
9/8/2011	4:18:12 PM	H2 valve closed
9/8/2011	4:18:12 PM	BCl3 valve closed
9/8/2011	4:18:12 PM	PH3 valve closed
9/8/2011	4:18:12 PM	SiCl4 pre valve closed
9/8/2011	4:18:12 PM	SiCl4 post valve closed
9/8/2011	4:18:12 PM	Main Vac valve closed
9/8/2011	4:18:12 PM	Bypass valve closed
9/8/2011	4:18:12 PM	Bubbler valve closed
9/8/2011	4:18:12 PM	Helium MFC set to  0.000000
9/8/2011	4:18:12 PM	H2 MFC set to  0.000000
9/8/2011	4:18:12 PM	BCl3 MFC set to  0.000000
9/8/2011	4:18:12 PM	PHl3 MFC set to  0.000000
9/8/2011	4:18:12 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:18:12 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:18:12 PM	Tube furnace set to 0
9/8/2011	4:18:15 PM	Helium valve closed
9/8/2011	4:18:15 PM	BCl3 valve closed
9/8/2011	4:18:15 PM	PH3 valve closed
9/8/2011	4:18:15 PM	SiCl4 pre valve closed
9/8/2011	4:18:15 PM	SiCl4 post valve closed
9/8/2011	4:18:15 PM	Main Vac valve closed
9/8/2011	4:18:15 PM	Bypass valve closed
9/8/2011	4:18:15 PM	Bubbler valve closed
9/8/2011	4:18:15 PM	H2 valve opened
9/8/2011	4:18:15 PM	Helium MFC set to  0.000000
9/8/2011	4:18:15 PM	H2 MFC set to  500.000000
9/8/2011	4:18:15 PM	BCl3 MFC set to  0.000000
9/8/2011	4:18:15 PM	PHl3 MFC set to  0.000000
9/8/2011	4:18:15 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:18:15 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:18:15 PM	Tube furnace set to 0
9/8/2011	4:19:20 PM	Helium valve closed
9/8/2011	4:19:20 PM	BCl3 valve closed
9/8/2011	4:19:20 PM	PH3 valve closed
9/8/2011	4:19:20 PM	SiCl4 pre valve closed
9/8/2011	4:19:20 PM	SiCl4 post valve closed
9/8/2011	4:19:20 PM	Main Vac valve closed
9/8/2011	4:19:20 PM	Bypass valve closed
9/8/2011	4:19:20 PM	H2 valve opened
9/8/2011	4:19:20 PM	Bubbler valve opened
9/8/2011	4:19:20 PM	Helium MFC set to  0.000000
9/8/2011	4:19:20 PM	H2 MFC set to  500.000000
9/8/2011	4:19:20 PM	BCl3 MFC set to  0.000000
9/8/2011	4:19:20 PM	PHl3 MFC set to  0.000000
9/8/2011	4:19:20 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:19:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:19:20 PM	Tube furnace set to 0
9/8/2011	4:19:21 PM	Helium valve closed
9/8/2011	4:19:21 PM	BCl3 valve closed
9/8/2011	4:19:21 PM	PH3 valve closed
9/8/2011	4:19:21 PM	SiCl4 pre valve closed
9/8/2011	4:19:21 PM	SiCl4 post valve closed
9/8/2011	4:19:21 PM	Main Vac valve closed
9/8/2011	4:19:21 PM	Bypass valve closed
9/8/2011	4:19:21 PM	H2 valve opened
9/8/2011	4:19:21 PM	Bubbler valve opened
9/8/2011	4:19:21 PM	Helium MFC set to  0.000000
9/8/2011	4:19:21 PM	H2 MFC set to  500.000000
9/8/2011	4:19:21 PM	BCl3 MFC set to  0.000000
9/8/2011	4:19:21 PM	PHl3 MFC set to  0.000000
9/8/2011	4:19:21 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:19:21 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:19:21 PM	Tube furnace set to 1000
9/8/2011	4:39:21 PM	Helium valve closed
9/8/2011	4:39:21 PM	PH3 valve closed
9/8/2011	4:39:21 PM	Main Vac valve closed
9/8/2011	4:39:21 PM	Bypass valve closed
9/8/2011	4:39:21 PM	H2 valve opened
9/8/2011	4:39:21 PM	BCl3 valve opened
9/8/2011	4:39:21 PM	SiCl4 pre valve opened
9/8/2011	4:39:21 PM	SiCl4 post valve opened
9/8/2011	4:39:21 PM	Bubbler valve opened
9/8/2011	4:39:21 PM	Helium MFC set to  0.000000
9/8/2011	4:39:21 PM	H2 MFC set to  500.000000
9/8/2011	4:39:21 PM	BCl3 MFC set to  2.200000
9/8/2011	4:39:21 PM	PHl3 MFC set to  0.000000
9/8/2011	4:39:21 PM	SiCl4 MFC set to  50.000000
9/8/2011	4:39:21 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:39:21 PM	Tube furnace set to 1000
9/8/2011	4:56:01 PM	Helium valve closed
9/8/2011	4:56:01 PM	BCl3 valve closed
9/8/2011	4:56:01 PM	PH3 valve closed
9/8/2011	4:56:01 PM	SiCl4 pre valve closed
9/8/2011	4:56:01 PM	SiCl4 post valve closed
9/8/2011	4:56:01 PM	Main Vac valve closed
9/8/2011	4:56:01 PM	Bypass valve closed
9/8/2011	4:56:01 PM	H2 valve opened
9/8/2011	4:56:01 PM	Bubbler valve opened
9/8/2011	4:56:01 PM	Helium MFC set to  0.000000
9/8/2011	4:56:01 PM	H2 MFC set to  500.000000
9/8/2011	4:56:01 PM	BCl3 MFC set to  0.000000
9/8/2011	4:56:01 PM	PHl3 MFC set to  0.000000
9/8/2011	4:56:01 PM	SiCl4 MFC set to  0.000000
9/8/2011	4:56:01 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	4:56:02 PM	Tube furnace set to 750
9/8/2011	5:01:02 PM	H2 valve closed
9/8/2011	5:01:02 PM	BCl3 valve closed
9/8/2011	5:01:02 PM	PH3 valve closed
9/8/2011	5:01:02 PM	SiCl4 pre valve closed
9/8/2011	5:01:02 PM	SiCl4 post valve closed
9/8/2011	5:01:02 PM	Main Vac valve closed
9/8/2011	5:01:02 PM	Bypass valve closed
9/8/2011	5:01:02 PM	Helium valve opened
9/8/2011	5:01:02 PM	Bubbler valve opened
9/8/2011	5:01:02 PM	Helium MFC set to  500.000000
9/8/2011	5:01:02 PM	H2 MFC set to  0.000000
9/8/2011	5:01:02 PM	BCl3 MFC set to  0.000000
9/8/2011	5:01:02 PM	PHl3 MFC set to  0.000000
9/8/2011	5:01:02 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:01:02 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:01:02 PM	Tube furnace set to 0
9/8/2011	5:21:02 PM	Helium valve closed
9/8/2011	5:21:02 PM	H2 valve closed
9/8/2011	5:21:02 PM	BCl3 valve closed
9/8/2011	5:21:02 PM	PH3 valve closed
9/8/2011	5:21:02 PM	SiCl4 pre valve closed
9/8/2011	5:21:02 PM	SiCl4 post valve closed
9/8/2011	5:21:02 PM	Main Vac valve closed
9/8/2011	5:21:02 PM	Bypass valve closed
9/8/2011	5:21:02 PM	Bubbler valve closed
9/8/2011	5:21:02 PM	Helium MFC set to  0.000000
9/8/2011	5:21:02 PM	H2 MFC set to  0.000000
9/8/2011	5:21:02 PM	BCl3 MFC set to  0.000000
9/8/2011	5:21:02 PM	PHl3 MFC set to  0.000000
9/8/2011	5:21:02 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:21:02 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:21:02 PM	Tube furnace set to 0
9/8/2011	5:21:03 PM	Run finished at 5:21 PM
9/8/2011	5:28:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	5:28:20 PM	Recipe started at 5:28 PM
9/8/2011	5:28:20 PM	Helium valve closed
9/8/2011	5:28:20 PM	H2 valve closed
9/8/2011	5:28:20 PM	BCl3 valve closed
9/8/2011	5:28:20 PM	PH3 valve closed
9/8/2011	5:28:20 PM	SiCl4 pre valve closed
9/8/2011	5:28:20 PM	SiCl4 post valve closed
9/8/2011	5:28:20 PM	Main Vac valve closed
9/8/2011	5:28:20 PM	Bubbler valve closed
9/8/2011	5:28:20 PM	Bypass valve opened
9/8/2011	5:28:20 PM	Helium MFC set to  0.000000
9/8/2011	5:28:20 PM	H2 MFC set to  0.000000
9/8/2011	5:28:20 PM	BCl3 MFC set to  0.000000
9/8/2011	5:28:20 PM	PHl3 MFC set to  0.000000
9/8/2011	5:28:20 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:28:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:28:20 PM	Tube furnace set to 0
9/8/2011	5:29:22 PM	Helium valve closed
9/8/2011	5:29:22 PM	H2 valve closed
9/8/2011	5:29:22 PM	BCl3 valve closed
9/8/2011	5:29:22 PM	PH3 valve closed
9/8/2011	5:29:22 PM	SiCl4 pre valve closed
9/8/2011	5:29:22 PM	SiCl4 post valve closed
9/8/2011	5:29:22 PM	Main Vac valve closed
9/8/2011	5:29:22 PM	Bubbler valve closed
9/8/2011	5:29:22 PM	Bypass valve opened
9/8/2011	5:29:22 PM	Helium MFC set to  0.000000
9/8/2011	5:29:22 PM	H2 MFC set to  0.000000
9/8/2011	5:29:22 PM	BCl3 MFC set to  0.000000
9/8/2011	5:29:22 PM	PHl3 MFC set to  0.000000
9/8/2011	5:29:22 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:29:22 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:29:22 PM	Tube furnace set to 0
9/8/2011	5:30:22 PM	Helium valve closed
9/8/2011	5:30:22 PM	H2 valve closed
9/8/2011	5:30:22 PM	BCl3 valve closed
9/8/2011	5:30:22 PM	PH3 valve closed
9/8/2011	5:30:22 PM	SiCl4 pre valve closed
9/8/2011	5:30:22 PM	SiCl4 post valve closed
9/8/2011	5:30:22 PM	Bypass valve closed
9/8/2011	5:30:22 PM	Bubbler valve closed
9/8/2011	5:30:22 PM	Main Vac valve opened
9/8/2011	5:30:22 PM	Helium MFC set to  0.000000
9/8/2011	5:30:22 PM	H2 MFC set to  0.000000
9/8/2011	5:30:22 PM	BCl3 MFC set to  0.000000
9/8/2011	5:30:22 PM	PHl3 MFC set to  0.000000
9/8/2011	5:30:22 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:30:22 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:30:22 PM	Tube furnace set to 0
9/8/2011	5:30:23 PM	Run finished at 5:30 PM
9/8/2011	5:30:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	5:31:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	5:31:28 PM	Recipe started at 5:31 PM
9/8/2011	5:31:28 PM	Helium valve closed
9/8/2011	5:31:28 PM	H2 valve closed
9/8/2011	5:31:28 PM	BCl3 valve closed
9/8/2011	5:31:28 PM	PH3 valve closed
9/8/2011	5:31:28 PM	SiCl4 pre valve closed
9/8/2011	5:31:28 PM	SiCl4 post valve closed
9/8/2011	5:31:28 PM	Main Vac valve closed
9/8/2011	5:31:28 PM	Bubbler valve closed
9/8/2011	5:31:28 PM	Bypass valve opened
9/8/2011	5:31:28 PM	Helium MFC set to  0.000000
9/8/2011	5:31:28 PM	H2 MFC set to  0.000000
9/8/2011	5:31:28 PM	BCl3 MFC set to  0.000000
9/8/2011	5:31:28 PM	PHl3 MFC set to  0.000000
9/8/2011	5:31:28 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:31:28 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:31:28 PM	Tube furnace set to 0
9/8/2011	5:31:28 PM	Helium valve closed
9/8/2011	5:31:28 PM	H2 valve closed
9/8/2011	5:31:28 PM	BCl3 valve closed
9/8/2011	5:31:28 PM	PH3 valve closed
9/8/2011	5:31:28 PM	SiCl4 pre valve closed
9/8/2011	5:31:28 PM	SiCl4 post valve closed
9/8/2011	5:31:28 PM	Main Vac valve closed
9/8/2011	5:31:28 PM	Bubbler valve closed
9/8/2011	5:31:28 PM	Bypass valve opened
9/8/2011	5:31:28 PM	Helium MFC set to  0.000000
9/8/2011	5:31:28 PM	H2 MFC set to  0.000000
9/8/2011	5:31:28 PM	BCl3 MFC set to  0.000000
9/8/2011	5:31:28 PM	PHl3 MFC set to  0.000000
9/8/2011	5:31:28 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:31:28 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:31:28 PM	Tube furnace set to 0
9/8/2011	5:31:58 PM	Helium valve closed
9/8/2011	5:31:58 PM	H2 valve closed
9/8/2011	5:31:58 PM	BCl3 valve closed
9/8/2011	5:31:58 PM	PH3 valve closed
9/8/2011	5:31:58 PM	SiCl4 pre valve closed
9/8/2011	5:31:58 PM	SiCl4 post valve closed
9/8/2011	5:31:58 PM	Bypass valve closed
9/8/2011	5:31:58 PM	Bubbler valve closed
9/8/2011	5:31:58 PM	Main Vac valve opened
9/8/2011	5:31:58 PM	Helium MFC set to  0.000000
9/8/2011	5:31:58 PM	H2 MFC set to  0.000000
9/8/2011	5:31:58 PM	BCl3 MFC set to  0.000000
9/8/2011	5:31:58 PM	PHl3 MFC set to  0.000000
9/8/2011	5:31:58 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:31:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:31:58 PM	Tube furnace set to 0
9/8/2011	5:32:29 PM	H2 valve closed
9/8/2011	5:32:29 PM	BCl3 valve closed
9/8/2011	5:32:29 PM	PH3 valve closed
9/8/2011	5:32:29 PM	SiCl4 pre valve closed
9/8/2011	5:32:29 PM	SiCl4 post valve closed
9/8/2011	5:32:29 PM	Bypass valve closed
9/8/2011	5:32:29 PM	Bubbler valve closed
9/8/2011	5:32:29 PM	Helium valve opened
9/8/2011	5:32:29 PM	Main Vac valve opened
9/8/2011	5:32:29 PM	Helium MFC set to  20.000000
9/8/2011	5:32:29 PM	H2 MFC set to  0.000000
9/8/2011	5:32:29 PM	BCl3 MFC set to  0.000000
9/8/2011	5:32:29 PM	PHl3 MFC set to  0.000000
9/8/2011	5:32:29 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:32:29 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:32:29 PM	Tube furnace set to 0
9/8/2011	5:32:59 PM	Helium valve closed
9/8/2011	5:32:59 PM	H2 valve closed
9/8/2011	5:32:59 PM	BCl3 valve closed
9/8/2011	5:32:59 PM	PH3 valve closed
9/8/2011	5:32:59 PM	SiCl4 pre valve closed
9/8/2011	5:32:59 PM	SiCl4 post valve closed
9/8/2011	5:32:59 PM	Bypass valve closed
9/8/2011	5:32:59 PM	Bubbler valve closed
9/8/2011	5:32:59 PM	Main Vac valve opened
9/8/2011	5:32:59 PM	Helium MFC set to  0.000000
9/8/2011	5:32:59 PM	H2 MFC set to  0.000000
9/8/2011	5:32:59 PM	BCl3 MFC set to  0.000000
9/8/2011	5:32:59 PM	PHl3 MFC set to  0.000000
9/8/2011	5:32:59 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:32:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:32:59 PM	Tube furnace set to 0
9/8/2011	5:33:29 PM	H2 valve closed
9/8/2011	5:33:29 PM	BCl3 valve closed
9/8/2011	5:33:29 PM	PH3 valve closed
9/8/2011	5:33:29 PM	SiCl4 pre valve closed
9/8/2011	5:33:29 PM	SiCl4 post valve closed
9/8/2011	5:33:29 PM	Bypass valve closed
9/8/2011	5:33:29 PM	Bubbler valve closed
9/8/2011	5:33:29 PM	Helium valve opened
9/8/2011	5:33:29 PM	Main Vac valve opened
9/8/2011	5:33:29 PM	Helium MFC set to  20.000000
9/8/2011	5:33:29 PM	H2 MFC set to  0.000000
9/8/2011	5:33:29 PM	BCl3 MFC set to  0.000000
9/8/2011	5:33:29 PM	PHl3 MFC set to  0.000000
9/8/2011	5:33:29 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:33:29 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:33:29 PM	Tube furnace set to 0
9/8/2011	5:33:59 PM	Helium valve closed
9/8/2011	5:33:59 PM	H2 valve closed
9/8/2011	5:33:59 PM	BCl3 valve closed
9/8/2011	5:33:59 PM	PH3 valve closed
9/8/2011	5:33:59 PM	SiCl4 pre valve closed
9/8/2011	5:33:59 PM	SiCl4 post valve closed
9/8/2011	5:33:59 PM	Bypass valve closed
9/8/2011	5:33:59 PM	Bubbler valve closed
9/8/2011	5:33:59 PM	Main Vac valve opened
9/8/2011	5:33:59 PM	Helium MFC set to  0.000000
9/8/2011	5:33:59 PM	H2 MFC set to  0.000000
9/8/2011	5:33:59 PM	BCl3 MFC set to  0.000000
9/8/2011	5:33:59 PM	PHl3 MFC set to  0.000000
9/8/2011	5:33:59 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:33:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:33:59 PM	Tube furnace set to 0
9/8/2011	5:34:29 PM	H2 valve closed
9/8/2011	5:34:29 PM	BCl3 valve closed
9/8/2011	5:34:29 PM	PH3 valve closed
9/8/2011	5:34:29 PM	SiCl4 pre valve closed
9/8/2011	5:34:29 PM	SiCl4 post valve closed
9/8/2011	5:34:30 PM	Bypass valve closed
9/8/2011	5:34:30 PM	Bubbler valve closed
9/8/2011	5:34:30 PM	Helium valve opened
9/8/2011	5:34:30 PM	Main Vac valve opened
9/8/2011	5:34:30 PM	Helium MFC set to  20.000000
9/8/2011	5:34:30 PM	H2 MFC set to  0.000000
9/8/2011	5:34:30 PM	BCl3 MFC set to  0.000000
9/8/2011	5:34:30 PM	PHl3 MFC set to  0.000000
9/8/2011	5:34:30 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:34:30 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:34:30 PM	Tube furnace set to 0
9/8/2011	5:35:00 PM	Helium valve closed
9/8/2011	5:35:00 PM	H2 valve closed
9/8/2011	5:35:00 PM	BCl3 valve closed
9/8/2011	5:35:00 PM	PH3 valve closed
9/8/2011	5:35:00 PM	SiCl4 pre valve closed
9/8/2011	5:35:00 PM	SiCl4 post valve closed
9/8/2011	5:35:00 PM	Bypass valve closed
9/8/2011	5:35:00 PM	Bubbler valve closed
9/8/2011	5:35:00 PM	Main Vac valve opened
9/8/2011	5:35:00 PM	Helium MFC set to  0.000000
9/8/2011	5:35:00 PM	H2 MFC set to  0.000000
9/8/2011	5:35:00 PM	BCl3 MFC set to  0.000000
9/8/2011	5:35:00 PM	PHl3 MFC set to  0.000000
9/8/2011	5:35:00 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:35:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:35:00 PM	Tube furnace set to 0
9/8/2011	5:35:30 PM	H2 valve closed
9/8/2011	5:35:30 PM	BCl3 valve closed
9/8/2011	5:35:30 PM	PH3 valve closed
9/8/2011	5:35:30 PM	SiCl4 pre valve closed
9/8/2011	5:35:30 PM	SiCl4 post valve closed
9/8/2011	5:35:30 PM	Bypass valve closed
9/8/2011	5:35:30 PM	Bubbler valve closed
9/8/2011	5:35:30 PM	Helium valve opened
9/8/2011	5:35:30 PM	Main Vac valve opened
9/8/2011	5:35:30 PM	Helium MFC set to  20.000000
9/8/2011	5:35:30 PM	H2 MFC set to  0.000000
9/8/2011	5:35:30 PM	BCl3 MFC set to  0.000000
9/8/2011	5:35:30 PM	PHl3 MFC set to  0.000000
9/8/2011	5:35:30 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:35:30 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:35:30 PM	Tube furnace set to 0
9/8/2011	5:36:00 PM	Helium valve closed
9/8/2011	5:36:00 PM	H2 valve closed
9/8/2011	5:36:00 PM	BCl3 valve closed
9/8/2011	5:36:00 PM	PH3 valve closed
9/8/2011	5:36:00 PM	SiCl4 pre valve closed
9/8/2011	5:36:00 PM	SiCl4 post valve closed
9/8/2011	5:36:00 PM	Bypass valve closed
9/8/2011	5:36:00 PM	Bubbler valve closed
9/8/2011	5:36:00 PM	Main Vac valve opened
9/8/2011	5:36:00 PM	Helium MFC set to  0.000000
9/8/2011	5:36:00 PM	H2 MFC set to  0.000000
9/8/2011	5:36:00 PM	BCl3 MFC set to  0.000000
9/8/2011	5:36:00 PM	PHl3 MFC set to  0.000000
9/8/2011	5:36:00 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:36:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:36:00 PM	Tube furnace set to 0
9/8/2011	5:36:30 PM	H2 valve closed
9/8/2011	5:36:30 PM	BCl3 valve closed
9/8/2011	5:36:30 PM	PH3 valve closed
9/8/2011	5:36:30 PM	SiCl4 pre valve closed
9/8/2011	5:36:30 PM	SiCl4 post valve closed
9/8/2011	5:36:30 PM	Bypass valve closed
9/8/2011	5:36:30 PM	Bubbler valve closed
9/8/2011	5:36:30 PM	Helium valve opened
9/8/2011	5:36:30 PM	Main Vac valve opened
9/8/2011	5:36:30 PM	Helium MFC set to  20.000000
9/8/2011	5:36:30 PM	H2 MFC set to  0.000000
9/8/2011	5:36:30 PM	BCl3 MFC set to  0.000000
9/8/2011	5:36:30 PM	PHl3 MFC set to  0.000000
9/8/2011	5:36:30 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:36:30 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:36:31 PM	Tube furnace set to 0
9/8/2011	5:37:01 PM	Helium valve closed
9/8/2011	5:37:01 PM	H2 valve closed
9/8/2011	5:37:01 PM	BCl3 valve closed
9/8/2011	5:37:01 PM	PH3 valve closed
9/8/2011	5:37:01 PM	SiCl4 pre valve closed
9/8/2011	5:37:01 PM	SiCl4 post valve closed
9/8/2011	5:37:01 PM	Bypass valve closed
9/8/2011	5:37:01 PM	Bubbler valve closed
9/8/2011	5:37:01 PM	Main Vac valve opened
9/8/2011	5:37:01 PM	Helium MFC set to  0.000000
9/8/2011	5:37:01 PM	H2 MFC set to  0.000000
9/8/2011	5:37:01 PM	BCl3 MFC set to  0.000000
9/8/2011	5:37:01 PM	PHl3 MFC set to  0.000000
9/8/2011	5:37:01 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:37:01 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:37:01 PM	Tube furnace set to 0
9/8/2011	5:37:31 PM	H2 valve closed
9/8/2011	5:37:31 PM	BCl3 valve closed
9/8/2011	5:37:31 PM	PH3 valve closed
9/8/2011	5:37:31 PM	SiCl4 pre valve closed
9/8/2011	5:37:31 PM	SiCl4 post valve closed
9/8/2011	5:37:31 PM	Bypass valve closed
9/8/2011	5:37:31 PM	Bubbler valve closed
9/8/2011	5:37:31 PM	Helium valve opened
9/8/2011	5:37:31 PM	Main Vac valve opened
9/8/2011	5:37:31 PM	Helium MFC set to  20.000000
9/8/2011	5:37:31 PM	H2 MFC set to  0.000000
9/8/2011	5:37:31 PM	BCl3 MFC set to  0.000000
9/8/2011	5:37:31 PM	PHl3 MFC set to  0.000000
9/8/2011	5:37:31 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:37:31 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:37:31 PM	Tube furnace set to 0
9/8/2011	5:38:01 PM	Helium valve closed
9/8/2011	5:38:01 PM	H2 valve closed
9/8/2011	5:38:01 PM	BCl3 valve closed
9/8/2011	5:38:01 PM	PH3 valve closed
9/8/2011	5:38:01 PM	SiCl4 pre valve closed
9/8/2011	5:38:01 PM	SiCl4 post valve closed
9/8/2011	5:38:01 PM	Bypass valve closed
9/8/2011	5:38:01 PM	Bubbler valve closed
9/8/2011	5:38:01 PM	Main Vac valve opened
9/8/2011	5:38:01 PM	Helium MFC set to  0.000000
9/8/2011	5:38:01 PM	H2 MFC set to  0.000000
9/8/2011	5:38:01 PM	BCl3 MFC set to  0.000000
9/8/2011	5:38:01 PM	PHl3 MFC set to  0.000000
9/8/2011	5:38:01 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:38:01 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:38:01 PM	Tube furnace set to 0
9/8/2011	5:38:31 PM	H2 valve closed
9/8/2011	5:38:31 PM	BCl3 valve closed
9/8/2011	5:38:31 PM	PH3 valve closed
9/8/2011	5:38:31 PM	SiCl4 pre valve closed
9/8/2011	5:38:31 PM	SiCl4 post valve closed
9/8/2011	5:38:31 PM	Bypass valve closed
9/8/2011	5:38:31 PM	Bubbler valve closed
9/8/2011	5:38:31 PM	Helium valve opened
9/8/2011	5:38:31 PM	Main Vac valve opened
9/8/2011	5:38:31 PM	Helium MFC set to  20.000000
9/8/2011	5:38:31 PM	H2 MFC set to  0.000000
9/8/2011	5:38:31 PM	BCl3 MFC set to  0.000000
9/8/2011	5:38:31 PM	PHl3 MFC set to  0.000000
9/8/2011	5:38:31 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:38:31 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:38:31 PM	Tube furnace set to 0
9/8/2011	5:39:01 PM	Helium valve closed
9/8/2011	5:39:01 PM	H2 valve closed
9/8/2011	5:39:01 PM	BCl3 valve closed
9/8/2011	5:39:01 PM	PH3 valve closed
9/8/2011	5:39:01 PM	SiCl4 pre valve closed
9/8/2011	5:39:01 PM	SiCl4 post valve closed
9/8/2011	5:39:01 PM	Bypass valve closed
9/8/2011	5:39:01 PM	Bubbler valve closed
9/8/2011	5:39:01 PM	Main Vac valve opened
9/8/2011	5:39:01 PM	Helium MFC set to  0.000000
9/8/2011	5:39:01 PM	H2 MFC set to  0.000000
9/8/2011	5:39:01 PM	BCl3 MFC set to  0.000000
9/8/2011	5:39:01 PM	PHl3 MFC set to  0.000000
9/8/2011	5:39:01 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:39:01 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:39:02 PM	Tube furnace set to 0
9/8/2011	5:39:32 PM	H2 valve closed
9/8/2011	5:39:32 PM	BCl3 valve closed
9/8/2011	5:39:32 PM	PH3 valve closed
9/8/2011	5:39:32 PM	SiCl4 pre valve closed
9/8/2011	5:39:32 PM	SiCl4 post valve closed
9/8/2011	5:39:32 PM	Bypass valve closed
9/8/2011	5:39:32 PM	Bubbler valve closed
9/8/2011	5:39:32 PM	Helium valve opened
9/8/2011	5:39:32 PM	Main Vac valve opened
9/8/2011	5:39:32 PM	Helium MFC set to  20.000000
9/8/2011	5:39:32 PM	H2 MFC set to  0.000000
9/8/2011	5:39:32 PM	BCl3 MFC set to  0.000000
9/8/2011	5:39:32 PM	PHl3 MFC set to  0.000000
9/8/2011	5:39:32 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:39:32 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:39:32 PM	Tube furnace set to 0
9/8/2011	5:40:02 PM	Helium valve closed
9/8/2011	5:40:02 PM	H2 valve closed
9/8/2011	5:40:02 PM	BCl3 valve closed
9/8/2011	5:40:02 PM	PH3 valve closed
9/8/2011	5:40:02 PM	SiCl4 pre valve closed
9/8/2011	5:40:02 PM	SiCl4 post valve closed
9/8/2011	5:40:02 PM	Bypass valve closed
9/8/2011	5:40:02 PM	Bubbler valve closed
9/8/2011	5:40:02 PM	Main Vac valve opened
9/8/2011	5:40:02 PM	Helium MFC set to  0.000000
9/8/2011	5:40:02 PM	H2 MFC set to  0.000000
9/8/2011	5:40:02 PM	BCl3 MFC set to  0.000000
9/8/2011	5:40:02 PM	PHl3 MFC set to  0.000000
9/8/2011	5:40:02 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:40:02 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:40:02 PM	Tube furnace set to 0
9/8/2011	5:40:32 PM	H2 valve closed
9/8/2011	5:40:32 PM	BCl3 valve closed
9/8/2011	5:40:32 PM	PH3 valve closed
9/8/2011	5:40:32 PM	SiCl4 pre valve closed
9/8/2011	5:40:32 PM	SiCl4 post valve closed
9/8/2011	5:40:32 PM	Bypass valve closed
9/8/2011	5:40:32 PM	Bubbler valve closed
9/8/2011	5:40:32 PM	Helium valve opened
9/8/2011	5:40:32 PM	Main Vac valve opened
9/8/2011	5:40:32 PM	Helium MFC set to  20.000000
9/8/2011	5:40:32 PM	H2 MFC set to  0.000000
9/8/2011	5:40:32 PM	BCl3 MFC set to  0.000000
9/8/2011	5:40:32 PM	PHl3 MFC set to  0.000000
9/8/2011	5:40:32 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:40:32 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:40:32 PM	Tube furnace set to 0
9/8/2011	5:41:02 PM	Helium valve closed
9/8/2011	5:41:02 PM	H2 valve closed
9/8/2011	5:41:02 PM	BCl3 valve closed
9/8/2011	5:41:02 PM	PH3 valve closed
9/8/2011	5:41:02 PM	SiCl4 pre valve closed
9/8/2011	5:41:02 PM	SiCl4 post valve closed
9/8/2011	5:41:02 PM	Bypass valve closed
9/8/2011	5:41:02 PM	Bubbler valve closed
9/8/2011	5:41:02 PM	Main Vac valve opened
9/8/2011	5:41:02 PM	Helium MFC set to  0.000000
9/8/2011	5:41:02 PM	H2 MFC set to  0.000000
9/8/2011	5:41:02 PM	BCl3 MFC set to  0.000000
9/8/2011	5:41:02 PM	PHl3 MFC set to  0.000000
9/8/2011	5:41:02 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:41:02 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:41:02 PM	Tube furnace set to 0
9/8/2011	5:41:32 PM	H2 valve closed
9/8/2011	5:41:32 PM	BCl3 valve closed
9/8/2011	5:41:32 PM	PH3 valve closed
9/8/2011	5:41:32 PM	SiCl4 pre valve closed
9/8/2011	5:41:32 PM	SiCl4 post valve closed
9/8/2011	5:41:32 PM	Bypass valve closed
9/8/2011	5:41:32 PM	Bubbler valve closed
9/8/2011	5:41:32 PM	Helium valve opened
9/8/2011	5:41:32 PM	Main Vac valve opened
9/8/2011	5:41:32 PM	Helium MFC set to  20.000000
9/8/2011	5:41:32 PM	H2 MFC set to  0.000000
9/8/2011	5:41:32 PM	BCl3 MFC set to  0.000000
9/8/2011	5:41:32 PM	PHl3 MFC set to  0.000000
9/8/2011	5:41:32 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:41:32 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:41:33 PM	Tube furnace set to 0
9/8/2011	5:42:03 PM	Helium valve closed
9/8/2011	5:42:03 PM	H2 valve closed
9/8/2011	5:42:03 PM	BCl3 valve closed
9/8/2011	5:42:03 PM	PH3 valve closed
9/8/2011	5:42:03 PM	SiCl4 pre valve closed
9/8/2011	5:42:03 PM	SiCl4 post valve closed
9/8/2011	5:42:03 PM	Bypass valve closed
9/8/2011	5:42:03 PM	Bubbler valve closed
9/8/2011	5:42:03 PM	Main Vac valve opened
9/8/2011	5:42:03 PM	Helium MFC set to  0.000000
9/8/2011	5:42:03 PM	H2 MFC set to  0.000000
9/8/2011	5:42:03 PM	BCl3 MFC set to  0.000000
9/8/2011	5:42:03 PM	PHl3 MFC set to  0.000000
9/8/2011	5:42:03 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:42:03 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:42:03 PM	Tube furnace set to 0
9/8/2011	5:42:04 PM	Run finished at 5:42 PM
9/8/2011	5:42:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	5:42:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	5:42:48 PM	Recipe started at 5:42 PM
9/8/2011	5:42:48 PM	Helium valve closed
9/8/2011	5:42:48 PM	H2 valve closed
9/8/2011	5:42:48 PM	BCl3 valve closed
9/8/2011	5:42:48 PM	PH3 valve closed
9/8/2011	5:42:48 PM	SiCl4 pre valve closed
9/8/2011	5:42:48 PM	SiCl4 post valve closed
9/8/2011	5:42:48 PM	Main Vac valve closed
9/8/2011	5:42:48 PM	Bubbler valve closed
9/8/2011	5:42:48 PM	Bypass valve opened
9/8/2011	5:42:48 PM	Helium MFC set to  0.000000
9/8/2011	5:42:48 PM	H2 MFC set to  0.000000
9/8/2011	5:42:48 PM	BCl3 MFC set to  0.000000
9/8/2011	5:42:48 PM	PHl3 MFC set to  0.000000
9/8/2011	5:42:48 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:42:48 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:42:48 PM	Tube furnace set to 0
9/8/2011	5:42:48 PM	Helium valve closed
9/8/2011	5:42:48 PM	H2 valve closed
9/8/2011	5:42:48 PM	BCl3 valve closed
9/8/2011	5:42:48 PM	PH3 valve closed
9/8/2011	5:42:48 PM	SiCl4 pre valve closed
9/8/2011	5:42:48 PM	SiCl4 post valve closed
9/8/2011	5:42:48 PM	Main Vac valve closed
9/8/2011	5:42:48 PM	Bubbler valve closed
9/8/2011	5:42:48 PM	Bypass valve opened
9/8/2011	5:42:48 PM	Helium MFC set to  0.000000
9/8/2011	5:42:48 PM	H2 MFC set to  0.000000
9/8/2011	5:42:48 PM	BCl3 MFC set to  0.000000
9/8/2011	5:42:48 PM	PHl3 MFC set to  0.000000
9/8/2011	5:42:48 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:42:48 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:42:48 PM	Tube furnace set to 0
9/8/2011	5:42:50 PM	Helium valve closed
9/8/2011	5:42:50 PM	H2 valve closed
9/8/2011	5:42:50 PM	BCl3 valve closed
9/8/2011	5:42:50 PM	PH3 valve closed
9/8/2011	5:42:50 PM	SiCl4 pre valve closed
9/8/2011	5:42:50 PM	SiCl4 post valve closed
9/8/2011	5:42:50 PM	Bypass valve closed
9/8/2011	5:42:50 PM	Bubbler valve closed
9/8/2011	5:42:50 PM	Main Vac valve opened
9/8/2011	5:42:50 PM	Helium MFC set to  0.000000
9/8/2011	5:42:50 PM	H2 MFC set to  0.000000
9/8/2011	5:42:50 PM	BCl3 MFC set to  0.000000
9/8/2011	5:42:50 PM	PHl3 MFC set to  0.000000
9/8/2011	5:42:50 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:42:50 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:42:50 PM	Tube furnace set to 0
9/8/2011	5:43:20 PM	H2 valve closed
9/8/2011	5:43:20 PM	BCl3 valve closed
9/8/2011	5:43:20 PM	PH3 valve closed
9/8/2011	5:43:20 PM	SiCl4 pre valve closed
9/8/2011	5:43:20 PM	SiCl4 post valve closed
9/8/2011	5:43:20 PM	Bypass valve closed
9/8/2011	5:43:20 PM	Bubbler valve closed
9/8/2011	5:43:20 PM	Helium valve opened
9/8/2011	5:43:20 PM	Main Vac valve opened
9/8/2011	5:43:20 PM	Helium MFC set to  20.000000
9/8/2011	5:43:20 PM	H2 MFC set to  0.000000
9/8/2011	5:43:20 PM	BCl3 MFC set to  0.000000
9/8/2011	5:43:20 PM	PHl3 MFC set to  0.000000
9/8/2011	5:43:20 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:43:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:43:21 PM	Tube furnace set to 0
9/8/2011	5:43:51 PM	Helium valve closed
9/8/2011	5:43:51 PM	H2 valve closed
9/8/2011	5:43:51 PM	BCl3 valve closed
9/8/2011	5:43:51 PM	PH3 valve closed
9/8/2011	5:43:51 PM	SiCl4 pre valve closed
9/8/2011	5:43:51 PM	SiCl4 post valve closed
9/8/2011	5:43:51 PM	Bypass valve closed
9/8/2011	5:43:51 PM	Bubbler valve closed
9/8/2011	5:43:51 PM	Main Vac valve opened
9/8/2011	5:43:51 PM	Helium MFC set to  0.000000
9/8/2011	5:43:51 PM	H2 MFC set to  0.000000
9/8/2011	5:43:51 PM	BCl3 MFC set to  0.000000
9/8/2011	5:43:51 PM	PHl3 MFC set to  0.000000
9/8/2011	5:43:51 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:43:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:43:51 PM	Tube furnace set to 0
9/8/2011	5:44:21 PM	H2 valve closed
9/8/2011	5:44:21 PM	BCl3 valve closed
9/8/2011	5:44:21 PM	PH3 valve closed
9/8/2011	5:44:21 PM	SiCl4 pre valve closed
9/8/2011	5:44:21 PM	SiCl4 post valve closed
9/8/2011	5:44:21 PM	Bypass valve closed
9/8/2011	5:44:21 PM	Bubbler valve closed
9/8/2011	5:44:21 PM	Helium valve opened
9/8/2011	5:44:21 PM	Main Vac valve opened
9/8/2011	5:44:21 PM	Helium MFC set to  20.000000
9/8/2011	5:44:21 PM	H2 MFC set to  0.000000
9/8/2011	5:44:21 PM	BCl3 MFC set to  0.000000
9/8/2011	5:44:21 PM	PHl3 MFC set to  0.000000
9/8/2011	5:44:21 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:44:21 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:44:21 PM	Tube furnace set to 0
9/8/2011	5:44:51 PM	Helium valve closed
9/8/2011	5:44:51 PM	H2 valve closed
9/8/2011	5:44:51 PM	BCl3 valve closed
9/8/2011	5:44:51 PM	PH3 valve closed
9/8/2011	5:44:51 PM	SiCl4 pre valve closed
9/8/2011	5:44:51 PM	SiCl4 post valve closed
9/8/2011	5:44:51 PM	Bypass valve closed
9/8/2011	5:44:51 PM	Bubbler valve closed
9/8/2011	5:44:51 PM	Main Vac valve opened
9/8/2011	5:44:51 PM	Helium MFC set to  0.000000
9/8/2011	5:44:51 PM	H2 MFC set to  0.000000
9/8/2011	5:44:51 PM	BCl3 MFC set to  0.000000
9/8/2011	5:44:51 PM	PHl3 MFC set to  0.000000
9/8/2011	5:44:51 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:44:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:44:51 PM	Tube furnace set to 0
9/8/2011	5:45:21 PM	H2 valve closed
9/8/2011	5:45:21 PM	BCl3 valve closed
9/8/2011	5:45:21 PM	PH3 valve closed
9/8/2011	5:45:21 PM	SiCl4 pre valve closed
9/8/2011	5:45:21 PM	SiCl4 post valve closed
9/8/2011	5:45:21 PM	Bypass valve closed
9/8/2011	5:45:21 PM	Bubbler valve closed
9/8/2011	5:45:21 PM	Helium valve opened
9/8/2011	5:45:21 PM	Main Vac valve opened
9/8/2011	5:45:21 PM	Helium MFC set to  20.000000
9/8/2011	5:45:21 PM	H2 MFC set to  0.000000
9/8/2011	5:45:21 PM	BCl3 MFC set to  0.000000
9/8/2011	5:45:21 PM	PHl3 MFC set to  0.000000
9/8/2011	5:45:21 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:45:21 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:45:21 PM	Tube furnace set to 0
9/8/2011	5:45:51 PM	Helium valve closed
9/8/2011	5:45:51 PM	H2 valve closed
9/8/2011	5:45:51 PM	BCl3 valve closed
9/8/2011	5:45:51 PM	PH3 valve closed
9/8/2011	5:45:51 PM	SiCl4 pre valve closed
9/8/2011	5:45:51 PM	SiCl4 post valve closed
9/8/2011	5:45:51 PM	Bypass valve closed
9/8/2011	5:45:51 PM	Bubbler valve closed
9/8/2011	5:45:51 PM	Main Vac valve opened
9/8/2011	5:45:51 PM	Helium MFC set to  0.000000
9/8/2011	5:45:51 PM	H2 MFC set to  0.000000
9/8/2011	5:45:51 PM	BCl3 MFC set to  0.000000
9/8/2011	5:45:51 PM	PHl3 MFC set to  0.000000
9/8/2011	5:45:51 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:45:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:45:52 PM	Tube furnace set to 0
9/8/2011	5:46:22 PM	H2 valve closed
9/8/2011	5:46:22 PM	BCl3 valve closed
9/8/2011	5:46:22 PM	PH3 valve closed
9/8/2011	5:46:22 PM	SiCl4 pre valve closed
9/8/2011	5:46:22 PM	SiCl4 post valve closed
9/8/2011	5:46:22 PM	Bypass valve closed
9/8/2011	5:46:22 PM	Bubbler valve closed
9/8/2011	5:46:22 PM	Helium valve opened
9/8/2011	5:46:22 PM	Main Vac valve opened
9/8/2011	5:46:22 PM	Helium MFC set to  20.000000
9/8/2011	5:46:22 PM	H2 MFC set to  0.000000
9/8/2011	5:46:22 PM	BCl3 MFC set to  0.000000
9/8/2011	5:46:22 PM	PHl3 MFC set to  0.000000
9/8/2011	5:46:22 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:46:22 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:46:22 PM	Tube furnace set to 0
9/8/2011	5:46:52 PM	Helium valve closed
9/8/2011	5:46:52 PM	H2 valve closed
9/8/2011	5:46:52 PM	BCl3 valve closed
9/8/2011	5:46:52 PM	PH3 valve closed
9/8/2011	5:46:52 PM	SiCl4 pre valve closed
9/8/2011	5:46:52 PM	SiCl4 post valve closed
9/8/2011	5:46:52 PM	Bypass valve closed
9/8/2011	5:46:52 PM	Bubbler valve closed
9/8/2011	5:46:52 PM	Main Vac valve opened
9/8/2011	5:46:52 PM	Helium MFC set to  0.000000
9/8/2011	5:46:52 PM	H2 MFC set to  0.000000
9/8/2011	5:46:52 PM	BCl3 MFC set to  0.000000
9/8/2011	5:46:52 PM	PHl3 MFC set to  0.000000
9/8/2011	5:46:52 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:46:52 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:46:52 PM	Tube furnace set to 0
9/8/2011	5:47:22 PM	H2 valve closed
9/8/2011	5:47:22 PM	BCl3 valve closed
9/8/2011	5:47:22 PM	PH3 valve closed
9/8/2011	5:47:22 PM	SiCl4 pre valve closed
9/8/2011	5:47:22 PM	SiCl4 post valve closed
9/8/2011	5:47:22 PM	Bypass valve closed
9/8/2011	5:47:22 PM	Bubbler valve closed
9/8/2011	5:47:22 PM	Helium valve opened
9/8/2011	5:47:22 PM	Main Vac valve opened
9/8/2011	5:47:22 PM	Helium MFC set to  20.000000
9/8/2011	5:47:22 PM	H2 MFC set to  0.000000
9/8/2011	5:47:22 PM	BCl3 MFC set to  0.000000
9/8/2011	5:47:22 PM	PHl3 MFC set to  0.000000
9/8/2011	5:47:22 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:47:22 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:47:22 PM	Tube furnace set to 0
9/8/2011	5:47:52 PM	Helium valve closed
9/8/2011	5:47:52 PM	H2 valve closed
9/8/2011	5:47:52 PM	BCl3 valve closed
9/8/2011	5:47:52 PM	PH3 valve closed
9/8/2011	5:47:52 PM	SiCl4 pre valve closed
9/8/2011	5:47:52 PM	SiCl4 post valve closed
9/8/2011	5:47:52 PM	Bypass valve closed
9/8/2011	5:47:52 PM	Bubbler valve closed
9/8/2011	5:47:52 PM	Main Vac valve opened
9/8/2011	5:47:52 PM	Helium MFC set to  0.000000
9/8/2011	5:47:52 PM	H2 MFC set to  0.000000
9/8/2011	5:47:52 PM	BCl3 MFC set to  0.000000
9/8/2011	5:47:52 PM	PHl3 MFC set to  0.000000
9/8/2011	5:47:52 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:47:52 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:47:52 PM	Tube furnace set to 0
9/8/2011	5:48:23 PM	H2 valve closed
9/8/2011	5:48:23 PM	BCl3 valve closed
9/8/2011	5:48:23 PM	PH3 valve closed
9/8/2011	5:48:23 PM	SiCl4 pre valve closed
9/8/2011	5:48:23 PM	SiCl4 post valve closed
9/8/2011	5:48:23 PM	Bypass valve closed
9/8/2011	5:48:23 PM	Bubbler valve closed
9/8/2011	5:48:23 PM	Helium valve opened
9/8/2011	5:48:23 PM	Main Vac valve opened
9/8/2011	5:48:23 PM	Helium MFC set to  20.000000
9/8/2011	5:48:23 PM	H2 MFC set to  0.000000
9/8/2011	5:48:23 PM	BCl3 MFC set to  0.000000
9/8/2011	5:48:23 PM	PHl3 MFC set to  0.000000
9/8/2011	5:48:23 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:48:23 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:48:23 PM	Tube furnace set to 0
9/8/2011	5:48:53 PM	Helium valve closed
9/8/2011	5:48:53 PM	H2 valve closed
9/8/2011	5:48:53 PM	BCl3 valve closed
9/8/2011	5:48:53 PM	PH3 valve closed
9/8/2011	5:48:53 PM	SiCl4 pre valve closed
9/8/2011	5:48:53 PM	SiCl4 post valve closed
9/8/2011	5:48:53 PM	Bypass valve closed
9/8/2011	5:48:53 PM	Bubbler valve closed
9/8/2011	5:48:53 PM	Main Vac valve opened
9/8/2011	5:48:53 PM	Helium MFC set to  0.000000
9/8/2011	5:48:53 PM	H2 MFC set to  0.000000
9/8/2011	5:48:53 PM	BCl3 MFC set to  0.000000
9/8/2011	5:48:53 PM	PHl3 MFC set to  0.000000
9/8/2011	5:48:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:48:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:48:53 PM	Tube furnace set to 0
9/8/2011	5:49:23 PM	H2 valve closed
9/8/2011	5:49:23 PM	BCl3 valve closed
9/8/2011	5:49:23 PM	PH3 valve closed
9/8/2011	5:49:23 PM	SiCl4 pre valve closed
9/8/2011	5:49:23 PM	SiCl4 post valve closed
9/8/2011	5:49:23 PM	Bypass valve closed
9/8/2011	5:49:23 PM	Bubbler valve closed
9/8/2011	5:49:23 PM	Helium valve opened
9/8/2011	5:49:23 PM	Main Vac valve opened
9/8/2011	5:49:23 PM	Helium MFC set to  20.000000
9/8/2011	5:49:23 PM	H2 MFC set to  0.000000
9/8/2011	5:49:23 PM	BCl3 MFC set to  0.000000
9/8/2011	5:49:23 PM	PHl3 MFC set to  0.000000
9/8/2011	5:49:23 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:49:23 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:49:23 PM	Tube furnace set to 0
9/8/2011	5:49:53 PM	Helium valve closed
9/8/2011	5:49:53 PM	H2 valve closed
9/8/2011	5:49:53 PM	BCl3 valve closed
9/8/2011	5:49:53 PM	PH3 valve closed
9/8/2011	5:49:53 PM	SiCl4 pre valve closed
9/8/2011	5:49:53 PM	SiCl4 post valve closed
9/8/2011	5:49:53 PM	Bypass valve closed
9/8/2011	5:49:53 PM	Bubbler valve closed
9/8/2011	5:49:53 PM	Main Vac valve opened
9/8/2011	5:49:53 PM	Helium MFC set to  0.000000
9/8/2011	5:49:53 PM	H2 MFC set to  0.000000
9/8/2011	5:49:53 PM	BCl3 MFC set to  0.000000
9/8/2011	5:49:53 PM	PHl3 MFC set to  0.000000
9/8/2011	5:49:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:49:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:49:53 PM	Tube furnace set to 0
9/8/2011	5:50:23 PM	H2 valve closed
9/8/2011	5:50:23 PM	BCl3 valve closed
9/8/2011	5:50:23 PM	PH3 valve closed
9/8/2011	5:50:23 PM	SiCl4 pre valve closed
9/8/2011	5:50:23 PM	SiCl4 post valve closed
9/8/2011	5:50:23 PM	Bypass valve closed
9/8/2011	5:50:23 PM	Bubbler valve closed
9/8/2011	5:50:23 PM	Helium valve opened
9/8/2011	5:50:23 PM	Main Vac valve opened
9/8/2011	5:50:23 PM	Helium MFC set to  20.000000
9/8/2011	5:50:23 PM	H2 MFC set to  0.000000
9/8/2011	5:50:23 PM	BCl3 MFC set to  0.000000
9/8/2011	5:50:23 PM	PHl3 MFC set to  0.000000
9/8/2011	5:50:23 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:50:23 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:50:24 PM	Tube furnace set to 0
9/8/2011	5:50:33 PM	Helium valve closed
9/8/2011	5:50:33 PM	H2 valve closed
9/8/2011	5:50:33 PM	BCl3 valve closed
9/8/2011	5:50:33 PM	PH3 valve closed
9/8/2011	5:50:33 PM	SiCl4 pre valve closed
9/8/2011	5:50:33 PM	SiCl4 post valve closed
9/8/2011	5:50:33 PM	Bypass valve closed
9/8/2011	5:50:33 PM	Bubbler valve closed
9/8/2011	5:50:33 PM	Main Vac valve opened
9/8/2011	5:50:33 PM	Helium MFC set to  0.000000
9/8/2011	5:50:33 PM	H2 MFC set to  0.000000
9/8/2011	5:50:33 PM	BCl3 MFC set to  0.000000
9/8/2011	5:50:33 PM	PHl3 MFC set to  0.000000
9/8/2011	5:50:33 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:50:33 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:50:33 PM	Tube furnace set to 0
9/8/2011	5:50:54 PM	Run aborted at 5:50 PM
9/8/2011	5:50:54 PM	Helium valve closed
9/8/2011	5:50:54 PM	H2 valve closed
9/8/2011	5:50:54 PM	BCl3 valve closed
9/8/2011	5:50:54 PM	PH3 valve closed
9/8/2011	5:50:54 PM	SiCl4 pre valve closed
9/8/2011	5:50:54 PM	SiCl4 post valve closed
9/8/2011	5:50:54 PM	Bypass valve closed
9/8/2011	5:50:54 PM	Main Vac valve closed
9/8/2011	5:50:54 PM	Bubbler valve closed
9/8/2011	5:50:54 PM	Helium MFC set to  0.000000
9/8/2011	5:50:54 PM	H2 MFC set to  0.000000
9/8/2011	5:50:54 PM	BCl3 MFC set to  0.000000
9/8/2011	5:50:54 PM	PHl3 MFC set to  0.000000
9/8/2011	5:50:54 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:50:54 PM	Tube furnace set to 0
9/8/2011	5:50:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/8/2011	5:51:05 PM	Main Vac valve opened
9/8/2011	5:51:09 PM	Main Vac valve closed
9/8/2011	5:51:19 PM	Main Vac valve opened
9/8/2011	5:52:02 PM	Recipe started at 5:52 PM
9/8/2011	5:52:02 PM	Helium valve closed
9/8/2011	5:52:02 PM	H2 valve closed
9/8/2011	5:52:02 PM	BCl3 valve closed
9/8/2011	5:52:02 PM	PH3 valve closed
9/8/2011	5:52:02 PM	SiCl4 pre valve closed
9/8/2011	5:52:02 PM	SiCl4 post valve closed
9/8/2011	5:52:02 PM	Main Vac valve closed
9/8/2011	5:52:02 PM	Bypass valve closed
9/8/2011	5:52:02 PM	Bubbler valve closed
9/8/2011	5:52:02 PM	Helium MFC set to  0.000000
9/8/2011	5:52:02 PM	H2 MFC set to  0.000000
9/8/2011	5:52:02 PM	BCl3 MFC set to  0.000000
9/8/2011	5:52:02 PM	PHl3 MFC set to  0.000000
9/8/2011	5:52:02 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:52:02 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:52:03 PM	Tube furnace set to 0
9/8/2011	5:52:06 PM	Helium valve closed
9/8/2011	5:52:06 PM	BCl3 valve closed
9/8/2011	5:52:06 PM	PH3 valve closed
9/8/2011	5:52:06 PM	SiCl4 pre valve closed
9/8/2011	5:52:06 PM	SiCl4 post valve closed
9/8/2011	5:52:06 PM	Main Vac valve closed
9/8/2011	5:52:06 PM	Bypass valve closed
9/8/2011	5:52:06 PM	Bubbler valve closed
9/8/2011	5:52:06 PM	H2 valve opened
9/8/2011	5:52:06 PM	Helium MFC set to  0.000000
9/8/2011	5:52:06 PM	H2 MFC set to  500.000000
9/8/2011	5:52:06 PM	BCl3 MFC set to  0.000000
9/8/2011	5:52:06 PM	PHl3 MFC set to  0.000000
9/8/2011	5:52:06 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:52:06 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:52:06 PM	Tube furnace set to 0
9/8/2011	5:53:12 PM	Helium valve closed
9/8/2011	5:53:12 PM	BCl3 valve closed
9/8/2011	5:53:12 PM	PH3 valve closed
9/8/2011	5:53:12 PM	SiCl4 pre valve closed
9/8/2011	5:53:12 PM	SiCl4 post valve closed
9/8/2011	5:53:12 PM	Main Vac valve closed
9/8/2011	5:53:12 PM	Bypass valve closed
9/8/2011	5:53:12 PM	H2 valve opened
9/8/2011	5:53:12 PM	Bubbler valve opened
9/8/2011	5:53:12 PM	Helium MFC set to  0.000000
9/8/2011	5:53:12 PM	H2 MFC set to  500.000000
9/8/2011	5:53:12 PM	BCl3 MFC set to  0.000000
9/8/2011	5:53:12 PM	PHl3 MFC set to  0.000000
9/8/2011	5:53:12 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:53:12 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:53:12 PM	Tube furnace set to 0
9/8/2011	5:53:13 PM	Helium valve closed
9/8/2011	5:53:13 PM	BCl3 valve closed
9/8/2011	5:53:13 PM	PH3 valve closed
9/8/2011	5:53:13 PM	SiCl4 pre valve closed
9/8/2011	5:53:13 PM	SiCl4 post valve closed
9/8/2011	5:53:13 PM	Main Vac valve closed
9/8/2011	5:53:13 PM	Bypass valve closed
9/8/2011	5:53:13 PM	H2 valve opened
9/8/2011	5:53:13 PM	Bubbler valve opened
9/8/2011	5:53:13 PM	Helium MFC set to  0.000000
9/8/2011	5:53:13 PM	H2 MFC set to  500.000000
9/8/2011	5:53:13 PM	BCl3 MFC set to  0.000000
9/8/2011	5:53:13 PM	PHl3 MFC set to  0.000000
9/8/2011	5:53:13 PM	SiCl4 MFC set to  0.000000
9/8/2011	5:53:13 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	5:53:13 PM	Tube furnace set to 1000
9/8/2011	6:13:13 PM	Helium valve closed
9/8/2011	6:13:13 PM	PH3 valve closed
9/8/2011	6:13:13 PM	Main Vac valve closed
9/8/2011	6:13:13 PM	Bypass valve closed
9/8/2011	6:13:13 PM	H2 valve opened
9/8/2011	6:13:13 PM	BCl3 valve opened
9/8/2011	6:13:13 PM	SiCl4 pre valve opened
9/8/2011	6:13:13 PM	SiCl4 post valve opened
9/8/2011	6:13:13 PM	Bubbler valve opened
9/8/2011	6:13:13 PM	Helium MFC set to  0.000000
9/8/2011	6:13:13 PM	H2 MFC set to  500.000000
9/8/2011	6:13:13 PM	BCl3 MFC set to  2.100000
9/8/2011	6:13:13 PM	PHl3 MFC set to  0.000000
9/8/2011	6:13:13 PM	SiCl4 MFC set to  50.000000
9/8/2011	6:13:13 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:13:13 PM	Tube furnace set to 1000
9/8/2011	6:29:53 PM	Helium valve closed
9/8/2011	6:29:53 PM	BCl3 valve closed
9/8/2011	6:29:53 PM	PH3 valve closed
9/8/2011	6:29:53 PM	SiCl4 pre valve closed
9/8/2011	6:29:53 PM	SiCl4 post valve closed
9/8/2011	6:29:53 PM	Main Vac valve closed
9/8/2011	6:29:53 PM	Bypass valve closed
9/8/2011	6:29:53 PM	H2 valve opened
9/8/2011	6:29:53 PM	Bubbler valve opened
9/8/2011	6:29:53 PM	Helium MFC set to  0.000000
9/8/2011	6:29:53 PM	H2 MFC set to  500.000000
9/8/2011	6:29:53 PM	BCl3 MFC set to  0.000000
9/8/2011	6:29:53 PM	PHl3 MFC set to  0.000000
9/8/2011	6:29:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	6:29:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:29:53 PM	Tube furnace set to 750
9/8/2011	6:34:53 PM	H2 valve closed
9/8/2011	6:34:53 PM	BCl3 valve closed
9/8/2011	6:34:53 PM	PH3 valve closed
9/8/2011	6:34:53 PM	SiCl4 pre valve closed
9/8/2011	6:34:53 PM	SiCl4 post valve closed
9/8/2011	6:34:53 PM	Main Vac valve closed
9/8/2011	6:34:53 PM	Bypass valve closed
9/8/2011	6:34:53 PM	Helium valve opened
9/8/2011	6:34:53 PM	Bubbler valve opened
9/8/2011	6:34:53 PM	Helium MFC set to  500.000000
9/8/2011	6:34:53 PM	H2 MFC set to  0.000000
9/8/2011	6:34:53 PM	BCl3 MFC set to  0.000000
9/8/2011	6:34:53 PM	PHl3 MFC set to  0.000000
9/8/2011	6:34:53 PM	SiCl4 MFC set to  0.000000
9/8/2011	6:34:53 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:34:53 PM	Tube furnace set to 0
9/8/2011	6:39:27 PM	Helium valve closed
9/8/2011	6:39:27 PM	H2 valve closed
9/8/2011	6:39:27 PM	BCl3 valve closed
9/8/2011	6:39:27 PM	PH3 valve closed
9/8/2011	6:39:27 PM	SiCl4 pre valve closed
9/8/2011	6:39:27 PM	SiCl4 post valve closed
9/8/2011	6:39:27 PM	Main Vac valve closed
9/8/2011	6:39:27 PM	Bypass valve closed
9/8/2011	6:39:27 PM	Bubbler valve closed
9/8/2011	6:39:27 PM	Helium MFC set to  0.000000
9/8/2011	6:39:27 PM	H2 MFC set to  0.000000
9/8/2011	6:39:27 PM	BCl3 MFC set to  0.000000
9/8/2011	6:39:27 PM	PHl3 MFC set to  0.000000
9/8/2011	6:39:27 PM	SiCl4 MFC set to  0.000000
9/8/2011	6:39:27 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:39:27 PM	Tube furnace set to 0
9/8/2011	6:39:28 PM	Run finished at 6:39 PM
9/8/2011	6:46:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2011	6:46:44 PM	Recipe started at 6:46 PM
9/8/2011	6:46:44 PM	Helium valve closed
9/8/2011	6:46:44 PM	H2 valve closed
9/8/2011	6:46:44 PM	BCl3 valve closed
9/8/2011	6:46:44 PM	PH3 valve closed
9/8/2011	6:46:44 PM	SiCl4 pre valve closed
9/8/2011	6:46:44 PM	SiCl4 post valve closed
9/8/2011	6:46:44 PM	Main Vac valve closed
9/8/2011	6:46:44 PM	Bubbler valve closed
9/8/2011	6:46:44 PM	Bypass valve opened
9/8/2011	6:46:44 PM	Helium MFC set to  0.000000
9/8/2011	6:46:44 PM	H2 MFC set to  0.000000
9/8/2011	6:46:44 PM	BCl3 MFC set to  0.000000
9/8/2011	6:46:44 PM	PHl3 MFC set to  0.000000
9/8/2011	6:46:44 PM	SiCl4 MFC set to  0.000000
9/8/2011	6:46:44 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:46:44 PM	Tube furnace set to 0
9/8/2011	6:47:45 PM	Helium valve closed
9/8/2011	6:47:45 PM	H2 valve closed
9/8/2011	6:47:45 PM	BCl3 valve closed
9/8/2011	6:47:45 PM	PH3 valve closed
9/8/2011	6:47:45 PM	SiCl4 pre valve closed
9/8/2011	6:47:45 PM	SiCl4 post valve closed
9/8/2011	6:47:45 PM	Main Vac valve closed
9/8/2011	6:47:45 PM	Bubbler valve closed
9/8/2011	6:47:45 PM	Bypass valve opened
9/8/2011	6:47:45 PM	Helium MFC set to  0.000000
9/8/2011	6:47:45 PM	H2 MFC set to  0.000000
9/8/2011	6:47:45 PM	BCl3 MFC set to  0.000000
9/8/2011	6:47:45 PM	PHl3 MFC set to  0.000000
9/8/2011	6:47:45 PM	SiCl4 MFC set to  0.000000
9/8/2011	6:47:45 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:47:45 PM	Tube furnace set to 0
9/8/2011	6:48:45 PM	Helium valve closed
9/8/2011	6:48:45 PM	H2 valve closed
9/8/2011	6:48:45 PM	BCl3 valve closed
9/8/2011	6:48:45 PM	PH3 valve closed
9/8/2011	6:48:45 PM	SiCl4 pre valve closed
9/8/2011	6:48:45 PM	SiCl4 post valve closed
9/8/2011	6:48:45 PM	Bypass valve closed
9/8/2011	6:48:45 PM	Bubbler valve closed
9/8/2011	6:48:45 PM	Main Vac valve opened
9/8/2011	6:48:45 PM	Helium MFC set to  0.000000
9/8/2011	6:48:45 PM	H2 MFC set to  0.000000
9/8/2011	6:48:45 PM	BCl3 MFC set to  0.000000
9/8/2011	6:48:45 PM	PHl3 MFC set to  0.000000
9/8/2011	6:48:45 PM	SiCl4 MFC set to  0.000000
9/8/2011	6:48:45 PM	Bypass solenoid MFC set to  0.000000
9/8/2011	6:48:46 PM	Tube furnace set to 0
9/8/2011	6:48:47 PM	Run finished at 6:48 PM
9/8/2011	6:48:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
